TWI894400B - 帶有三級渦輪分子泵以及升壓泵的質譜洩漏偵測裝置 - Google Patents

帶有三級渦輪分子泵以及升壓泵的質譜洩漏偵測裝置

Info

Publication number
TWI894400B
TWI894400B TW110144222A TW110144222A TWI894400B TW I894400 B TWI894400 B TW I894400B TW 110144222 A TW110144222 A TW 110144222A TW 110144222 A TW110144222 A TW 110144222A TW I894400 B TWI894400 B TW I894400B
Authority
TW
Taiwan
Prior art keywords
pump
stage
turbomolecular
detection device
leak detection
Prior art date
Application number
TW110144222A
Other languages
English (en)
Chinese (zh)
Other versions
TW202227792A (zh
Inventor
席維歐 德克
西蒙 馬提奧達凱斯
Original Assignee
德商英飛康股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 德商英飛康股份有限公司 filed Critical 德商英飛康股份有限公司
Publication of TW202227792A publication Critical patent/TW202227792A/zh
Application granted granted Critical
Publication of TWI894400B publication Critical patent/TWI894400B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Examining Or Testing Airtightness (AREA)
TW110144222A 2020-12-10 2021-11-26 帶有三級渦輪分子泵以及升壓泵的質譜洩漏偵測裝置 TWI894400B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020132896.6A DE102020132896A1 (de) 2020-12-10 2020-12-10 Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe
DE102020132896.6 2020-12-10

Publications (2)

Publication Number Publication Date
TW202227792A TW202227792A (zh) 2022-07-16
TWI894400B true TWI894400B (zh) 2025-08-21

Family

ID=77998967

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110144222A TWI894400B (zh) 2020-12-10 2021-11-26 帶有三級渦輪分子泵以及升壓泵的質譜洩漏偵測裝置

Country Status (8)

Country Link
US (1) US20240044737A1 (https=)
EP (1) EP4259939B1 (https=)
JP (1) JP7781884B2 (https=)
KR (1) KR20230124907A (https=)
CN (1) CN116601391B (https=)
DE (1) DE102020132896A1 (https=)
TW (1) TWI894400B (https=)
WO (1) WO2022122206A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021119256A1 (de) * 2021-07-26 2023-01-26 Inficon Gmbh Leckdetektoren

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
CN103154689A (zh) * 2010-09-03 2013-06-12 英福康有限责任公司 检漏器
CN103380358A (zh) * 2011-02-03 2013-10-30 厄利孔莱博尔德真空技术有限责任公司 检漏装置
DE102014223841A1 (de) * 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion
TW201721119A (zh) * 2015-11-11 2017-06-16 英飛康股份有限公司 測試氣體進氣口處之壓力測量裝置與方法
CN109312754A (zh) * 2016-06-15 2019-02-05 英福康有限责任公司 带有同轴的涡轮分子泵和增压泵的质谱检漏仪
CN107850508B (zh) * 2015-07-20 2020-06-05 普发真空公司 用于检验密封产品的密闭度的方法和用于检测泄漏的设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344345B1 (de) 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
DE4343912A1 (de) 1993-12-22 1995-06-29 Leybold Ag Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE10302987A1 (de) * 2003-01-25 2004-08-05 Inficon Gmbh Lecksuchgerät mit einem Einlass
DE10308420A1 (de) 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
DE10319633A1 (de) 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
FR2878913B1 (fr) * 2004-12-03 2007-01-19 Cit Alcatel Controle des pressions partielles de gaz pour optimisation de procede
GB201005459D0 (en) * 2010-03-31 2010-05-19 Edwards Ltd Vacuum pumping system
WO2014191748A1 (en) * 2013-05-31 2014-12-04 Micromass Uk Limited Compact mass spectrometer

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
CN103154689A (zh) * 2010-09-03 2013-06-12 英福康有限责任公司 检漏器
CN103380358A (zh) * 2011-02-03 2013-10-30 厄利孔莱博尔德真空技术有限责任公司 检漏装置
DE102014223841A1 (de) * 2014-11-21 2016-05-25 Inficon Gmbh Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion
CN107850508B (zh) * 2015-07-20 2020-06-05 普发真空公司 用于检验密封产品的密闭度的方法和用于检测泄漏的设备
TW201721119A (zh) * 2015-11-11 2017-06-16 英飛康股份有限公司 測試氣體進氣口處之壓力測量裝置與方法
CN109312754A (zh) * 2016-06-15 2019-02-05 英福康有限责任公司 带有同轴的涡轮分子泵和增压泵的质谱检漏仪

Also Published As

Publication number Publication date
JP2023552606A (ja) 2023-12-18
CN116601391B (zh) 2026-04-10
KR20230124907A (ko) 2023-08-28
CN116601391A (zh) 2023-08-15
DE102020132896A1 (de) 2022-06-15
WO2022122206A1 (de) 2022-06-16
EP4259939A1 (de) 2023-10-18
TW202227792A (zh) 2022-07-16
JP7781884B2 (ja) 2025-12-08
EP4259939B1 (de) 2025-12-24
US20240044737A1 (en) 2024-02-08

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