JP7821323B2 - エラー要因解析装置、および、エラー要因解析方法 - Google Patents

エラー要因解析装置、および、エラー要因解析方法

Info

Publication number
JP7821323B2
JP7821323B2 JP2024558565A JP2024558565A JP7821323B2 JP 7821323 B2 JP7821323 B2 JP 7821323B2 JP 2024558565 A JP2024558565 A JP 2024558565A JP 2024558565 A JP2024558565 A JP 2024558565A JP 7821323 B2 JP7821323 B2 JP 7821323B2
Authority
JP
Japan
Prior art keywords
error
sub
analysis device
degree
data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024558565A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024105811A1 (https=
Inventor
泰浩 吉田
昌義 石川
二大 笹嶋
栄生 大越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of JPWO2024105811A1 publication Critical patent/JPWO2024105811A1/ja
Application granted granted Critical
Publication of JP7821323B2 publication Critical patent/JP7821323B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0275—Fault isolation and identification, e.g. classify fault; estimate cause or root of failure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0243—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults model based detection method, e.g. first-principles knowledge model
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Physics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Debugging And Monitoring (AREA)
  • Testing And Monitoring For Control Systems (AREA)
JP2024558565A 2022-11-16 2022-11-16 エラー要因解析装置、および、エラー要因解析方法 Active JP7821323B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/042563 WO2024105811A1 (ja) 2022-11-16 2022-11-16 エラー要因解析装置、および、エラー要因解析方法

Publications (2)

Publication Number Publication Date
JPWO2024105811A1 JPWO2024105811A1 (https=) 2024-05-23
JP7821323B2 true JP7821323B2 (ja) 2026-02-26

Family

ID=91084051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024558565A Active JP7821323B2 (ja) 2022-11-16 2022-11-16 エラー要因解析装置、および、エラー要因解析方法

Country Status (5)

Country Link
JP (1) JP7821323B2 (https=)
KR (1) KR20250076593A (https=)
CN (1) CN120153466A (https=)
TW (1) TWI863659B (https=)
WO (1) WO2024105811A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021044611A1 (ja) 2019-09-06 2021-03-11 株式会社日立ハイテク レシピ情報提示システム、レシピエラー推定システム
WO2021199164A1 (ja) 2020-03-30 2021-10-07 株式会社日立ハイテク 診断システム

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4661371B2 (ja) 2005-06-02 2011-03-30 オムロン株式会社 基板検査システム
US8838413B2 (en) * 2011-05-12 2014-09-16 Saudi Arabian Oil Company Valve actuator fault analysis system
KR101965839B1 (ko) * 2017-08-18 2019-04-05 주식회사 티맥스 소프트 구성정보 관리 데이터베이스 기반의 it 시스템 장애 분석 기법
JP7029585B2 (ja) * 2017-09-19 2022-03-04 パナソニックＩｐマネジメント株式会社 エラー要因推定装置およびエラー要因推定方法
WO2021053738A1 (ja) * 2019-09-18 2021-03-25 三菱電機株式会社 作業要素分析装置及び作業要素分析方法
WO2022059183A1 (ja) * 2020-09-18 2022-03-24 三菱電機株式会社 情報処理装置、情報処理方法及び情報処理プログラム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021044611A1 (ja) 2019-09-06 2021-03-11 株式会社日立ハイテク レシピ情報提示システム、レシピエラー推定システム
WO2021199164A1 (ja) 2020-03-30 2021-10-07 株式会社日立ハイテク 診断システム

Also Published As

Publication number Publication date
TWI863659B (zh) 2024-11-21
CN120153466A (zh) 2025-06-13
KR20250076593A (ko) 2025-05-29
TW202422258A (zh) 2024-06-01
WO2024105811A1 (ja) 2024-05-23
JPWO2024105811A1 (https=) 2024-05-23

Similar Documents

Publication Publication Date Title
JP7354421B2 (ja) エラー要因の推定装置及び推定方法
EP3502966B1 (en) Data generation apparatus, data generation method, and data generation program
JP7748798B2 (ja) 教師なし異常検出及び高次元センサデータの多数決投票による原因説明のための方法及びシステム
JP2000057349A (ja) 欠陥の分類方法およびその装置並びに教示用データ作成方法
CN114245933B (zh) 制程信息提示系统、制程错误推定系统
TWI801973B (zh) 錯誤因素之推定裝置及推定方法
CN109285791B (zh) 设计布局为主的快速在线缺陷诊断、分类及取样方法及系统
CN113009823B (zh) 用于控制机器的方法和设备
CN112805719B (zh) 分类半导体样本中的缺陷
JP2009068946A (ja) 欠陥分類装置および方法並びにプログラム
JP4355193B2 (ja) 半導体デバイスの製造方法及び半導体デバイス製造システム
CN112529109A (zh) 一种基于无监督多模型的异常检测方法及系统
TWI841020B (zh) 誤差因素估計裝置、誤差因素估計方法、及電腦可讀取媒體
JP2025539375A (ja) インデックス作成と半導体欠陥画像検索のためのモデリング
JP2006318263A (ja) 情報分析システム、情報分析方法及びプログラム
JP7821323B2 (ja) エラー要因解析装置、および、エラー要因解析方法
JP4758619B2 (ja) 問題工程特定方法および装置
CN117529803A (zh) 用于主动良率管理的制造指纹
JP5566616B2 (ja) 特性解析装置、特性解析方法をコンピュータに実行させるためのプログラム、上記プログラムを記録したコンピュータ読み取り可能な記録媒体
CN116848513A (zh) 数据分析装置、数据分析系统和程序
JP2023038095A (ja) 装置管理システム、装置の障害原因推定方法、及びプログラム
CN116894965A (zh) 教师数据收集方法以及收集装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250417

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20260120

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20260213

R150 Certificate of patent or registration of utility model

Ref document number: 7821323

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150