CN115298032A - 用于液滴喷射头的致动器组件及其制造方法 - Google Patents

用于液滴喷射头的致动器组件及其制造方法 Download PDF

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Publication number
CN115298032A
CN115298032A CN202180021207.5A CN202180021207A CN115298032A CN 115298032 A CN115298032 A CN 115298032A CN 202180021207 A CN202180021207 A CN 202180021207A CN 115298032 A CN115298032 A CN 115298032A
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CN
China
Prior art keywords
openings
actuator assembly
fluid chamber
piezoelectric material
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180021207.5A
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English (en)
Chinese (zh)
Inventor
迈克尔·沃尔什
阿林·里斯泰亚
科林·布鲁克
詹姆斯·凯
彼得·波尔特里克
尼古拉斯·杰克逊
约翰·泰特姆
M·沃森
爱德华·伯顿
詹姆斯·阿诺德
瑞恩·麦考密克
乔纳森·巴克
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Xaar Technology Ltd
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Xaar Technology Ltd
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Publication date
Application filed by Xaar Technology Ltd filed Critical Xaar Technology Ltd
Publication of CN115298032A publication Critical patent/CN115298032A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1618—Fixing the piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14459—Matrix arrangement of the pressure chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/10—Finger type piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN202180021207.5A 2020-04-27 2021-04-27 用于液滴喷射头的致动器组件及其制造方法 Pending CN115298032A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2006182.6A GB2594471B (en) 2020-04-27 2020-04-27 An actuator component for a droplet ejection head and method for manufacturing the same
GB2006182.6 2020-04-27
PCT/GB2021/051012 WO2021219987A1 (en) 2020-04-27 2021-04-27 An actuator component for a droplet ejection head and method for manufacturing the same

Publications (1)

Publication Number Publication Date
CN115298032A true CN115298032A (zh) 2022-11-04

Family

ID=71080317

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180021207.5A Pending CN115298032A (zh) 2020-04-27 2021-04-27 用于液滴喷射头的致动器组件及其制造方法

Country Status (6)

Country Link
US (1) US12275242B2 (enExample)
EP (1) EP4143029A1 (enExample)
JP (1) JP7796030B2 (enExample)
CN (1) CN115298032A (enExample)
GB (1) GB2594471B (enExample)
WO (1) WO2021219987A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115723431A (zh) * 2021-08-26 2023-03-03 东芝泰格有限公司 液体喷出头及液体喷出装置
CN115891431A (zh) * 2021-08-26 2023-04-04 东芝泰格有限公司 液体喷出头及液体喷出头的制造方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023032310A (ja) * 2021-08-26 2023-03-09 東芝テック株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP7634445B2 (ja) * 2021-08-26 2025-02-21 理想テクノロジーズ株式会社 液体吐出ヘッド
JP7692780B2 (ja) * 2021-09-24 2025-06-16 理想テクノロジーズ株式会社 液体吐出ヘッド
JP7650783B2 (ja) * 2021-11-24 2025-03-25 理想テクノロジーズ株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP7725345B2 (ja) * 2021-11-24 2025-08-19 理想テクノロジーズ株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP7788294B2 (ja) * 2022-01-26 2025-12-18 理想テクノロジーズ株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP7891364B2 (ja) * 2022-05-19 2026-07-16 理想テクノロジーズ株式会社 液体吐出ヘッド

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JP2015189031A (ja) * 2014-03-27 2015-11-02 東芝テック株式会社 インクジェットヘッド、インクジェット記録装置およびインクジェットヘッドの製造方法
US20180072058A1 (en) * 2016-09-15 2018-03-15 Toshiba Tec Kabushiki Kaisha Inkjet head and method of manufacturing inkjet head
CN108778752A (zh) * 2016-03-04 2018-11-09 赛尔科技有限公司 液滴沉积头部及用于其的歧管部件
WO2020021284A1 (en) * 2018-07-27 2020-01-30 Xaar Technology Limited Droplet ejection head, manifold component therefor, and design method

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JP3163878B2 (ja) 1993-11-11 2001-05-08 ブラザー工業株式会社 インク噴射装置
JPH10272771A (ja) * 1997-03-31 1998-10-13 Brother Ind Ltd インクジェットヘッド
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JP2001088309A (ja) * 1999-09-24 2001-04-03 Brother Ind Ltd インクジェットヘッドの製造方法
JP2002326351A (ja) * 2001-04-27 2002-11-12 Sii Printek Inc ヘッドチップ
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JP5750753B2 (ja) * 2011-01-11 2015-07-22 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5580759B2 (ja) 2011-02-23 2014-08-27 エスアイアイ・プリンテック株式会社 液体噴射ヘッドの製造方法、液体噴射ヘッド及び液体噴射装置
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JP2015189031A (ja) * 2014-03-27 2015-11-02 東芝テック株式会社 インクジェットヘッド、インクジェット記録装置およびインクジェットヘッドの製造方法
CN108778752A (zh) * 2016-03-04 2018-11-09 赛尔科技有限公司 液滴沉积头部及用于其的歧管部件
US20180072058A1 (en) * 2016-09-15 2018-03-15 Toshiba Tec Kabushiki Kaisha Inkjet head and method of manufacturing inkjet head
WO2020021284A1 (en) * 2018-07-27 2020-01-30 Xaar Technology Limited Droplet ejection head, manifold component therefor, and design method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115723431A (zh) * 2021-08-26 2023-03-03 东芝泰格有限公司 液体喷出头及液体喷出装置
CN115891431A (zh) * 2021-08-26 2023-04-04 东芝泰格有限公司 液体喷出头及液体喷出头的制造方法

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Publication number Publication date
US12275242B2 (en) 2025-04-15
GB202006182D0 (en) 2020-06-10
GB2594471B (en) 2022-12-21
EP4143029A1 (en) 2023-03-08
US20230347648A1 (en) 2023-11-02
JP2023523522A (ja) 2023-06-06
JP7796030B2 (ja) 2026-01-08
WO2021219987A1 (en) 2021-11-04
GB2594471A (en) 2021-11-03

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