JP7635244B2 - 転写フィルム、積層体の製造方法、回路配線の製造方法 - Google Patents

転写フィルム、積層体の製造方法、回路配線の製造方法 Download PDF

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Publication number
JP7635244B2
JP7635244B2 JP2022544472A JP2022544472A JP7635244B2 JP 7635244 B2 JP7635244 B2 JP 7635244B2 JP 2022544472 A JP2022544472 A JP 2022544472A JP 2022544472 A JP2022544472 A JP 2022544472A JP 7635244 B2 JP7635244 B2 JP 7635244B2
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Prior art keywords
photosensitive composition
composition layer
temporary support
group
compound
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JP2022544472A
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Japanese (ja)
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JPWO2022044879A1 (https=
JPWO2022044879A5 (https=
Inventor
正弥 鈴木
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Fujifilm Corp
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Fujifilm Corp
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
JP2022544472A 2020-08-25 2021-08-17 転写フィルム、積層体の製造方法、回路配線の製造方法 Active JP7635244B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020141573 2020-08-25
JP2020141573 2020-08-25
PCT/JP2021/030005 WO2022044879A1 (ja) 2020-08-25 2021-08-17 転写フィルム、積層体の製造方法、回路配線の製造方法

Publications (3)

Publication Number Publication Date
JPWO2022044879A1 JPWO2022044879A1 (https=) 2022-03-03
JPWO2022044879A5 JPWO2022044879A5 (https=) 2023-05-23
JP7635244B2 true JP7635244B2 (ja) 2025-02-25

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JP2022544472A Active JP7635244B2 (ja) 2020-08-25 2021-08-17 転写フィルム、積層体の製造方法、回路配線の製造方法

Country Status (3)

Country Link
JP (1) JP7635244B2 (https=)
CN (1) CN115943347A (https=)
WO (1) WO2022044879A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7849401B2 (ja) * 2024-02-19 2026-04-21 デンカ株式会社 組成物、硬化体、および、表示装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007091537A1 (ja) 2006-02-10 2007-08-16 Fujifilm Corporation 積層体の製造方法、積層体、液晶表示装置用基板、液晶表示素子及び液晶表示装置
JP2016087854A (ja) 2014-10-31 2016-05-23 東レ株式会社 ドライフィルムレジスト支持体用二軸配向ポリエステルフィルム
JP2019008001A (ja) 2017-06-20 2019-01-17 日立化成株式会社 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4566525B2 (ja) * 2002-08-22 2010-10-20 リンテック株式会社 ポリカーボネート用表面保護フィルム
JP6962023B2 (ja) * 2017-06-21 2021-11-05 コニカミノルタ株式会社 クリーニング装置および画像形成装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007091537A1 (ja) 2006-02-10 2007-08-16 Fujifilm Corporation 積層体の製造方法、積層体、液晶表示装置用基板、液晶表示素子及び液晶表示装置
JP2016087854A (ja) 2014-10-31 2016-05-23 東レ株式会社 ドライフィルムレジスト支持体用二軸配向ポリエステルフィルム
JP2019008001A (ja) 2017-06-20 2019-01-17 日立化成株式会社 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法

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WO2022044879A1 (ja) 2022-03-03
JPWO2022044879A1 (https=) 2022-03-03
CN115943347A (zh) 2023-04-07

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