JP2024535384A - 粘性流のリーク検知 - Google Patents

粘性流のリーク検知 Download PDF

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Publication number
JP2024535384A
JP2024535384A JP2024518613A JP2024518613A JP2024535384A JP 2024535384 A JP2024535384 A JP 2024535384A JP 2024518613 A JP2024518613 A JP 2024518613A JP 2024518613 A JP2024518613 A JP 2024518613A JP 2024535384 A JP2024535384 A JP 2024535384A
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JP
Japan
Prior art keywords
vacuum
test chamber
pump
gas
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024518613A
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English (en)
Japanese (ja)
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JP2024535384A5 (https=
Inventor
ヴェツィヒ・ダニエル
ブラクトホイザー・イェシカ
ヴァイス・セバスチャン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of JP2024535384A publication Critical patent/JP2024535384A/ja
Publication of JP2024535384A5 publication Critical patent/JP2024535384A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/34—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by testing the possibility of maintaining the vacuum in containers, e.g. in can-testing machines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
JP2024518613A 2021-10-04 2022-09-12 粘性流のリーク検知 Pending JP2024535384A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021125707.7 2021-10-04
DE102021125707.7A DE102021125707A1 (de) 2021-10-04 2021-10-04 Lecksuche bei viskoser Strömung
PCT/EP2022/075305 WO2023057173A1 (de) 2021-10-04 2022-09-12 Lecksuche bei viskoser strömung

Publications (2)

Publication Number Publication Date
JP2024535384A true JP2024535384A (ja) 2024-09-30
JP2024535384A5 JP2024535384A5 (https=) 2025-02-20

Family

ID=83506542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024518613A Pending JP2024535384A (ja) 2021-10-04 2022-09-12 粘性流のリーク検知

Country Status (7)

Country Link
US (1) US20250130133A1 (https=)
EP (1) EP4413345A1 (https=)
JP (1) JP2024535384A (https=)
KR (1) KR20240087676A (https=)
CN (1) CN118076869A (https=)
DE (1) DE102021125707A1 (https=)
WO (1) WO2023057173A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102024129173A1 (de) * 2024-10-09 2026-04-09 Inficon Gmbh Vorrichtung und Verfahren zum Erkennen eines aus einem Leck austretenden Prüfgases

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001257164A (ja) * 2000-03-10 2001-09-21 Hitachi Kokusai Electric Inc 基板処理装置、基板処理方法及び圧力制御方法
CN101126673B (zh) * 2000-09-26 2012-08-15 马丁·莱曼 一种装配和测试封闭容器的方法
US20140216139A1 (en) * 2013-02-01 2014-08-07 Jusun Instruments Co., Ltd. Test apparatus for rechargeable battery
JP2018080965A (ja) * 2016-11-15 2018-05-24 藤山　守 エアリーク検査装置及び方法
DE202019005500U1 (de) * 2019-08-08 2020-10-15 Inficon Gmbh Vorrichtung zur Dichtheitsprüfung eines flüssigkeitsgefüllten Prüflings

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5767391A (en) * 1996-11-25 1998-06-16 Taiwan Semiconductor Manufacturing Company, Ltd Leakage detect tool for vacuum bellows
DE19846798A1 (de) 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Einrichtung zur integralen Testgas-Lecksuche sowie Betriebsverfahren dafür
DE102005009713A1 (de) * 2005-03-03 2006-09-07 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102009059824A1 (de) * 2009-12-21 2011-06-22 Inficon GmbH, 50968 Verfahren und Vorrichtung zur Leckbestimmung
DE102016205381B4 (de) * 2016-03-31 2023-11-30 Inficon Gmbh Gaslecksuche mit einer Testgassprühvorrichtung
CN112326157A (zh) * 2020-10-30 2021-02-05 刘占峰 一种食品包装负压式气密检测装置
DE102021115463A1 (de) * 2021-06-15 2022-12-15 Inficon Gmbh Leckdetektionsvorrichtung
DE102021132252A1 (de) * 2021-12-08 2023-06-15 Inficon Gmbh Vakuumleckdetektor mit mehrstufiger Vakuumpumpe und integriertem gasspezifischem Gassensor sowie Verfahren zum Herstellen eines Vakuumleckdetektors
DE102021134647A1 (de) * 2021-12-23 2023-06-29 Inficon Gmbh Vakuumlecksucher mit Ansprüh-Membran-Testleck und Verfahren

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001257164A (ja) * 2000-03-10 2001-09-21 Hitachi Kokusai Electric Inc 基板処理装置、基板処理方法及び圧力制御方法
CN101126673B (zh) * 2000-09-26 2012-08-15 马丁·莱曼 一种装配和测试封闭容器的方法
US20140216139A1 (en) * 2013-02-01 2014-08-07 Jusun Instruments Co., Ltd. Test apparatus for rechargeable battery
JP2018080965A (ja) * 2016-11-15 2018-05-24 藤山　守 エアリーク検査装置及び方法
DE202019005500U1 (de) * 2019-08-08 2020-10-15 Inficon Gmbh Vorrichtung zur Dichtheitsprüfung eines flüssigkeitsgefüllten Prüflings

Also Published As

Publication number Publication date
DE102021125707A1 (de) 2023-04-06
KR20240087676A (ko) 2024-06-19
WO2023057173A1 (de) 2023-04-13
US20250130133A1 (en) 2025-04-24
CN118076869A (zh) 2024-05-24
EP4413345A1 (de) 2024-08-14

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