DE102022129858A1 - Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling - Google Patents

Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling Download PDF

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Publication number
DE102022129858A1
DE102022129858A1 DE102022129858.2A DE102022129858A DE102022129858A1 DE 102022129858 A1 DE102022129858 A1 DE 102022129858A1 DE 102022129858 A DE102022129858 A DE 102022129858A DE 102022129858 A1 DE102022129858 A1 DE 102022129858A1
Authority
DE
Germany
Prior art keywords
test chamber
gas
detector
leak detection
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102022129858.2A
Other languages
German (de)
English (en)
Inventor
Daniel Wetzig
Maximilian Reismann
Hjalmar Bruhns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Priority to DE102022129858.2A priority Critical patent/DE102022129858A1/de
Priority to JP2025526582A priority patent/JP2025536150A/ja
Priority to KR1020257014001A priority patent/KR20250103629A/ko
Priority to EP23783807.3A priority patent/EP4616163A1/de
Priority to PCT/EP2023/077236 priority patent/WO2024099639A1/de
Priority to CN202380071955.3A priority patent/CN120077255A/zh
Publication of DE102022129858A1 publication Critical patent/DE102022129858A1/de
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
DE102022129858.2A 2022-11-11 2022-11-11 Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling Pending DE102022129858A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102022129858.2A DE102022129858A1 (de) 2022-11-11 2022-11-11 Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling
JP2025526582A JP2025536150A (ja) 2022-11-11 2023-10-02 試験体のリーク検知を行うキャリアガスリーク検知システムおよびキャリアガスリーク検知方法
KR1020257014001A KR20250103629A (ko) 2022-11-11 2023-10-02 시험 표본의 누출 검출을 위한 캐리어 가스 누출 검출 시스템 및 캐리어 가스 누출 검출 방법
EP23783807.3A EP4616163A1 (de) 2022-11-11 2023-10-02 Trägergas-lecksuchsystem und trägergas-lecksuchverfahren zur leckagedetektion an einem prüfling
PCT/EP2023/077236 WO2024099639A1 (de) 2022-11-11 2023-10-02 Trägergas-lecksuchsystem und trägergas-lecksuchverfahren zur leckagedetektion an einem prüfling
CN202380071955.3A CN120077255A (zh) 2022-11-11 2023-10-02 用于对测试样品进行泄漏检测的载气泄漏检测系统及载气泄漏检测方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102022129858.2A DE102022129858A1 (de) 2022-11-11 2022-11-11 Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling

Publications (1)

Publication Number Publication Date
DE102022129858A1 true DE102022129858A1 (de) 2024-05-16

Family

ID=88287362

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102022129858.2A Pending DE102022129858A1 (de) 2022-11-11 2022-11-11 Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling

Country Status (6)

Country Link
EP (1) EP4616163A1 (https=)
JP (1) JP2025536150A (https=)
KR (1) KR20250103629A (https=)
CN (1) CN120077255A (https=)
DE (1) DE102022129858A1 (https=)
WO (1) WO2024099639A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024129173A1 (de) * 2024-10-09 2026-04-09 Inficon Gmbh Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015161555A (ja) * 2014-02-27 2015-09-07 株式会社フクダ 漏れ試験方法及び装置
DE102020119600A1 (de) * 2020-07-24 2022-01-27 Inficon Gmbh Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10324596A1 (de) * 2003-05-30 2004-12-16 Inficon Gmbh Lecksuchgerät

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015161555A (ja) * 2014-02-27 2015-09-07 株式会社フクダ 漏れ試験方法及び装置
DE102020119600A1 (de) * 2020-07-24 2022-01-27 Inficon Gmbh Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024129173A1 (de) * 2024-10-09 2026-04-09 Inficon Gmbh Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases

Also Published As

Publication number Publication date
KR20250103629A (ko) 2025-07-07
WO2024099639A1 (de) 2024-05-16
CN120077255A (zh) 2025-05-30
JP2025536150A (ja) 2025-10-31
EP4616163A1 (de) 2025-09-17

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