JP7608100B2 - 液体吐出ヘッドとその製造方法 - Google Patents

液体吐出ヘッドとその製造方法 Download PDF

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Publication number
JP7608100B2
JP7608100B2 JP2020158677A JP2020158677A JP7608100B2 JP 7608100 B2 JP7608100 B2 JP 7608100B2 JP 2020158677 A JP2020158677 A JP 2020158677A JP 2020158677 A JP2020158677 A JP 2020158677A JP 7608100 B2 JP7608100 B2 JP 7608100B2
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JP
Japan
Prior art keywords
electrode terminals
resin layer
ejection head
liquid ejection
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020158677A
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English (en)
Japanese (ja)
Other versions
JP2021054066A (ja
JP2021054066A5 (enExample
Inventor
俊雄 樫野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of JP2021054066A publication Critical patent/JP2021054066A/ja
Publication of JP2021054066A5 publication Critical patent/JP2021054066A5/ja
Application granted granted Critical
Publication of JP7608100B2 publication Critical patent/JP7608100B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/22—Manufacturing print heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2020158677A 2019-09-25 2020-09-23 液体吐出ヘッドとその製造方法 Active JP7608100B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019173878 2019-09-25
JP2019173878 2019-09-25

Publications (3)

Publication Number Publication Date
JP2021054066A JP2021054066A (ja) 2021-04-08
JP2021054066A5 JP2021054066A5 (enExample) 2023-10-03
JP7608100B2 true JP7608100B2 (ja) 2025-01-06

Family

ID=74880479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020158677A Active JP7608100B2 (ja) 2019-09-25 2020-09-23 液体吐出ヘッドとその製造方法

Country Status (2)

Country Link
US (1) US11407224B2 (enExample)
JP (1) JP7608100B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025071964A (ja) 2023-10-24 2025-05-09 キヤノン株式会社 液体吐出ヘッド、液体吐出装置、液体吐出ヘッドの製造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004188606A (ja) 2002-12-06 2004-07-08 Canon Inc 記録素子ユニット
JP2005340317A (ja) 2004-05-25 2005-12-08 Sony Corp 半導体パッケージの製造方法、半導体パッケージ、および半導体パッケージの製造装置
JP2007326340A (ja) 2006-06-09 2007-12-20 Canon Inc インクジェット記録ヘッドおよびその製造方法
JP2008251637A (ja) 2007-03-29 2008-10-16 Fujitsu Microelectronics Ltd 半導体装置の製造方法
JP2010162891A (ja) 2008-12-18 2010-07-29 Canon Inc インクジェット記録ヘッドおよび該インクジェット記録ヘッド用の記録素子基板
JP2010226019A (ja) 2009-03-25 2010-10-07 Seiko Epson Corp デバイス実装方法、並びに液滴吐出ヘッド、及び液滴吐出装置
JP2010251412A (ja) 2009-04-13 2010-11-04 Seiko Epson Corp 半導体装置の実装構造及び半導体装置の実装方法
JP2016221693A (ja) 2015-05-27 2016-12-28 キヤノン株式会社 配線基板および液体吐出ヘッド

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001138520A (ja) 1999-11-10 2001-05-22 Canon Inc 記録ヘッド、該記録ヘッドの製造方法およびインクジェット記録装置
JP4741761B2 (ja) 2001-09-14 2011-08-10 キヤノン株式会社 インクジェット記録ヘッド、該インクジェット記録ヘッドを用いたインクジェット記録装置、およびインクジェット記録ヘッドの製造方法
JP4332416B2 (ja) 2003-12-12 2009-09-16 キヤノン株式会社 インクジェット記録ヘッド
JP6238617B2 (ja) * 2013-07-24 2017-11-29 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
JP6614840B2 (ja) * 2015-07-23 2019-12-04 キヤノン株式会社 液体吐出ヘッドおよびその製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004188606A (ja) 2002-12-06 2004-07-08 Canon Inc 記録素子ユニット
JP2005340317A (ja) 2004-05-25 2005-12-08 Sony Corp 半導体パッケージの製造方法、半導体パッケージ、および半導体パッケージの製造装置
JP2007326340A (ja) 2006-06-09 2007-12-20 Canon Inc インクジェット記録ヘッドおよびその製造方法
JP2008251637A (ja) 2007-03-29 2008-10-16 Fujitsu Microelectronics Ltd 半導体装置の製造方法
JP2010162891A (ja) 2008-12-18 2010-07-29 Canon Inc インクジェット記録ヘッドおよび該インクジェット記録ヘッド用の記録素子基板
JP2010226019A (ja) 2009-03-25 2010-10-07 Seiko Epson Corp デバイス実装方法、並びに液滴吐出ヘッド、及び液滴吐出装置
JP2010251412A (ja) 2009-04-13 2010-11-04 Seiko Epson Corp 半導体装置の実装構造及び半導体装置の実装方法
JP2016221693A (ja) 2015-05-27 2016-12-28 キヤノン株式会社 配線基板および液体吐出ヘッド

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US11407224B2 (en) 2022-08-09
US20210086510A1 (en) 2021-03-25
JP2021054066A (ja) 2021-04-08

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