CN120077255A - 用于对测试样品进行泄漏检测的载气泄漏检测系统及载气泄漏检测方法 - Google Patents

用于对测试样品进行泄漏检测的载气泄漏检测系统及载气泄漏检测方法 Download PDF

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Publication number
CN120077255A
CN120077255A CN202380071955.3A CN202380071955A CN120077255A CN 120077255 A CN120077255 A CN 120077255A CN 202380071955 A CN202380071955 A CN 202380071955A CN 120077255 A CN120077255 A CN 120077255A
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CN
China
Prior art keywords
test chamber
gas
detector
flow
gas line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380071955.3A
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English (en)
Chinese (zh)
Inventor
丹尼尔·维茨格
马克西米利安·赖斯曼
亚尔马尔·布鲁恩斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of CN120077255A publication Critical patent/CN120077255A/zh
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205Accessories or associated equipment; Pump constructions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
CN202380071955.3A 2022-11-11 2023-10-02 用于对测试样品进行泄漏检测的载气泄漏检测系统及载气泄漏检测方法 Pending CN120077255A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102022129858.2A DE102022129858A1 (de) 2022-11-11 2022-11-11 Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling
DE102022129858.2 2022-11-11
PCT/EP2023/077236 WO2024099639A1 (de) 2022-11-11 2023-10-02 Trägergas-lecksuchsystem und trägergas-lecksuchverfahren zur leckagedetektion an einem prüfling

Publications (1)

Publication Number Publication Date
CN120077255A true CN120077255A (zh) 2025-05-30

Family

ID=88287362

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380071955.3A Pending CN120077255A (zh) 2022-11-11 2023-10-02 用于对测试样品进行泄漏检测的载气泄漏检测系统及载气泄漏检测方法

Country Status (6)

Country Link
EP (1) EP4616163A1 (https=)
JP (1) JP2025536150A (https=)
KR (1) KR20250103629A (https=)
CN (1) CN120077255A (https=)
DE (1) DE102022129858A1 (https=)
WO (1) WO2024099639A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024129173A1 (de) * 2024-10-09 2026-04-09 Inficon Gmbh Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10324596A1 (de) * 2003-05-30 2004-12-16 Inficon Gmbh Lecksuchgerät
JP6220286B2 (ja) * 2014-02-27 2017-10-25 株式会社フクダ 漏れ試験方法及び装置
DE102020119600A1 (de) * 2020-07-24 2022-01-27 Inficon Gmbh Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche

Also Published As

Publication number Publication date
DE102022129858A1 (de) 2024-05-16
WO2024099639A1 (de) 2024-05-16
KR20250103629A (ko) 2025-07-07
JP2025536150A (ja) 2025-10-31
EP4616163A1 (de) 2025-09-17

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