JP7796030B2 - 液滴吐出ヘッド用のアクチュエータ構成要素およびその製造方法 - Google Patents

液滴吐出ヘッド用のアクチュエータ構成要素およびその製造方法

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Publication number
JP7796030B2
JP7796030B2 JP2022554198A JP2022554198A JP7796030B2 JP 7796030 B2 JP7796030 B2 JP 7796030B2 JP 2022554198 A JP2022554198 A JP 2022554198A JP 2022554198 A JP2022554198 A JP 2022554198A JP 7796030 B2 JP7796030 B2 JP 7796030B2
Authority
JP
Japan
Prior art keywords
openings
piezoelectric material
fluid
fluid chamber
strips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022554198A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023523522A5 (enExample
JP2023523522A (ja
Inventor
マイケル ウォルシュ
アリン リステア
コリン ブルック
ジェームス カイエ
ピーター ボルトリック
ニコラス ジャクソン
ジョン テイタム
マイケル ワトソン
エドワード バートン
ジェームス アーノルド
ライアン マコーミック
ジョナサン バーカー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xaar Technology Ltd
Original Assignee
Xaar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xaar Technology Ltd filed Critical Xaar Technology Ltd
Publication of JP2023523522A publication Critical patent/JP2023523522A/ja
Publication of JP2023523522A5 publication Critical patent/JP2023523522A5/ja
Application granted granted Critical
Publication of JP7796030B2 publication Critical patent/JP7796030B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1618—Fixing the piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14459—Matrix arrangement of the pressure chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/10—Finger type piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2022554198A 2020-04-27 2021-04-27 液滴吐出ヘッド用のアクチュエータ構成要素およびその製造方法 Active JP7796030B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2006182.6A GB2594471B (en) 2020-04-27 2020-04-27 An actuator component for a droplet ejection head and method for manufacturing the same
GB2006182.6 2020-04-27
PCT/GB2021/051012 WO2021219987A1 (en) 2020-04-27 2021-04-27 An actuator component for a droplet ejection head and method for manufacturing the same

Publications (3)

Publication Number Publication Date
JP2023523522A JP2023523522A (ja) 2023-06-06
JP2023523522A5 JP2023523522A5 (enExample) 2024-05-08
JP7796030B2 true JP7796030B2 (ja) 2026-01-08

Family

ID=71080317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022554198A Active JP7796030B2 (ja) 2020-04-27 2021-04-27 液滴吐出ヘッド用のアクチュエータ構成要素およびその製造方法

Country Status (6)

Country Link
US (1) US12275242B2 (enExample)
EP (1) EP4143029A1 (enExample)
JP (1) JP7796030B2 (enExample)
CN (1) CN115298032A (enExample)
GB (1) GB2594471B (enExample)
WO (1) WO2021219987A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023032310A (ja) * 2021-08-26 2023-03-09 東芝テック株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP2023032315A (ja) * 2021-08-26 2023-03-09 東芝テック株式会社 液体吐出ヘッド及び液体吐出装置
JP7724106B2 (ja) * 2021-08-26 2025-08-15 理想テクノロジーズ株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP7634445B2 (ja) * 2021-08-26 2025-02-21 理想テクノロジーズ株式会社 液体吐出ヘッド
JP7692780B2 (ja) * 2021-09-24 2025-06-16 理想テクノロジーズ株式会社 液体吐出ヘッド
JP7650783B2 (ja) * 2021-11-24 2025-03-25 理想テクノロジーズ株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP7725345B2 (ja) * 2021-11-24 2025-08-19 理想テクノロジーズ株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP7788294B2 (ja) * 2022-01-26 2025-12-18 理想テクノロジーズ株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP7891364B2 (ja) * 2022-05-19 2026-07-16 理想テクノロジーズ株式会社 液体吐出ヘッド

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015189031A (ja) 2014-03-27 2015-11-02 東芝テック株式会社 インクジェットヘッド、インクジェット記録装置およびインクジェットヘッドの製造方法
JP2018043426A (ja) 2016-09-15 2018-03-22 東芝テック株式会社 インクジェットヘッド及びインクジェットヘッドの製造方法

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US5432540A (en) 1992-02-25 1995-07-11 Citizen Watch Co., Ltd. Ink jet head
US5414916A (en) 1993-05-20 1995-05-16 Compaq Computer Corporation Ink jet printhead assembly having aligned dual internal channel arrays
JP3163878B2 (ja) 1993-11-11 2001-05-08 ブラザー工業株式会社 インク噴射装置
JPH10272771A (ja) * 1997-03-31 1998-10-13 Brother Ind Ltd インクジェットヘッド
JP3767172B2 (ja) * 1998-06-02 2006-04-19 コニカミノルタホールディングス株式会社 インクジェットヘッド
JP2001088309A (ja) * 1999-09-24 2001-04-03 Brother Ind Ltd インクジェットヘッドの製造方法
JP2002326351A (ja) * 2001-04-27 2002-11-12 Sii Printek Inc ヘッドチップ
JP5291347B2 (ja) * 2008-01-11 2013-09-18 エスアイアイ・プリンテック株式会社 インクジェットヘッドチップ、インクジェットヘッドチップの駆動方法、インクジェットヘッド、及びインクジェット記録装置
KR20110047129A (ko) * 2009-10-29 2011-05-06 에스아이아이 프린텍 가부시키가이샤 액체 분사 헤드, 액체 분사 장치 및 액체 분사 헤드의 제조 방법
JP5750753B2 (ja) * 2011-01-11 2015-07-22 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5580759B2 (ja) 2011-02-23 2014-08-27 エスアイアイ・プリンテック株式会社 液体噴射ヘッドの製造方法、液体噴射ヘッド及び液体噴射装置
JP6128820B2 (ja) * 2011-12-22 2017-05-17 キヤノン株式会社 液体吐出ヘッド
JP6278656B2 (ja) * 2013-10-17 2018-02-14 エスアイアイ・プリンテック株式会社 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの製造方法
JP6278692B2 (ja) 2013-12-24 2018-02-14 エスアイアイ・プリンテック株式会社 液体噴射ヘッド及び液体噴射装置
JP6333586B2 (ja) * 2014-03-12 2018-05-30 エスアイアイ・プリンテック株式会社 液体噴射ヘッド、及び液体噴射装置
JP6393130B2 (ja) 2014-09-12 2018-09-19 エスアイアイ・プリンテック株式会社 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの製造方法
JP2016137589A (ja) * 2015-01-26 2016-08-04 株式会社東芝 インクジェットヘッド及びインクジェットプリンタ
GB2547951A (en) * 2016-03-04 2017-09-06 Xaar Technology Ltd Droplet deposition head and manifold component therefor
GB2575871A (en) * 2018-07-27 2020-01-29 Xaar Technology Ltd Droplet ejection head, manifold component therefor, and design method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015189031A (ja) 2014-03-27 2015-11-02 東芝テック株式会社 インクジェットヘッド、インクジェット記録装置およびインクジェットヘッドの製造方法
JP2018043426A (ja) 2016-09-15 2018-03-22 東芝テック株式会社 インクジェットヘッド及びインクジェットヘッドの製造方法

Also Published As

Publication number Publication date
US12275242B2 (en) 2025-04-15
GB202006182D0 (en) 2020-06-10
GB2594471B (en) 2022-12-21
EP4143029A1 (en) 2023-03-08
US20230347648A1 (en) 2023-11-02
JP2023523522A (ja) 2023-06-06
CN115298032A (zh) 2022-11-04
WO2021219987A1 (en) 2021-11-04
GB2594471A (en) 2021-11-03

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