JPH0110925Y2 - - Google Patents

Info

Publication number
JPH0110925Y2
JPH0110925Y2 JP1981144931U JP14493181U JPH0110925Y2 JP H0110925 Y2 JPH0110925 Y2 JP H0110925Y2 JP 1981144931 U JP1981144931 U JP 1981144931U JP 14493181 U JP14493181 U JP 14493181U JP H0110925 Y2 JPH0110925 Y2 JP H0110925Y2
Authority
JP
Japan
Prior art keywords
wafer
mounting part
processing liquid
running water
slope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981144931U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5849437U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14493181U priority Critical patent/JPS5849437U/ja
Publication of JPS5849437U publication Critical patent/JPS5849437U/ja
Application granted granted Critical
Publication of JPH0110925Y2 publication Critical patent/JPH0110925Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Weting (AREA)
JP14493181U 1981-09-29 1981-09-29 基板表面処理装置 Granted JPS5849437U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14493181U JPS5849437U (ja) 1981-09-29 1981-09-29 基板表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14493181U JPS5849437U (ja) 1981-09-29 1981-09-29 基板表面処理装置

Publications (2)

Publication Number Publication Date
JPS5849437U JPS5849437U (ja) 1983-04-04
JPH0110925Y2 true JPH0110925Y2 (enrdf_load_stackoverflow) 1989-03-29

Family

ID=29937879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14493181U Granted JPS5849437U (ja) 1981-09-29 1981-09-29 基板表面処理装置

Country Status (1)

Country Link
JP (1) JPS5849437U (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547115Y2 (enrdf_load_stackoverflow) * 1973-08-17 1979-04-03
JPS55124232A (en) * 1979-03-20 1980-09-25 Matsushita Electric Ind Co Ltd Application method of substrate treatment solution and the device therefor
JPS5660021A (en) * 1979-10-19 1981-05-23 Fujitsu Ltd Etching for semiconductor device

Also Published As

Publication number Publication date
JPS5849437U (ja) 1983-04-04

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