KR20240087676A - 점성 유동에서 누출 검출 - Google Patents

점성 유동에서 누출 검출 Download PDF

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Publication number
KR20240087676A
KR20240087676A KR1020247007985A KR20247007985A KR20240087676A KR 20240087676 A KR20240087676 A KR 20240087676A KR 1020247007985 A KR1020247007985 A KR 1020247007985A KR 20247007985 A KR20247007985 A KR 20247007985A KR 20240087676 A KR20240087676 A KR 20240087676A
Authority
KR
South Korea
Prior art keywords
vacuum
test chamber
pump
leak detection
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247007985A
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English (en)
Korean (ko)
Inventor
다니엘 베트찌히
디알 예시카 브라흐타우저
세바스찬 바이스
Original Assignee
인피콘 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 인피콘 게엠베하 filed Critical 인피콘 게엠베하
Publication of KR20240087676A publication Critical patent/KR20240087676A/ko
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/34Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by testing the possibility of maintaining the vacuum in containers, e.g. in can-testing machines

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
KR1020247007985A 2021-10-04 2022-09-12 점성 유동에서 누출 검출 Pending KR20240087676A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021125707.7 2021-10-04
DE102021125707.7A DE102021125707A1 (de) 2021-10-04 2021-10-04 Lecksuche bei viskoser Strömung
PCT/EP2022/075305 WO2023057173A1 (de) 2021-10-04 2022-09-12 Lecksuche bei viskoser strömung

Publications (1)

Publication Number Publication Date
KR20240087676A true KR20240087676A (ko) 2024-06-19

Family

ID=83506542

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247007985A Pending KR20240087676A (ko) 2021-10-04 2022-09-12 점성 유동에서 누출 검출

Country Status (7)

Country Link
US (1) US20250130133A1 (https=)
EP (1) EP4413345A1 (https=)
JP (1) JP2024535384A (https=)
KR (1) KR20240087676A (https=)
CN (1) CN118076869A (https=)
DE (1) DE102021125707A1 (https=)
WO (1) WO2023057173A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024129173A1 (de) * 2024-10-09 2026-04-09 Inficon Gmbh Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5767391A (en) * 1996-11-25 1998-06-16 Taiwan Semiconductor Manufacturing Company, Ltd Leakage detect tool for vacuum bellows
DE19846798A1 (de) 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Einrichtung zur integralen Testgas-Lecksuche sowie Betriebsverfahren dafür
JP2001257164A (ja) * 2000-03-10 2001-09-21 Hitachi Kokusai Electric Inc 基板処理装置、基板処理方法及び圧力制御方法
CN101126673B (zh) * 2000-09-26 2012-08-15 马丁·莱曼 一种装配和测试封闭容器的方法
DE102005009713A1 (de) * 2005-03-03 2006-09-07 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102009059824A1 (de) * 2009-12-21 2011-06-22 Inficon GmbH, 50968 Verfahren und Vorrichtung zur Leckbestimmung
TWM454545U (zh) * 2013-02-01 2013-06-01 Jusun Instr Co Ltd 充電電池檢測設備
DE102016205381B4 (de) * 2016-03-31 2023-11-30 Inficon Gmbh Gaslecksuche mit einer Testgassprühvorrichtung
JP6228285B1 (ja) * 2016-11-15 2017-11-08 守 藤山 エアリーク検査装置及び方法
DE202019005500U1 (de) * 2019-08-08 2020-10-15 Inficon Gmbh Vorrichtung zur Dichtheitsprüfung eines flüssigkeitsgefüllten Prüflings
CN112326157A (zh) * 2020-10-30 2021-02-05 刘占峰 一种食品包装负压式气密检测装置
DE102021115463A1 (de) * 2021-06-15 2022-12-15 Inficon Gmbh Leckdetektionsvorrichtung
DE102021132252A1 (de) * 2021-12-08 2023-06-15 Inficon Gmbh Vakuumleckdetektor mit mehrstufiger Vakuumpumpe und integriertem gasspezifischem Gassensor sowie Verfahren zum Herstellen eines Vakuumleckdetektors
DE102021134647A1 (de) * 2021-12-23 2023-06-29 Inficon Gmbh Vakuumlecksucher mit Ansprüh-Membran-Testleck und Verfahren

Also Published As

Publication number Publication date
DE102021125707A1 (de) 2023-04-06
WO2023057173A1 (de) 2023-04-13
US20250130133A1 (en) 2025-04-24
CN118076869A (zh) 2024-05-24
EP4413345A1 (de) 2024-08-14
JP2024535384A (ja) 2024-09-30

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PA0105 International application

Patent event date: 20240308

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20250211

Comment text: Request for Examination of Application