JPS61177443U - - Google Patents

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Publication number
JPS61177443U
JPS61177443U JP6040985U JP6040985U JPS61177443U JP S61177443 U JPS61177443 U JP S61177443U JP 6040985 U JP6040985 U JP 6040985U JP 6040985 U JP6040985 U JP 6040985U JP S61177443 U JPS61177443 U JP S61177443U
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JP
Japan
Prior art keywords
etching
etched
substrate
etching liquid
jetted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6040985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143863Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985060409U priority Critical patent/JPH0143863Y2/ja
Publication of JPS61177443U publication Critical patent/JPS61177443U/ja
Application granted granted Critical
Publication of JPH0143863Y2 publication Critical patent/JPH0143863Y2/ja
Expired legal-status Critical Current

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  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP1985060409U 1985-04-24 1985-04-24 Expired JPH0143863Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985060409U JPH0143863Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985060409U JPH0143863Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Publications (2)

Publication Number Publication Date
JPS61177443U true JPS61177443U (enrdf_load_stackoverflow) 1986-11-05
JPH0143863Y2 JPH0143863Y2 (enrdf_load_stackoverflow) 1989-12-19

Family

ID=30587730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985060409U Expired JPH0143863Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPH0143863Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015503240A (ja) * 2011-12-16 2015-01-29 エルジー シルトロン インコーポレイテッド 枚葉式ウェハエッチング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585342U (ja) * 1981-06-30 1983-01-13 富士通株式会社 ウェハ−表面処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585342U (ja) * 1981-06-30 1983-01-13 富士通株式会社 ウェハ−表面処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015503240A (ja) * 2011-12-16 2015-01-29 エルジー シルトロン インコーポレイテッド 枚葉式ウェハエッチング装置

Also Published As

Publication number Publication date
JPH0143863Y2 (enrdf_load_stackoverflow) 1989-12-19

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