JP7467611B2 - 加工システム - Google Patents

加工システム Download PDF

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Publication number
JP7467611B2
JP7467611B2 JP2022517591A JP2022517591A JP7467611B2 JP 7467611 B2 JP7467611 B2 JP 7467611B2 JP 2022517591 A JP2022517591 A JP 2022517591A JP 2022517591 A JP2022517591 A JP 2022517591A JP 7467611 B2 JP7467611 B2 JP 7467611B2
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JP
Japan
Prior art keywords
processing
grinding
entrance
exterior cover
replacement
Prior art date
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Active
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JP2022517591A
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English (en)
Japanese (ja)
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JPWO2021220752A1 (https=
JPWO2021220752A5 (https=
Inventor
康隆 溝本
晋 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of JPWO2021220752A1 publication Critical patent/JPWO2021220752A1/ja
Publication of JPWO2021220752A5 publication Critical patent/JPWO2021220752A5/ja
Priority to JP2024060073A priority Critical patent/JP7786857B2/ja
Application granted granted Critical
Publication of JP7467611B2 publication Critical patent/JP7467611B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/08—Protective coverings for parts of machine tools; Splash guards
    • B23Q11/0891—Protective coverings for parts of machine tools; Splash guards arranged between the working area and the operator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/157—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Automatic Tool Replacement In Machine Tools (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
JP2022517591A 2020-05-01 2021-04-07 加工システム Active JP7467611B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024060073A JP7786857B2 (ja) 2020-05-01 2024-04-03 加工装置の加工具の取付方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020081378 2020-05-01
JP2020081378 2020-05-01
PCT/JP2021/014826 WO2021220752A1 (ja) 2020-05-01 2021-04-07 加工装置、及び加工装置の加工具の取付け方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024060073A Division JP7786857B2 (ja) 2020-05-01 2024-04-03 加工装置の加工具の取付方法

Publications (3)

Publication Number Publication Date
JPWO2021220752A1 JPWO2021220752A1 (https=) 2021-11-04
JPWO2021220752A5 JPWO2021220752A5 (https=) 2023-01-23
JP7467611B2 true JP7467611B2 (ja) 2024-04-15

Family

ID=78331522

Family Applications (2)

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JP2022517591A Active JP7467611B2 (ja) 2020-05-01 2021-04-07 加工システム
JP2024060073A Active JP7786857B2 (ja) 2020-05-01 2024-04-03 加工装置の加工具の取付方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024060073A Active JP7786857B2 (ja) 2020-05-01 2024-04-03 加工装置の加工具の取付方法

Country Status (3)

Country Link
US (1) US20230182253A1 (https=)
JP (2) JP7467611B2 (https=)
WO (1) WO2021220752A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202439517A (zh) 2023-03-16 2024-10-01 日商東京威力科創股份有限公司 維護作業支援系統、控制方法及控制程式

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000052185A (ja) 1998-08-10 2000-02-22 Brother Ind Ltd 工作機械用洗浄装置
US20070251922A1 (en) 2006-04-27 2007-11-01 Applied Materials, Inc. Automatic gain control
JP2008080409A (ja) 2006-09-25 2008-04-10 Nippei Toyama Corp 工作機械の加工ライン
JP2009050976A (ja) 2007-08-28 2009-03-12 Murata Mach Ltd ローダ付き工作機械
JP2014205231A (ja) 2013-03-21 2014-10-30 ファナック株式会社 サーボ自動開閉扉を備えた加工システム
JP2015093367A (ja) 2013-11-14 2015-05-18 トヨタ自動車株式会社 加工室の扉開閉制御方法
JP2017094468A (ja) 2015-11-26 2017-06-01 ファナック株式会社 ワークが加工される空間を画定するエンクロージャを備える加工システム
JP2017098540A (ja) 2015-10-22 2017-06-01 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 正面開口式リングポッド
JP2018192572A (ja) 2017-05-18 2018-12-06 株式会社ディスコ 加工装置
WO2020049701A1 (ja) 2018-09-06 2020-03-12 ヤマザキマザック株式会社 工具保管装置、工作機械及び複合加工機械

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3483648B2 (ja) * 1995-03-24 2004-01-06 東芝機械株式会社 研磨装置
JP2773745B2 (ja) * 1997-05-08 1998-07-09 三菱マテリアル株式会社 切屑排出装置を備えた正面フライス
JP3883256B2 (ja) * 1997-06-06 2007-02-21 株式会社荏原製作所 ポリッシング装置
JP3548416B2 (ja) * 1998-03-24 2004-07-28 大日本スクリーン製造株式会社 基板処理装置
JP2000343310A (ja) 1999-06-01 2000-12-12 Mori Seiki Co Ltd 工具折損検出装置
EP1112812A3 (en) * 1999-12-27 2003-10-15 Nippei Toyama Corporation Grinding spindle with dual tool mounting means
US6665580B1 (en) * 2000-09-18 2003-12-16 Thermwood Corporation Automatic cutting tool management system for a computer numeric controlled machining system
JP4699111B2 (ja) * 2005-06-30 2011-06-08 有限会社ニューリー研究所 自動工具交換装置および加工機械
JP4984135B2 (ja) 2007-03-29 2012-07-25 ブラザー工業株式会社 工作機械、工具マガジン制御プログラム及び記録媒体
JP2012168742A (ja) 2011-02-15 2012-09-06 Hitachi Ltd 砥石摩耗補正機能を備えるマシニングセンタ
WO2014084376A1 (ja) * 2012-11-30 2014-06-05 コマツＮｔｃ株式会社 工作機械
JP6836143B2 (ja) * 2016-12-27 2021-02-24 株式会社ジェイテクト 工作機械
JP6270297B1 (ja) 2017-01-06 2018-01-31 西島株式会社 丸鋸切断機
JP7126749B2 (ja) * 2018-03-19 2022-08-29 株式会社ディスコ 切削装置
JP7119603B2 (ja) 2018-06-07 2022-08-17 株式会社ジェイテクト 加工システム及び加工方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000052185A (ja) 1998-08-10 2000-02-22 Brother Ind Ltd 工作機械用洗浄装置
US20070251922A1 (en) 2006-04-27 2007-11-01 Applied Materials, Inc. Automatic gain control
JP2008080409A (ja) 2006-09-25 2008-04-10 Nippei Toyama Corp 工作機械の加工ライン
JP2009050976A (ja) 2007-08-28 2009-03-12 Murata Mach Ltd ローダ付き工作機械
JP2014205231A (ja) 2013-03-21 2014-10-30 ファナック株式会社 サーボ自動開閉扉を備えた加工システム
JP2015093367A (ja) 2013-11-14 2015-05-18 トヨタ自動車株式会社 加工室の扉開閉制御方法
JP2017098540A (ja) 2015-10-22 2017-06-01 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 正面開口式リングポッド
JP2017094468A (ja) 2015-11-26 2017-06-01 ファナック株式会社 ワークが加工される空間を画定するエンクロージャを備える加工システム
JP2018192572A (ja) 2017-05-18 2018-12-06 株式会社ディスコ 加工装置
WO2020049701A1 (ja) 2018-09-06 2020-03-12 ヤマザキマザック株式会社 工具保管装置、工作機械及び複合加工機械

Also Published As

Publication number Publication date
JP7786857B2 (ja) 2025-12-16
US20230182253A1 (en) 2023-06-15
JPWO2021220752A1 (https=) 2021-11-04
JP2024096125A (ja) 2024-07-12
WO2021220752A1 (ja) 2021-11-04

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