JP7541806B2 - 超音波溶接システムおよび当該システムを使用する方法 - Google Patents
超音波溶接システムおよび当該システムを使用する方法 Download PDFInfo
- Publication number
- JP7541806B2 JP7541806B2 JP2021529685A JP2021529685A JP7541806B2 JP 7541806 B2 JP7541806 B2 JP 7541806B2 JP 2021529685 A JP2021529685 A JP 2021529685A JP 2021529685 A JP2021529685 A JP 2021529685A JP 7541806 B2 JP7541806 B2 JP 7541806B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- ultrasonic welding
- welding system
- movement
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003466 welding Methods 0.000 title claims description 208
- 238000000034 method Methods 0.000 title description 13
- 230000007246 mechanism Effects 0.000 claims description 39
- 238000005304 joining Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 12
- 239000000758 substrate Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000005201 scrubbing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
- B23K20/106—Features related to sonotrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/22—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
- B23K20/233—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded without ferrous layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/32—Wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/12—Copper or alloys thereof
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024137470A JP2024157013A (ja) | 2018-11-28 | 2024-08-17 | 超音波溶接システムおよび当該システムを使用する方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862772113P | 2018-11-28 | 2018-11-28 | |
| US62/772,113 | 2018-11-28 | ||
| PCT/US2019/063007 WO2020112635A1 (en) | 2018-11-28 | 2019-11-25 | Ultrasonic welding systems and methods of using the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024137470A Division JP2024157013A (ja) | 2018-11-28 | 2024-08-17 | 超音波溶接システムおよび当該システムを使用する方法 |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022510882A JP2022510882A (ja) | 2022-01-28 |
| JP2022510882A5 JP2022510882A5 (https=) | 2022-11-14 |
| JPWO2020112635A5 JPWO2020112635A5 (https=) | 2022-11-14 |
| JP7541806B2 true JP7541806B2 (ja) | 2024-08-29 |
Family
ID=70771461
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021529685A Active JP7541806B2 (ja) | 2018-11-28 | 2019-11-25 | 超音波溶接システムおよび当該システムを使用する方法 |
| JP2024137470A Pending JP2024157013A (ja) | 2018-11-28 | 2024-08-17 | 超音波溶接システムおよび当該システムを使用する方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024137470A Pending JP2024157013A (ja) | 2018-11-28 | 2024-08-17 | 超音波溶接システムおよび当該システムを使用する方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US11285561B2 (https=) |
| EP (2) | EP4403292A3 (https=) |
| JP (2) | JP7541806B2 (https=) |
| CN (2) | CN115971633A (https=) |
| WO (1) | WO2020112635A1 (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4681866A3 (en) * | 2017-04-04 | 2026-04-29 | Kulicke and Soffa Industries, Inc. | Ultrasonic welding system and method of operating an ultrasonic welding system |
| WO2020163694A1 (en) * | 2019-02-07 | 2020-08-13 | T.A. Systems, Inc. | Ultrasonic sonotrode with workpiece clamping tool |
| US11626677B2 (en) * | 2020-05-13 | 2023-04-11 | Semiconductor Components Industries, Llc | Bonding module pins to an electronic substrate |
| US11850676B2 (en) | 2020-06-03 | 2023-12-26 | Kulicke And Soffa Industries, Inc. | Ultrasonic welding systems, methods of using the same, and related workpieces including welded conductive pins |
| DE102022108397A1 (de) * | 2022-04-07 | 2023-10-12 | Herrmann Ultraschalltechnik Gmbh & Co. Kg | Vorrichtung zum Ultraschallschweißen eines Werkstücks und Verfahren zum Betreiben einer solchen Vorrichtung |
| CN115420412B (zh) * | 2022-08-05 | 2025-08-26 | 上海骄成超声波技术股份有限公司 | 一种用于超声波焊头的压力检测组件及其检测装置 |
| EP4357067A4 (en) * | 2022-08-31 | 2025-07-09 | Wuxi Lead Intelligent Equipment Co Ltd | TAB WELDING DEVICE |
| CN120981314A (zh) * | 2023-04-19 | 2025-11-18 | 库利克和索夫工业公司 | 用于导电引脚的超声焊接系统和相关方法 |
| CN116652356A (zh) * | 2023-07-11 | 2023-08-29 | 广东铭基高科电子股份有限公司 | 一种超声波焊接机构 |
| CN117680867B (zh) * | 2024-02-04 | 2024-05-24 | 南京航空航天大学 | 一种基于纳米颗粒植入与微量元素补偿的高强焊丝的焊接方法 |
| US20260103123A1 (en) * | 2024-10-10 | 2026-04-16 | Evenflo Company, Inc. | Child safety seat with multiple configurations |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001105160A (ja) | 1999-09-30 | 2001-04-17 | Suzuki Motor Corp | 超音波溶着装置 |
| JP2013063521A (ja) | 2011-09-15 | 2013-04-11 | Seidensha Electronics Co Ltd | 超音波溶着装置、超音波接合装置、布線装置 |
| US20140048584A1 (en) | 2010-03-31 | 2014-02-20 | Orthodyne Electronics Corporation | Ultrasonic bonding systems and methods of using the same |
| JP2015016504A (ja) | 2013-04-10 | 2015-01-29 | 株式会社アドウェルズ | 接合装置および接合方法 |
| JP2016143826A (ja) | 2015-02-04 | 2016-08-08 | 三菱電機株式会社 | 電力用半導体装置、超音波接合方法および超音波接合装置 |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003127234A (ja) * | 2001-10-29 | 2003-05-08 | Matsushita Electric Works Ltd | 超音波溶着装置 |
| JP3966217B2 (ja) * | 2003-04-23 | 2007-08-29 | 松下電器産業株式会社 | ボンディング装置およびボンディングツール |
| JP3848637B2 (ja) * | 2003-05-06 | 2006-11-22 | Esb株式会社 | 超音波接合装置 |
| JP4792945B2 (ja) | 2005-01-28 | 2011-10-12 | 日産自動車株式会社 | 超音波接合装置および接合構造体 |
| US7748590B2 (en) * | 2005-05-16 | 2010-07-06 | Ford Global Technologies, Llc | Ultrasonic welding apparatus |
| JP4577509B2 (ja) | 2005-06-22 | 2010-11-10 | トヨタ自動車株式会社 | パワー半導体モジュール及びその製造方法 |
| DE102005048368B3 (de) | 2005-10-10 | 2007-05-03 | Schunk Ultraschalltechnik Gmbh | Verfahren zum Herstellen einer Schweißverbindung zwischen elektrischen Leitern |
| JP5014151B2 (ja) * | 2005-12-06 | 2012-08-29 | 東レエンジニアリング株式会社 | チップ実装装置およびチップ実装方法 |
| JP4825029B2 (ja) * | 2006-03-17 | 2011-11-30 | 富士通セミコンダクター株式会社 | ボンディング装置及びボンディング方法 |
| US8052816B2 (en) * | 2006-05-08 | 2011-11-08 | Dukane Corporation | Ultrasonic press using servo motor with delayed motion |
| JP4399869B2 (ja) * | 2007-07-30 | 2010-01-20 | Tdk株式会社 | 超音波振動を用いて実装部品を被実装部品に実装する実装装置 |
| JP4311582B1 (ja) * | 2008-04-07 | 2009-08-12 | 株式会社アドウェルズ | 共振器の支持装置 |
| JP4336732B1 (ja) * | 2008-04-11 | 2009-09-30 | Tdk株式会社 | 超音波実装装置 |
| US8511536B2 (en) * | 2010-03-31 | 2013-08-20 | Orthodyne Electronics Corporation | Ultrasonic bonding systems and methods of using the same |
| JP4808283B1 (ja) * | 2010-06-30 | 2011-11-02 | 株式会社新川 | 電子部品実装装置及び電子部品実装方法 |
| WO2012012335A2 (en) | 2010-07-19 | 2012-01-26 | Orthodyne Electronics Corporation | Ultrasonic bonding systems including workholder and ribbon feeding system |
| ES1075973Y (es) * | 2011-05-12 | 2012-04-13 | Eficiencia Y Tecnologia S A | Dispositivo de soldadura longitudinal en continuo para maquinas envasadoras |
| JP2013051366A (ja) | 2011-08-31 | 2013-03-14 | Hitachi Ltd | パワーモジュール及びその製造方法 |
| KR101276408B1 (ko) | 2012-01-02 | 2013-06-19 | 뉴모텍(주) | 초음파 융착 방식을 적용한 모터의 pcb 조립 장치 |
| JP6033011B2 (ja) | 2012-09-12 | 2016-11-30 | 三菱電機株式会社 | 電力用半導体装置および電力用半導体装置の製造方法 |
| US8858742B2 (en) * | 2012-11-16 | 2014-10-14 | GM Global Technology Operations LLC | Automatic monitoring of vibration welding equipment |
| JP5426000B2 (ja) * | 2012-11-16 | 2014-02-26 | 株式会社新川 | ワイヤボンディング装置及びワイヤボンディング方法 |
| CH707378A1 (de) * | 2012-12-21 | 2014-06-30 | Besi Switzerland Ag | Thermokompressionsverfahren und Vorrichtung für die Montage von Halbleiterchips auf einem Substrat. |
| US9620477B2 (en) * | 2013-01-25 | 2017-04-11 | Asm Technology Singapore Pte Ltd | Wire bonder and method of calibrating a wire bonder |
| US20150210003A1 (en) | 2014-01-28 | 2015-07-30 | Frito-Lay Noth America, Inc. | Transverse Sonotrode Design for Ultrasonic Welding |
| FR3019083B1 (fr) * | 2014-04-01 | 2016-12-30 | Sonimat | Dispositif de soudure par ultrasons |
| US9751257B2 (en) * | 2014-06-17 | 2017-09-05 | GM Global Technology Operations LLC | Ultrasonic welder clamp |
| JP6406983B2 (ja) | 2014-11-12 | 2018-10-17 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| JP5950994B2 (ja) * | 2014-12-26 | 2016-07-13 | 株式会社新川 | 実装装置 |
| WO2016199621A1 (ja) | 2015-06-11 | 2016-12-15 | 三菱電機株式会社 | 電力用半導体装置の製造方法および電力用半導体装置 |
| JP2017024040A (ja) | 2015-07-22 | 2017-02-02 | 矢崎総業株式会社 | 超音波接合装置 |
| EP4681866A3 (en) * | 2017-04-04 | 2026-04-29 | Kulicke and Soffa Industries, Inc. | Ultrasonic welding system and method of operating an ultrasonic welding system |
| WO2019075289A1 (en) | 2017-10-13 | 2019-04-18 | Kulicke And Soffa Industries, Inc. | CONDUCTIVE TERMINALS, OMNIBUS BARS, AND METHODS OF PREPARING THE SAME, AND METHODS OF ASSEMBLING POWER MODULES THEREOF |
| WO2020006062A1 (en) * | 2018-06-26 | 2020-01-02 | Db Sonics, Inc. | Sonotrode and method of manufacturing |
-
2019
- 2019-11-25 EP EP24020076.6A patent/EP4403292A3/en active Pending
- 2019-11-25 WO PCT/US2019/063007 patent/WO2020112635A1/en not_active Ceased
- 2019-11-25 CN CN202310078303.4A patent/CN115971633A/zh active Pending
- 2019-11-25 CN CN201980078598.7A patent/CN113165102B/zh active Active
- 2019-11-25 EP EP19890498.9A patent/EP3887085B1/en active Active
- 2019-11-25 JP JP2021529685A patent/JP7541806B2/ja active Active
- 2019-11-26 US US16/697,010 patent/US11285561B2/en active Active
-
2022
- 2022-01-27 US US17/586,105 patent/US11504800B2/en active Active
- 2022-10-19 US US17/969,028 patent/US11958124B2/en active Active
-
2024
- 2024-08-17 JP JP2024137470A patent/JP2024157013A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001105160A (ja) | 1999-09-30 | 2001-04-17 | Suzuki Motor Corp | 超音波溶着装置 |
| US20140048584A1 (en) | 2010-03-31 | 2014-02-20 | Orthodyne Electronics Corporation | Ultrasonic bonding systems and methods of using the same |
| JP2013063521A (ja) | 2011-09-15 | 2013-04-11 | Seidensha Electronics Co Ltd | 超音波溶着装置、超音波接合装置、布線装置 |
| JP2015016504A (ja) | 2013-04-10 | 2015-01-29 | 株式会社アドウェルズ | 接合装置および接合方法 |
| JP2016143826A (ja) | 2015-02-04 | 2016-08-08 | 三菱電機株式会社 | 電力用半導体装置、超音波接合方法および超音波接合装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US11958124B2 (en) | 2024-04-16 |
| EP4403292A3 (en) | 2024-11-06 |
| US20200164460A1 (en) | 2020-05-28 |
| CN113165102B (zh) | 2022-11-25 |
| EP3887085B1 (en) | 2024-03-13 |
| US11285561B2 (en) | 2022-03-29 |
| US20230043068A1 (en) | 2023-02-09 |
| WO2020112635A1 (en) | 2020-06-04 |
| EP4403292A2 (en) | 2024-07-24 |
| JP2022510882A (ja) | 2022-01-28 |
| JP2024157013A (ja) | 2024-11-06 |
| US20220143737A1 (en) | 2022-05-12 |
| CN113165102A (zh) | 2021-07-23 |
| CN115971633A (zh) | 2023-04-18 |
| US11504800B2 (en) | 2022-11-22 |
| EP3887085A4 (en) | 2022-11-02 |
| EP3887085A1 (en) | 2021-10-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7541806B2 (ja) | 超音波溶接システムおよび当該システムを使用する方法 | |
| CN110891726B (zh) | 超声焊接系统及其使用方法 | |
| CN102844851B (zh) | 超声波焊接系统及利用该超声波焊接系统的方法 | |
| JP5926439B1 (ja) | 超音波接合装置 | |
| JP2020537330A (ja) | 導電性端子、バスバー、その製造方法、及び関連するパワーモジュールの組立方法 | |
| WO2018110417A1 (ja) | ワイヤボンディング装置及びワイヤボンディング方法 | |
| JP6427813B2 (ja) | ワイヤボンディング装置 | |
| CN107211567A (zh) | 封装装置 | |
| CN210967556U (zh) | 一种自动对位热压焊接装置 | |
| JPH02111029A (ja) | バンプ形成方法 | |
| JP2011206808A (ja) | 溶接装置 | |
| CN116984727A (zh) | 焊头结构和焊接设备 | |
| JP3400735B2 (ja) | 傾き調整装置およびボンディング装置 | |
| JP4501149B2 (ja) | 振動溶着装置 | |
| JP4189396B2 (ja) | マイクロパラレルシーム接合装置 | |
| WO2020183641A1 (ja) | 超音波接合方法 | |
| JP2012024771A (ja) | 超音波振動接合装置および超音波振動接合方法 | |
| CN120715528A (zh) | 一种太阳电池组件自动串联焊接系统 | |
| CN121969190A (zh) | 芯片的打线加工装置 | |
| JP2017212284A (ja) | ワイヤボンド装置およびワイヤボンド方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221104 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20221104 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20231115 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20231205 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20240305 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20240507 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240605 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240806 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240817 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7541806 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |