JP2025536150A5 - - Google Patents

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Publication number
JP2025536150A5
JP2025536150A5 JP2025526582A JP2025526582A JP2025536150A5 JP 2025536150 A5 JP2025536150 A5 JP 2025536150A5 JP 2025526582 A JP2025526582 A JP 2025526582A JP 2025526582 A JP2025526582 A JP 2025526582A JP 2025536150 A5 JP2025536150 A5 JP 2025536150A5
Authority
JP
Japan
Prior art keywords
test chamber
leak detection
detector
gas
flow restriction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025526582A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025536150A (ja
Filing date
Publication date
Priority claimed from DE102022129858.2A external-priority patent/DE102022129858A1/de
Application filed filed Critical
Publication of JP2025536150A publication Critical patent/JP2025536150A/ja
Publication of JP2025536150A5 publication Critical patent/JP2025536150A5/ja
Pending legal-status Critical Current

Links

JP2025526582A 2022-11-11 2023-10-02 試験体のリーク検知を行うキャリアガスリーク検知システムおよびキャリアガスリーク検知方法 Pending JP2025536150A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102022129858.2A DE102022129858A1 (de) 2022-11-11 2022-11-11 Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling
DE102022129858.2 2022-11-11
PCT/EP2023/077236 WO2024099639A1 (de) 2022-11-11 2023-10-02 Trägergas-lecksuchsystem und trägergas-lecksuchverfahren zur leckagedetektion an einem prüfling

Publications (2)

Publication Number Publication Date
JP2025536150A JP2025536150A (ja) 2025-10-31
JP2025536150A5 true JP2025536150A5 (https=) 2026-04-27

Family

ID=88287362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025526582A Pending JP2025536150A (ja) 2022-11-11 2023-10-02 試験体のリーク検知を行うキャリアガスリーク検知システムおよびキャリアガスリーク検知方法

Country Status (6)

Country Link
EP (1) EP4616163A1 (https=)
JP (1) JP2025536150A (https=)
KR (1) KR20250103629A (https=)
CN (1) CN120077255A (https=)
DE (1) DE102022129858A1 (https=)
WO (1) WO2024099639A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024129173A1 (de) * 2024-10-09 2026-04-09 Inficon Gmbh Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10324596A1 (de) * 2003-05-30 2004-12-16 Inficon Gmbh Lecksuchgerät
JP6220286B2 (ja) * 2014-02-27 2017-10-25 株式会社フクダ 漏れ試験方法及び装置
DE102020119600A1 (de) * 2020-07-24 2022-01-27 Inficon Gmbh Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche

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