KR20230124907A - 3단 터보분자 펌프와 부스터 펌프를 이용한 질량-분석 누출 감지 장치 - Google Patents

3단 터보분자 펌프와 부스터 펌프를 이용한 질량-분석 누출 감지 장치 Download PDF

Info

Publication number
KR20230124907A
KR20230124907A KR1020237020242A KR20237020242A KR20230124907A KR 20230124907 A KR20230124907 A KR 20230124907A KR 1020237020242 A KR1020237020242 A KR 1020237020242A KR 20237020242 A KR20237020242 A KR 20237020242A KR 20230124907 A KR20230124907 A KR 20230124907A
Authority
KR
South Korea
Prior art keywords
pump
stage
detection device
leak detection
turbomolecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237020242A
Other languages
English (en)
Korean (ko)
Inventor
실비오 데커
시몬 매띠오다키스
Original Assignee
인피콘 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 인피콘 게엠베하 filed Critical 인피콘 게엠베하
Publication of KR20230124907A publication Critical patent/KR20230124907A/ko
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Examining Or Testing Airtightness (AREA)
KR1020237020242A 2020-12-10 2021-09-21 3단 터보분자 펌프와 부스터 펌프를 이용한 질량-분석 누출 감지 장치 Pending KR20230124907A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020132896.6A DE102020132896A1 (de) 2020-12-10 2020-12-10 Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
DE102020132896.6 2020-12-10
PCT/EP2021/075897 WO2022122206A1 (de) 2020-12-10 2021-09-21 Vorrichtung zur massenspektrometrischen leckdetektion mit dreistufiger turbomolekularpumpe und boosterpumpe

Publications (1)

Publication Number Publication Date
KR20230124907A true KR20230124907A (ko) 2023-08-28

Family

ID=77998967

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237020242A Pending KR20230124907A (ko) 2020-12-10 2021-09-21 3단 터보분자 펌프와 부스터 펌프를 이용한 질량-분석 누출 감지 장치

Country Status (8)

Country Link
US (1) US20240044737A1 (https=)
EP (1) EP4259939B1 (https=)
JP (1) JP7781884B2 (https=)
KR (1) KR20230124907A (https=)
CN (1) CN116601391B (https=)
DE (1) DE102020132896A1 (https=)
TW (1) TWI894400B (https=)
WO (1) WO2022122206A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344345B1 (de) 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
DE4343912A1 (de) 1993-12-22 1995-06-29 Leybold Ag Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE10302987A1 (de) * 2003-01-25 2004-08-05 Inficon Gmbh Lecksuchgerät mit einem Einlass
DE10308420A1 (de) 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
DE10319633A1 (de) 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
FR2878913B1 (fr) * 2004-12-03 2007-01-19 Cit Alcatel Controle des pressions partielles de gaz pour optimisation de procede
GB201005459D0 (en) * 2010-03-31 2010-05-19 Edwards Ltd Vacuum pumping system
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät
EP2671060B1 (de) * 2011-02-03 2015-08-19 Oerlikon Leybold Vacuum GmbH Lecksucheinrichtung
WO2014191748A1 (en) * 2013-05-31 2014-12-04 Micromass Uk Limited Compact mass spectrometer
DE102014223841A1 (de) 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion
FR3039273B1 (fr) * 2015-07-20 2017-08-11 Pfeiffer Vacuum Sas Procede de controle de l'etancheite de produits scelles et installation de detection de fuites
DE102015222213A1 (de) * 2015-11-11 2017-05-11 Inficon Gmbh Druckmessung am Prüfgaseinlass
DE102016210701A1 (de) * 2016-06-15 2017-12-21 Inficon Gmbh Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle

Also Published As

Publication number Publication date
TWI894400B (zh) 2025-08-21
JP2023552606A (ja) 2023-12-18
CN116601391B (zh) 2026-04-10
CN116601391A (zh) 2023-08-15
DE102020132896A1 (de) 2022-06-15
WO2022122206A1 (de) 2022-06-16
EP4259939A1 (de) 2023-10-18
TW202227792A (zh) 2022-07-16
JP7781884B2 (ja) 2025-12-08
EP4259939B1 (de) 2025-12-24
US20240044737A1 (en) 2024-02-08

Similar Documents

Publication Publication Date Title
CN101517390B (zh) 嗅测检漏器
JP2013532833A (ja) 漏れ検出装置
US11933284B2 (en) Multiple chamber vacuum exhaust system
US12492960B2 (en) Vacuum leak detection system, gas control unit and method for gas leak detection
JP4164030B2 (ja) 試験ガス漏れ検出装置
CN111213043B (zh) 用于检查待测物体的密封性的泄漏检测器
CN105556272A (zh) 具有多级隔膜泵的嗅探泄漏探测器
JP4357528B2 (ja) リークディテクタ
RU2728446C2 (ru) Масс-спектрометрический течеискатель с турбомолекулярным насосом и бустерным насосом на общем валу
KR20230124907A (ko) 3단 터보분자 펌프와 부스터 펌프를 이용한 질량-분석 누출 감지 장치
US5974864A (en) Leak detector with back-up pump
US6397660B1 (en) Gas analyzing apparatus
US6021663A (en) Process and leak detector for inspecting a plurality of similar test bodies for leaks
US5193380A (en) High flow-rate leak detector having three molecular filters
JP2024545492A (ja) 多段真空ポンプ及び一体型特定ガス用ガスセンサを備えた真空リークディテクタならびに真空リークディテクタの製造方法
JP2023552606A5 (https=)
CN117413165A (zh) 泄漏检测器
TW201625911A (zh) 逆流滲漏偵測裝置及方法
JP2025536150A5 (https=)
US6282946B1 (en) Leak detector
US20240310234A1 (en) Leak detectors
CN119256215A (zh) 使用质谱逆流泄漏检测装置测量轻质气体的环境浓度的方法
JP2004340726A (ja) 漏洩検知装置
KR20200105826A (ko) 진공 펌프 시스템
JPS5835434A (ja) リ−クデテクタ

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D21 Rejection of application intended

Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D21-EXM-PE0902 (AS PROVIDED BY THE NATIONAL OFFICE)

PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11 Amendment of application requested

Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000