JP7492916B2 - 透明導電性フィルム - Google Patents
透明導電性フィルム Download PDFInfo
- Publication number
- JP7492916B2 JP7492916B2 JP2020552063A JP2020552063A JP7492916B2 JP 7492916 B2 JP7492916 B2 JP 7492916B2 JP 2020552063 A JP2020552063 A JP 2020552063A JP 2020552063 A JP2020552063 A JP 2020552063A JP 7492916 B2 JP7492916 B2 JP 7492916B2
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- transparent conductive
- conductive layer
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- transparent
- thickness
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- 239000000758 substrate Substances 0.000 claims description 59
- 239000002131 composite material Substances 0.000 claims description 2
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical group [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 claims description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 32
- 229910001887 tin oxide Inorganic materials 0.000 description 32
- 230000003287 optical effect Effects 0.000 description 29
- 239000000203 mixture Substances 0.000 description 25
- 239000013078 crystal Substances 0.000 description 17
- 238000004544 sputter deposition Methods 0.000 description 17
- 239000011347 resin Substances 0.000 description 16
- 229920005989 resin Polymers 0.000 description 16
- 239000000463 material Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 12
- 239000011261 inert gas Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 229920000178 Acrylic resin Polymers 0.000 description 5
- 239000004925 Acrylic resin Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 239000005001 laminate film Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 150000001925 cycloalkenes Chemical class 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- 239000010954 inorganic particle Substances 0.000 description 3
- 239000011146 organic particle Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 241000692870 Inachis io Species 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/044—Forming conductive coatings; Forming coatings having anti-static properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/025—Electric or magnetic properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/06—Coating with compositions not containing macromolecular substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Non-Insulated Conductors (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019120187 | 2019-06-27 | ||
JP2019120187 | 2019-06-27 | ||
PCT/JP2020/024334 WO2020262284A1 (ja) | 2019-06-27 | 2020-06-22 | 透明導電性フィルム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020262284A1 JPWO2020262284A1 (zh) | 2020-12-30 |
JP7492916B2 true JP7492916B2 (ja) | 2024-05-30 |
Family
ID=74061661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020552063A Active JP7492916B2 (ja) | 2019-06-27 | 2020-06-22 | 透明導電性フィルム |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7492916B2 (zh) |
KR (1) | KR20220025707A (zh) |
CN (1) | CN114007856A (zh) |
TW (1) | TW202111730A (zh) |
WO (1) | WO2020262284A1 (zh) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011048996A1 (ja) | 2009-10-19 | 2011-04-28 | 東洋紡績株式会社 | 透明導電性フィルム |
JP2011214043A (ja) | 2010-03-31 | 2011-10-27 | Mitsubishi Materials Corp | Ito透明導電膜の形成方法及びその形成装置 |
JP2013152827A (ja) | 2012-01-24 | 2013-08-08 | Kaneka Corp | 透明電極付き基板およびその製造方法 |
WO2013172055A1 (ja) | 2012-05-17 | 2013-11-21 | 株式会社カネカ | 透明電極付き基板およびその製造方法、ならびにタッチパネル |
JP2013245366A (ja) | 2012-05-24 | 2013-12-09 | Sumitomo Chemical Co Ltd | Ito透明導電膜付き基板およびその製造方法 |
WO2014115770A1 (ja) | 2013-01-24 | 2014-07-31 | 住友金属鉱山株式会社 | 透明導電性基材ならびにその製造方法 |
WO2016072441A1 (ja) | 2014-11-07 | 2016-05-12 | Jx金属株式会社 | Itoスパッタリングターゲット及びその製造方法並びにito透明導電膜及びito透明導電膜の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008019478A (ja) | 2006-07-13 | 2008-01-31 | Konica Minolta Holdings Inc | 透明導電膜形成方法及び透明導電膜付フィルム |
KR20140027230A (ko) * | 2011-05-20 | 2014-03-06 | 아사히 가라스 가부시키가이샤 | 도전막용 소재, 도전막 적층체, 전자 기기, 및 그들의 제조 방법 |
WO2013172354A1 (ja) * | 2012-05-15 | 2013-11-21 | 旭硝子株式会社 | 導電膜用素材、導電膜積層体、電子機器、ならびに導電膜用素材および導電膜積層体の製造方法 |
JP5932098B2 (ja) * | 2014-04-17 | 2016-06-08 | 日東電工株式会社 | 透明導電性フィルム |
JP6207633B2 (ja) * | 2014-04-30 | 2017-10-04 | 日東電工株式会社 | 透明導電性フィルム |
CN105637111A (zh) * | 2014-05-20 | 2016-06-01 | 日东电工株式会社 | 透明导电性薄膜及其制造方法 |
-
2020
- 2020-06-22 CN CN202080045702.5A patent/CN114007856A/zh active Pending
- 2020-06-22 KR KR1020217037581A patent/KR20220025707A/ko unknown
- 2020-06-22 WO PCT/JP2020/024334 patent/WO2020262284A1/ja active Application Filing
- 2020-06-22 JP JP2020552063A patent/JP7492916B2/ja active Active
- 2020-06-24 TW TW109121453A patent/TW202111730A/zh unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011048996A1 (ja) | 2009-10-19 | 2011-04-28 | 東洋紡績株式会社 | 透明導電性フィルム |
JP2011214043A (ja) | 2010-03-31 | 2011-10-27 | Mitsubishi Materials Corp | Ito透明導電膜の形成方法及びその形成装置 |
JP2013152827A (ja) | 2012-01-24 | 2013-08-08 | Kaneka Corp | 透明電極付き基板およびその製造方法 |
WO2013172055A1 (ja) | 2012-05-17 | 2013-11-21 | 株式会社カネカ | 透明電極付き基板およびその製造方法、ならびにタッチパネル |
JP2013245366A (ja) | 2012-05-24 | 2013-12-09 | Sumitomo Chemical Co Ltd | Ito透明導電膜付き基板およびその製造方法 |
WO2014115770A1 (ja) | 2013-01-24 | 2014-07-31 | 住友金属鉱山株式会社 | 透明導電性基材ならびにその製造方法 |
WO2016072441A1 (ja) | 2014-11-07 | 2016-05-12 | Jx金属株式会社 | Itoスパッタリングターゲット及びその製造方法並びにito透明導電膜及びito透明導電膜の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2020262284A1 (zh) | 2020-12-30 |
KR20220025707A (ko) | 2022-03-03 |
WO2020262284A1 (ja) | 2020-12-30 |
CN114007856A (zh) | 2022-02-01 |
TW202111730A (zh) | 2021-03-16 |
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