KR20250103629A - 시험 표본의 누출 검출을 위한 캐리어 가스 누출 검출 시스템 및 캐리어 가스 누출 검출 방법 - Google Patents

시험 표본의 누출 검출을 위한 캐리어 가스 누출 검출 시스템 및 캐리어 가스 누출 검출 방법 Download PDF

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Publication number
KR20250103629A
KR20250103629A KR1020257014001A KR20257014001A KR20250103629A KR 20250103629 A KR20250103629 A KR 20250103629A KR 1020257014001 A KR1020257014001 A KR 1020257014001A KR 20257014001 A KR20257014001 A KR 20257014001A KR 20250103629 A KR20250103629 A KR 20250103629A
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KR
South Korea
Prior art keywords
test chamber
gas
detector
vacuum pump
carrier gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257014001A
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English (en)
Korean (ko)
Inventor
다니엘 베트치히
막시밀리안 라이스만
햘마 브룬스
?l마 브룬스
Original Assignee
인피콘 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 인피콘 게엠베하 filed Critical 인피콘 게엠베하
Publication of KR20250103629A publication Critical patent/KR20250103629A/ko
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
KR1020257014001A 2022-11-11 2023-10-02 시험 표본의 누출 검출을 위한 캐리어 가스 누출 검출 시스템 및 캐리어 가스 누출 검출 방법 Pending KR20250103629A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102022129858.2A DE102022129858A1 (de) 2022-11-11 2022-11-11 Trägergas-Lecksuchsystem und Trägergas-Lecksuchverfahren zur Leckagedetektion an einem Prüfling
DE102022129858.2 2022-11-11
PCT/EP2023/077236 WO2024099639A1 (de) 2022-11-11 2023-10-02 Trägergas-lecksuchsystem und trägergas-lecksuchverfahren zur leckagedetektion an einem prüfling

Publications (1)

Publication Number Publication Date
KR20250103629A true KR20250103629A (ko) 2025-07-07

Family

ID=88287362

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257014001A Pending KR20250103629A (ko) 2022-11-11 2023-10-02 시험 표본의 누출 검출을 위한 캐리어 가스 누출 검출 시스템 및 캐리어 가스 누출 검출 방법

Country Status (6)

Country Link
EP (1) EP4616163A1 (https=)
JP (1) JP2025536150A (https=)
KR (1) KR20250103629A (https=)
CN (1) CN120077255A (https=)
DE (1) DE102022129858A1 (https=)
WO (1) WO2024099639A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024129173A1 (de) * 2024-10-09 2026-04-09 Inficon Gmbh Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10324596A1 (de) * 2003-05-30 2004-12-16 Inficon Gmbh Lecksuchgerät
JP6220286B2 (ja) * 2014-02-27 2017-10-25 株式会社フクダ 漏れ試験方法及び装置
DE102020119600A1 (de) * 2020-07-24 2022-01-27 Inficon Gmbh Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche

Also Published As

Publication number Publication date
DE102022129858A1 (de) 2024-05-16
WO2024099639A1 (de) 2024-05-16
JP2025536150A (ja) 2025-10-31
CN120077255A (zh) 2025-05-30
EP4616163A1 (de) 2025-09-17

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