JPS61177443U - - Google Patents
Info
- Publication number
- JPS61177443U JPS61177443U JP6040985U JP6040985U JPS61177443U JP S61177443 U JPS61177443 U JP S61177443U JP 6040985 U JP6040985 U JP 6040985U JP 6040985 U JP6040985 U JP 6040985U JP S61177443 U JPS61177443 U JP S61177443U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etched
- substrate
- etching liquid
- jetted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985060409U JPH0143863Y2 (enrdf_load_stackoverflow) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985060409U JPH0143863Y2 (enrdf_load_stackoverflow) | 1985-04-24 | 1985-04-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61177443U true JPS61177443U (enrdf_load_stackoverflow) | 1986-11-05 |
JPH0143863Y2 JPH0143863Y2 (enrdf_load_stackoverflow) | 1989-12-19 |
Family
ID=30587730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985060409U Expired JPH0143863Y2 (enrdf_load_stackoverflow) | 1985-04-24 | 1985-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0143863Y2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015503240A (ja) * | 2011-12-16 | 2015-01-29 | エルジー シルトロン インコーポレイテッド | 枚葉式ウェハエッチング装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585342U (ja) * | 1981-06-30 | 1983-01-13 | 富士通株式会社 | ウェハ−表面処理装置 |
-
1985
- 1985-04-24 JP JP1985060409U patent/JPH0143863Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585342U (ja) * | 1981-06-30 | 1983-01-13 | 富士通株式会社 | ウェハ−表面処理装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015503240A (ja) * | 2011-12-16 | 2015-01-29 | エルジー シルトロン インコーポレイテッド | 枚葉式ウェハエッチング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0143863Y2 (enrdf_load_stackoverflow) | 1989-12-19 |