DE102021125707A1 - Lecksuche bei viskoser Strömung - Google Patents

Lecksuche bei viskoser Strömung Download PDF

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Publication number
DE102021125707A1
DE102021125707A1 DE102021125707.7A DE102021125707A DE102021125707A1 DE 102021125707 A1 DE102021125707 A1 DE 102021125707A1 DE 102021125707 A DE102021125707 A DE 102021125707A DE 102021125707 A1 DE102021125707 A1 DE 102021125707A1
Authority
DE
Germany
Prior art keywords
vacuum
test chamber
pump
gas
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102021125707.7A
Other languages
German (de)
English (en)
Inventor
Daniel Wetzig
Yessica Brachthäuser
Sebastian Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Priority to DE102021125707.7A priority Critical patent/DE102021125707A1/de
Priority to KR1020247007985A priority patent/KR20240087676A/ko
Priority to CN202280062952.9A priority patent/CN118076869A/zh
Priority to EP22782489.3A priority patent/EP4413345A1/de
Priority to US18/693,119 priority patent/US20250130133A1/en
Priority to PCT/EP2022/075305 priority patent/WO2023057173A1/de
Priority to JP2024518613A priority patent/JP2024535384A/ja
Publication of DE102021125707A1 publication Critical patent/DE102021125707A1/de
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/34—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by testing the possibility of maintaining the vacuum in containers, e.g. in can-testing machines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
DE102021125707.7A 2021-10-04 2021-10-04 Lecksuche bei viskoser Strömung Pending DE102021125707A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE102021125707.7A DE102021125707A1 (de) 2021-10-04 2021-10-04 Lecksuche bei viskoser Strömung
KR1020247007985A KR20240087676A (ko) 2021-10-04 2022-09-12 점성 유동에서 누출 검출
CN202280062952.9A CN118076869A (zh) 2021-10-04 2022-09-12 粘性流中的泄漏检测
EP22782489.3A EP4413345A1 (de) 2021-10-04 2022-09-12 Lecksuche bei viskoser strömung
US18/693,119 US20250130133A1 (en) 2021-10-04 2022-09-12 Leak detection in a viscous flow
PCT/EP2022/075305 WO2023057173A1 (de) 2021-10-04 2022-09-12 Lecksuche bei viskoser strömung
JP2024518613A JP2024535384A (ja) 2021-10-04 2022-09-12 粘性流のリーク検知

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102021125707.7A DE102021125707A1 (de) 2021-10-04 2021-10-04 Lecksuche bei viskoser Strömung

Publications (1)

Publication Number Publication Date
DE102021125707A1 true DE102021125707A1 (de) 2023-04-06

Family

ID=83506542

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102021125707.7A Pending DE102021125707A1 (de) 2021-10-04 2021-10-04 Lecksuche bei viskoser Strömung

Country Status (7)

Country Link
US (1) US20250130133A1 (https=)
EP (1) EP4413345A1 (https=)
JP (1) JP2024535384A (https=)
KR (1) KR20240087676A (https=)
CN (1) CN118076869A (https=)
DE (1) DE102021125707A1 (https=)
WO (1) WO2023057173A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024129173A1 (de) * 2024-10-09 2026-04-09 Inficon Gmbh Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19846798A1 (de) 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Einrichtung zur integralen Testgas-Lecksuche sowie Betriebsverfahren dafür

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5767391A (en) * 1996-11-25 1998-06-16 Taiwan Semiconductor Manufacturing Company, Ltd Leakage detect tool for vacuum bellows
JP2001257164A (ja) * 2000-03-10 2001-09-21 Hitachi Kokusai Electric Inc 基板処理装置、基板処理方法及び圧力制御方法
CN101126673B (zh) * 2000-09-26 2012-08-15 马丁·莱曼 一种装配和测试封闭容器的方法
DE102005009713A1 (de) * 2005-03-03 2006-09-07 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102009059824A1 (de) * 2009-12-21 2011-06-22 Inficon GmbH, 50968 Verfahren und Vorrichtung zur Leckbestimmung
TWM454545U (zh) * 2013-02-01 2013-06-01 Jusun Instr Co Ltd 充電電池檢測設備
DE102016205381B4 (de) * 2016-03-31 2023-11-30 Inficon Gmbh Gaslecksuche mit einer Testgassprühvorrichtung
JP6228285B1 (ja) * 2016-11-15 2017-11-08 守 藤山 エアリーク検査装置及び方法
DE202019005500U1 (de) * 2019-08-08 2020-10-15 Inficon Gmbh Vorrichtung zur Dichtheitsprüfung eines flüssigkeitsgefüllten Prüflings
CN112326157A (zh) * 2020-10-30 2021-02-05 刘占峰 一种食品包装负压式气密检测装置
DE102021115463A1 (de) * 2021-06-15 2022-12-15 Inficon Gmbh Leckdetektionsvorrichtung
DE102021132252A1 (de) * 2021-12-08 2023-06-15 Inficon Gmbh Vakuumleckdetektor mit mehrstufiger Vakuumpumpe und integriertem gasspezifischem Gassensor sowie Verfahren zum Herstellen eines Vakuumleckdetektors
DE102021134647A1 (de) * 2021-12-23 2023-06-29 Inficon Gmbh Vakuumlecksucher mit Ansprüh-Membran-Testleck und Verfahren

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19846798A1 (de) 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Einrichtung zur integralen Testgas-Lecksuche sowie Betriebsverfahren dafür

Also Published As

Publication number Publication date
KR20240087676A (ko) 2024-06-19
WO2023057173A1 (de) 2023-04-13
US20250130133A1 (en) 2025-04-24
CN118076869A (zh) 2024-05-24
EP4413345A1 (de) 2024-08-14
JP2024535384A (ja) 2024-09-30

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