CN116601391B - 具有三级涡轮分子泵和增压泵的用于质谱泄漏检测的装置 - Google Patents

具有三级涡轮分子泵和增压泵的用于质谱泄漏检测的装置

Info

Publication number
CN116601391B
CN116601391B CN202180082542.6A CN202180082542A CN116601391B CN 116601391 B CN116601391 B CN 116601391B CN 202180082542 A CN202180082542 A CN 202180082542A CN 116601391 B CN116601391 B CN 116601391B
Authority
CN
China
Prior art keywords
pump
stage
turbomolecular
output
booster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180082542.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN116601391A (zh
Inventor
西尔维奥·德克尔
西蒙·马蒂乌达基斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of CN116601391A publication Critical patent/CN116601391A/zh
Application granted granted Critical
Publication of CN116601391B publication Critical patent/CN116601391B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Examining Or Testing Airtightness (AREA)
CN202180082542.6A 2020-12-10 2021-09-21 具有三级涡轮分子泵和增压泵的用于质谱泄漏检测的装置 Active CN116601391B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020132896.6A DE102020132896A1 (de) 2020-12-10 2020-12-10 Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
DE102020132896.6 2020-12-10
PCT/EP2021/075897 WO2022122206A1 (de) 2020-12-10 2021-09-21 Vorrichtung zur massenspektrometrischen leckdetektion mit dreistufiger turbomolekularpumpe und boosterpumpe

Publications (2)

Publication Number Publication Date
CN116601391A CN116601391A (zh) 2023-08-15
CN116601391B true CN116601391B (zh) 2026-04-10

Family

ID=77998967

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180082542.6A Active CN116601391B (zh) 2020-12-10 2021-09-21 具有三级涡轮分子泵和增压泵的用于质谱泄漏检测的装置

Country Status (8)

Country Link
US (1) US20240044737A1 (https=)
EP (1) EP4259939B1 (https=)
JP (1) JP7781884B2 (https=)
KR (1) KR20230124907A (https=)
CN (1) CN116601391B (https=)
DE (1) DE102020132896A1 (https=)
TW (1) TWI894400B (https=)
WO (1) WO2022122206A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014223841A1 (de) * 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344345B1 (de) 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE4343912A1 (de) 1993-12-22 1995-06-29 Leybold Ag Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE10302987A1 (de) * 2003-01-25 2004-08-05 Inficon Gmbh Lecksuchgerät mit einem Einlass
DE10308420A1 (de) 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
DE10319633A1 (de) 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
FR2878913B1 (fr) * 2004-12-03 2007-01-19 Cit Alcatel Controle des pressions partielles de gaz pour optimisation de procede
GB201005459D0 (en) * 2010-03-31 2010-05-19 Edwards Ltd Vacuum pumping system
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät
EP2671060B1 (de) * 2011-02-03 2015-08-19 Oerlikon Leybold Vacuum GmbH Lecksucheinrichtung
WO2014191748A1 (en) * 2013-05-31 2014-12-04 Micromass Uk Limited Compact mass spectrometer
FR3039273B1 (fr) * 2015-07-20 2017-08-11 Pfeiffer Vacuum Sas Procede de controle de l'etancheite de produits scelles et installation de detection de fuites
DE102015222213A1 (de) * 2015-11-11 2017-05-11 Inficon Gmbh Druckmessung am Prüfgaseinlass
DE102016210701A1 (de) * 2016-06-15 2017-12-21 Inficon Gmbh Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014223841A1 (de) * 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion

Also Published As

Publication number Publication date
TWI894400B (zh) 2025-08-21
JP2023552606A (ja) 2023-12-18
KR20230124907A (ko) 2023-08-28
CN116601391A (zh) 2023-08-15
DE102020132896A1 (de) 2022-06-15
WO2022122206A1 (de) 2022-06-16
EP4259939A1 (de) 2023-10-18
TW202227792A (zh) 2022-07-16
JP7781884B2 (ja) 2025-12-08
EP4259939B1 (de) 2025-12-24
US20240044737A1 (en) 2024-02-08

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