JP7441612B2 - 発光装置及びその製造方法 - Google Patents

発光装置及びその製造方法 Download PDF

Info

Publication number
JP7441612B2
JP7441612B2 JP2019091547A JP2019091547A JP7441612B2 JP 7441612 B2 JP7441612 B2 JP 7441612B2 JP 2019091547 A JP2019091547 A JP 2019091547A JP 2019091547 A JP2019091547 A JP 2019091547A JP 7441612 B2 JP7441612 B2 JP 7441612B2
Authority
JP
Japan
Prior art keywords
light emitting
substrate
emitting element
adhesive
intermediate layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019091547A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019201206A5 (enExample
JP2019201206A (ja
Inventor
シェ ミン-シュン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Epistar Corp
Original Assignee
Epistar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epistar Corp filed Critical Epistar Corp
Publication of JP2019201206A publication Critical patent/JP2019201206A/ja
Publication of JP2019201206A5 publication Critical patent/JP2019201206A5/ja
Priority to JP2023188094A priority Critical patent/JP2023181464A/ja
Application granted granted Critical
Publication of JP7441612B2 publication Critical patent/JP7441612B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/8506Containers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/857Interconnections, e.g. lead-frames, bond wires or solder balls
    • H10W72/0198
    • H10W90/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • H10H20/0364Manufacture or treatment of packages of interconnections
    • H10W72/072
    • H10W72/07207
    • H10W72/073
    • H10W74/15

Landscapes

  • Led Device Packages (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Planar Illumination Modules (AREA)
JP2019091547A 2018-05-14 2019-05-14 発光装置及びその製造方法 Active JP7441612B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023188094A JP2023181464A (ja) 2018-05-14 2023-11-02 発光装置及びその製造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862670900P 2018-05-14 2018-05-14
US62/670,900 2018-05-14
US201862697387P 2018-07-12 2018-07-12
US62/697,387 2018-07-12

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023188094A Division JP2023181464A (ja) 2018-05-14 2023-11-02 発光装置及びその製造方法

Publications (3)

Publication Number Publication Date
JP2019201206A JP2019201206A (ja) 2019-11-21
JP2019201206A5 JP2019201206A5 (enExample) 2022-05-20
JP7441612B2 true JP7441612B2 (ja) 2024-03-01

Family

ID=68337028

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2019091547A Active JP7441612B2 (ja) 2018-05-14 2019-05-14 発光装置及びその製造方法
JP2023188094A Pending JP2023181464A (ja) 2018-05-14 2023-11-02 発光装置及びその製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023188094A Pending JP2023181464A (ja) 2018-05-14 2023-11-02 発光装置及びその製造方法

Country Status (6)

Country Link
US (4) US10923641B2 (enExample)
JP (2) JP7441612B2 (enExample)
KR (2) KR102498453B1 (enExample)
CN (3) CN116682924A (enExample)
DE (1) DE102019112546B4 (enExample)
TW (2) TWI878222B (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102696459B1 (ko) 2017-06-12 2024-08-19 쿨리케 & 소파 네덜란드 비.브이. 개별 부품들의 기판 상으로의 병렬적 조립
JP7072977B2 (ja) * 2018-03-05 2022-05-23 株式会社ディスコ デバイスの移設方法
KR102498453B1 (ko) * 2018-05-14 2023-02-09 에피스타 코포레이션 발광 디바이스 및 그 제조 방법
KR102786764B1 (ko) * 2018-07-11 2025-03-27 엘지전자 주식회사 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법
US11424224B2 (en) * 2019-04-24 2022-08-23 Seoul Viosys Co., Ltd. LED display panel, LED display apparatus having the same and method of fabricating the same
JP7321792B2 (ja) * 2019-06-26 2023-08-07 株式会社ジャパンディスプレイ 異方性導電膜及び表示装置
US10847083B1 (en) 2019-10-14 2020-11-24 Shaoher Pan Integrated active-matrix light emitting pixel arrays based devices by laser-assisted bonding
US11011669B2 (en) * 2019-10-14 2021-05-18 Shaoher Pan Integrated active-matrix light emitting pixel arrays based devices
US11901497B2 (en) * 2019-12-24 2024-02-13 Seoul Viosys Co., Ltd. Method of repairing light emitting device, apparatus for repairing light emitting device, and display panel having repaired light emitting device
KR20210106056A (ko) * 2020-02-19 2021-08-30 한국전자통신연구원 레이저를 이용한 전사 및 접합 방법
KR20220151599A (ko) * 2020-03-09 2022-11-15 세키스이가가쿠 고교가부시키가이샤 전자 부품의 제조 방법, 및, 표시 장치의 제조 방법
EP3907725A1 (en) * 2020-05-06 2021-11-10 Admesy B.V. Method and setup for performing a series of optical measurements with a 2d imaging system
CN111710745B (zh) * 2020-06-28 2023-03-21 重庆邮电大学 一种锰掺杂纯无机钙钛矿-Au纳米晶异质结及其制备方法和应用
WO2022021003A1 (zh) * 2020-07-27 2022-02-03 重庆康佳光电技术研究院有限公司 转接板、巨量转移方法及Micro-LED显示器
CN112967980B (zh) * 2020-08-13 2021-12-24 重庆康佳光电技术研究院有限公司 芯片转移组件及其制作方法、芯片转移方法
JP7522611B2 (ja) * 2020-08-28 2024-07-25 株式会社ジャパンディスプレイ 表示装置の製造方法
CN217361526U (zh) * 2020-09-30 2022-09-02 广东晶相光电科技有限公司 一种发光二极管及发光二极管显示器
KR102436469B1 (ko) * 2020-11-27 2022-08-26 주식회사 아큐레이저 반도체 소자의 전사 장치 및 전사 방법
KR102899002B1 (ko) * 2020-12-02 2025-12-10 엘지디스플레이 주식회사 발광 소자의 전사 방법 및 이를 이용한 표시 장치의 제조 방법
JP7788849B2 (ja) * 2021-01-28 2025-12-19 東レエンジニアリング株式会社 転写装置および転写基板
CN118483848A (zh) 2021-07-28 2024-08-13 群创光电股份有限公司 发光装置
US12446374B2 (en) * 2022-03-21 2025-10-14 GM Global Technology Operations LLC Transparent structural composites with encapsulated micro-LEDs
CN115763351B (zh) * 2022-04-01 2025-08-26 友达光电股份有限公司 发光元件阵列基板及其制造方法
US20230317497A1 (en) * 2022-04-01 2023-10-05 AUO Corporation Display apparatus
CN119384888A (zh) * 2022-09-01 2025-01-28 三星电子株式会社 包括连接发光二极管和基板的接合构件的显示模块
CN117476532B (zh) * 2023-03-09 2025-09-02 深圳市华星光电半导体显示技术有限公司 巨量转移方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010251359A (ja) 2009-04-10 2010-11-04 Sony Corp 素子の移載方法
JP2010251360A (ja) 2009-04-10 2010-11-04 Sony Corp 表示装置の製造方法および表示装置
JP2014515883A (ja) 2011-04-11 2014-07-03 エヌディーエスユー リサーチ ファウンデーション レーザで促進される、分離した部品の選択的な転写
JP2018060993A (ja) 2016-09-29 2018-04-12 東レエンジニアリング株式会社 転写方法、実装方法、転写装置、及び実装装置

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535219A (en) 1982-10-12 1985-08-13 Xerox Corporation Interfacial blister bonding for microinterconnections
JP4491948B2 (ja) * 2000-10-06 2010-06-30 ソニー株式会社 素子実装方法および画像表示装置の製造方法
WO2002084631A1 (en) 2001-04-11 2002-10-24 Sony Corporation Element transfer method, element arrangmenet method using the same, and image display apparatus production method
JP4151420B2 (ja) * 2003-01-23 2008-09-17 セイコーエプソン株式会社 デバイスの製造方法
US7244326B2 (en) * 2003-05-16 2007-07-17 Alien Technology Corporation Transfer assembly for manufacturing electronic devices
JP4667803B2 (ja) * 2004-09-14 2011-04-13 日亜化学工業株式会社 発光装置
KR20100080423A (ko) * 2008-12-30 2010-07-08 삼성엘이디 주식회사 발광소자 패키지 및 그 제조방법
JP5402804B2 (ja) * 2010-04-12 2014-01-29 デクセリアルズ株式会社 発光装置の製造方法
US8877567B2 (en) * 2010-11-18 2014-11-04 Stats Chippac, Ltd. Semiconductor device and method of forming uniform height insulating layer over interposer frame as standoff for semiconductor die
US9306117B2 (en) * 2011-07-25 2016-04-05 Industrial Technology Research Institute Transfer-bonding method for light emitting devices
TWI499031B (zh) * 2012-03-22 2015-09-01 光芯科技股份有限公司 發光裝置
JP2013211443A (ja) * 2012-03-30 2013-10-10 Toyohashi Univ Of Technology 発光装置の製造方法
KR102135352B1 (ko) * 2013-08-20 2020-07-17 엘지전자 주식회사 표시장치
US10304709B2 (en) * 2015-04-28 2019-05-28 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelikj Onderzoek Tno Apparatus and method for contactless transfer and soldering of chips using a flash lamp
US10193012B2 (en) * 2015-05-21 2019-01-29 Goertek, Inc. Transferring method, manufacturing method, device and electronic apparatus of micro-LED
TWI783910B (zh) 2016-01-15 2022-11-21 荷蘭商庫力克及索發荷蘭公司 放置超小或超薄之離散組件
US10312310B2 (en) * 2016-01-19 2019-06-04 Diftek Lasers, Inc. OLED display and method of fabrication thereof
KR102617563B1 (ko) * 2016-09-22 2023-12-27 엘지전자 주식회사 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법
JP6853882B2 (ja) * 2016-10-24 2021-03-31 グロ アーベーGlo Ab 発光ダイオード、ディスプレイデバイス、および、直視型ディスプレイデバイス
US20190043843A1 (en) * 2017-08-01 2019-02-07 Innolux Corporation Methods for manufacturing a display device
CN107658371B (zh) * 2017-09-15 2019-01-04 武汉大学 基于激光直写的Micro-LED的制造方法
TWI642047B (zh) * 2018-01-26 2018-11-21 Flex Tek Co., Ltd. 可撓性微發光二極體顯示模組
US10707105B1 (en) * 2018-03-29 2020-07-07 Facebook Technologies, Llc Selective shape memory alloy pick-up head
KR102498453B1 (ko) * 2018-05-14 2023-02-09 에피스타 코포레이션 발광 디바이스 및 그 제조 방법
US10985046B2 (en) * 2018-06-22 2021-04-20 Veeco Instruments Inc. Micro-LED transfer methods using light-based debonding
US11107947B2 (en) * 2018-07-10 2021-08-31 Long Yang Micro light emitting diode

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010251359A (ja) 2009-04-10 2010-11-04 Sony Corp 素子の移載方法
JP2010251360A (ja) 2009-04-10 2010-11-04 Sony Corp 表示装置の製造方法および表示装置
JP2014515883A (ja) 2011-04-11 2014-07-03 エヌディーエスユー リサーチ ファウンデーション レーザで促進される、分離した部品の選択的な転写
JP2018060993A (ja) 2016-09-29 2018-04-12 東レエンジニアリング株式会社 転写方法、実装方法、転写装置、及び実装装置

Also Published As

Publication number Publication date
US20230187597A1 (en) 2023-06-15
TW202508018A (zh) 2025-02-16
US20210159379A1 (en) 2021-05-27
TW201947737A (zh) 2019-12-16
CN116682923A (zh) 2023-09-01
DE102019112546A1 (de) 2019-11-14
TWI879686B (zh) 2025-04-01
US20190348588A1 (en) 2019-11-14
CN116682924A (zh) 2023-09-01
US20240234660A1 (en) 2024-07-11
KR20230023696A (ko) 2023-02-17
KR102688372B1 (ko) 2024-07-24
JP2023181464A (ja) 2023-12-21
US10923641B2 (en) 2021-02-16
KR20190130518A (ko) 2019-11-22
JP2019201206A (ja) 2019-11-21
US11894507B2 (en) 2024-02-06
TWI878222B (zh) 2025-04-01
DE102019112546B4 (de) 2023-09-28
CN110491987A (zh) 2019-11-22
US12317664B2 (en) 2025-05-27
KR102498453B1 (ko) 2023-02-09
US11621384B2 (en) 2023-04-04

Similar Documents

Publication Publication Date Title
JP7441612B2 (ja) 発光装置及びその製造方法
JP7170809B2 (ja) 発光装置
US10340257B2 (en) Display device using semiconductor light emitting device and fabrication method thereof
US12272681B2 (en) LED display panel, LED display apparatus having the same and method of fabricating the same
TWI457890B (zh) Display structure and display
JP2020004978A (ja) バックプレーン上に発光ダイオードアレイを生成する方法
US20230117219A1 (en) Method for manufacturing display device using semiconductor light-emitting elements and display device
JP2006294782A (ja) 半導体光源装置
US11075330B2 (en) Package structure and electronic device
US20170005247A1 (en) Light emitting module
KR20220147565A (ko) 마이크로 led 디스플레이 제조 시스템 및 방법
US11530804B2 (en) Light-emitting device
KR20220002289A (ko) 캔틸레버 전극을 갖는 발광 소자, 그것을 갖는 디스플레이 패널 및 디스플레이 장치
KR20190030482A (ko) 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법
TWI330416B (en) Light emitting device

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220512

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220512

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20220512

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220802

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221028

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230110

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230407

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20230704

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231102

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20231113

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240123

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240219

R150 Certificate of patent or registration of utility model

Ref document number: 7441612

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150