JP2024535384A5 - - Google Patents
Info
- Publication number
- JP2024535384A5 JP2024535384A5 JP2024518613A JP2024518613A JP2024535384A5 JP 2024535384 A5 JP2024535384 A5 JP 2024535384A5 JP 2024518613 A JP2024518613 A JP 2024518613A JP 2024518613 A JP2024518613 A JP 2024518613A JP 2024535384 A5 JP2024535384 A5 JP 2024535384A5
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- pump
- test chamber
- space
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102021125707.7 | 2021-10-04 | ||
| DE102021125707.7A DE102021125707A1 (de) | 2021-10-04 | 2021-10-04 | Lecksuche bei viskoser Strömung |
| PCT/EP2022/075305 WO2023057173A1 (de) | 2021-10-04 | 2022-09-12 | Lecksuche bei viskoser strömung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024535384A JP2024535384A (ja) | 2024-09-30 |
| JP2024535384A5 true JP2024535384A5 (https=) | 2025-02-20 |
Family
ID=83506542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024518613A Pending JP2024535384A (ja) | 2021-10-04 | 2022-09-12 | 粘性流のリーク検知 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20250130133A1 (https=) |
| EP (1) | EP4413345A1 (https=) |
| JP (1) | JP2024535384A (https=) |
| KR (1) | KR20240087676A (https=) |
| CN (1) | CN118076869A (https=) |
| DE (1) | DE102021125707A1 (https=) |
| WO (1) | WO2023057173A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102024129173A1 (de) * | 2024-10-09 | 2026-04-09 | Inficon Gmbh | Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5767391A (en) * | 1996-11-25 | 1998-06-16 | Taiwan Semiconductor Manufacturing Company, Ltd | Leakage detect tool for vacuum bellows |
| DE19846798A1 (de) | 1998-10-10 | 2000-04-13 | Leybold Vakuum Gmbh | Einrichtung zur integralen Testgas-Lecksuche sowie Betriebsverfahren dafür |
| JP2001257164A (ja) * | 2000-03-10 | 2001-09-21 | Hitachi Kokusai Electric Inc | 基板処理装置、基板処理方法及び圧力制御方法 |
| CN101126673B (zh) * | 2000-09-26 | 2012-08-15 | 马丁·莱曼 | 一种装配和测试封闭容器的方法 |
| DE102005009713A1 (de) * | 2005-03-03 | 2006-09-07 | Inficon Gmbh | Lecksuchgerät mit Schnüffelsonde |
| DE102009059824A1 (de) * | 2009-12-21 | 2011-06-22 | Inficon GmbH, 50968 | Verfahren und Vorrichtung zur Leckbestimmung |
| TWM454545U (zh) * | 2013-02-01 | 2013-06-01 | Jusun Instr Co Ltd | 充電電池檢測設備 |
| DE102016205381B4 (de) * | 2016-03-31 | 2023-11-30 | Inficon Gmbh | Gaslecksuche mit einer Testgassprühvorrichtung |
| JP6228285B1 (ja) * | 2016-11-15 | 2017-11-08 | 守 藤山 | エアリーク検査装置及び方法 |
| DE202019005500U1 (de) * | 2019-08-08 | 2020-10-15 | Inficon Gmbh | Vorrichtung zur Dichtheitsprüfung eines flüssigkeitsgefüllten Prüflings |
| CN112326157A (zh) * | 2020-10-30 | 2021-02-05 | 刘占峰 | 一种食品包装负压式气密检测装置 |
| DE102021115463A1 (de) * | 2021-06-15 | 2022-12-15 | Inficon Gmbh | Leckdetektionsvorrichtung |
| DE102021132252A1 (de) * | 2021-12-08 | 2023-06-15 | Inficon Gmbh | Vakuumleckdetektor mit mehrstufiger Vakuumpumpe und integriertem gasspezifischem Gassensor sowie Verfahren zum Herstellen eines Vakuumleckdetektors |
| DE102021134647A1 (de) * | 2021-12-23 | 2023-06-29 | Inficon Gmbh | Vakuumlecksucher mit Ansprüh-Membran-Testleck und Verfahren |
-
2021
- 2021-10-04 DE DE102021125707.7A patent/DE102021125707A1/de active Pending
-
2022
- 2022-09-12 JP JP2024518613A patent/JP2024535384A/ja active Pending
- 2022-09-12 KR KR1020247007985A patent/KR20240087676A/ko active Pending
- 2022-09-12 CN CN202280062952.9A patent/CN118076869A/zh active Pending
- 2022-09-12 WO PCT/EP2022/075305 patent/WO2023057173A1/de not_active Ceased
- 2022-09-12 EP EP22782489.3A patent/EP4413345A1/de active Pending
- 2022-09-12 US US18/693,119 patent/US20250130133A1/en active Pending
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