JP7781884B2 - ３段式ターボ分子ポンプおよびブースターポンプを備えた質量分析計用漏洩検知装置 - Google Patents

３段式ターボ分子ポンプおよびブースターポンプを備えた質量分析計用漏洩検知装置

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Publication number
JP7781884B2
JP7781884B2 JP2023535465A JP2023535465A JP7781884B2 JP 7781884 B2 JP7781884 B2 JP 7781884B2 JP 2023535465 A JP2023535465 A JP 2023535465A JP 2023535465 A JP2023535465 A JP 2023535465A JP 7781884 B2 JP7781884 B2 JP 7781884B2
Authority
JP
Japan
Prior art keywords
pump
stage
turbomolecular
output
booster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023535465A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023552606A (ja
JP2023552606A5 (https=
Inventor
デッカー・シルヴィオ
ミツォタキス・シモン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of JP2023552606A publication Critical patent/JP2023552606A/ja
Publication of JP2023552606A5 publication Critical patent/JP2023552606A5/ja
Application granted granted Critical
Publication of JP7781884B2 publication Critical patent/JP7781884B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Examining Or Testing Airtightness (AREA)
JP2023535465A 2020-12-10 2021-09-21 ３段式ターボ分子ポンプおよびブースターポンプを備えた質量分析計用漏洩検知装置 Active JP7781884B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020132896.6A DE102020132896A1 (de) 2020-12-10 2020-12-10 Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
DE102020132896.6 2020-12-10
PCT/EP2021/075897 WO2022122206A1 (de) 2020-12-10 2021-09-21 Vorrichtung zur massenspektrometrischen leckdetektion mit dreistufiger turbomolekularpumpe und boosterpumpe

Publications (3)

Publication Number Publication Date
JP2023552606A JP2023552606A (ja) 2023-12-18
JP2023552606A5 JP2023552606A5 (https=) 2024-05-14
JP7781884B2 true JP7781884B2 (ja) 2025-12-08

Family

ID=77998967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023535465A Active JP7781884B2 (ja) 2020-12-10 2021-09-21 ３段式ターボ分子ポンプおよびブースターポンプを備えた質量分析計用漏洩検知装置

Country Status (8)

Country Link
US (1) US20240044737A1 (https=)
EP (1) EP4259939B1 (https=)
JP (1) JP7781884B2 (https=)
KR (1) KR20230124907A (https=)
CN (1) CN116601391B (https=)
DE (1) DE102020132896A1 (https=)
TW (1) TWI894400B (https=)
WO (1) WO2022122206A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130028757A1 (en) 2010-03-31 2013-01-31 Edwards Limited Vacuum pumping system
JP2014504735A (ja) 2011-02-03 2014-02-24 オーリコン レイボルド バキューム ゲーエムベーハー 漏れ検出デバイス
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion
JP2019523882A (ja) 2016-06-15 2019-08-29 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ 共通のシャフト上にターボ分子ポンプおよびブースターポンプを有する質量分析式漏洩検出器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344345B1 (de) 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE4343912A1 (de) 1993-12-22 1995-06-29 Leybold Ag Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE10302987A1 (de) * 2003-01-25 2004-08-05 Inficon Gmbh Lecksuchgerät mit einem Einlass
DE10308420A1 (de) 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
DE10319633A1 (de) 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
FR2878913B1 (fr) * 2004-12-03 2007-01-19 Cit Alcatel Controle des pressions partielles de gaz pour optimisation de procede
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät
WO2014191748A1 (en) * 2013-05-31 2014-12-04 Micromass Uk Limited Compact mass spectrometer
FR3039273B1 (fr) * 2015-07-20 2017-08-11 Pfeiffer Vacuum Sas Procede de controle de l'etancheite de produits scelles et installation de detection de fuites
DE102015222213A1 (de) * 2015-11-11 2017-05-11 Inficon Gmbh Druckmessung am Prüfgaseinlass

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130028757A1 (en) 2010-03-31 2013-01-31 Edwards Limited Vacuum pumping system
JP2014504735A (ja) 2011-02-03 2014-02-24 オーリコン レイボルド バキューム ゲーエムベーハー 漏れ検出デバイス
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion
JP2019523882A (ja) 2016-06-15 2019-08-29 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ 共通のシャフト上にターボ分子ポンプおよびブースターポンプを有する質量分析式漏洩検出器

Also Published As

Publication number Publication date
TWI894400B (zh) 2025-08-21
JP2023552606A (ja) 2023-12-18
CN116601391B (zh) 2026-04-10
KR20230124907A (ko) 2023-08-28
CN116601391A (zh) 2023-08-15
DE102020132896A1 (de) 2022-06-15
WO2022122206A1 (de) 2022-06-16
EP4259939A1 (de) 2023-10-18
TW202227792A (zh) 2022-07-16
EP4259939B1 (de) 2025-12-24
US20240044737A1 (en) 2024-02-08

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