JP7433286B2 - 気体センサとその製造方法、および燃料電池自動車 - Google Patents
気体センサとその製造方法、および燃料電池自動車 Download PDFInfo
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- JP7433286B2 JP7433286B2 JP2021503440A JP2021503440A JP7433286B2 JP 7433286 B2 JP7433286 B2 JP 7433286B2 JP 2021503440 A JP2021503440 A JP 2021503440A JP 2021503440 A JP2021503440 A JP 2021503440A JP 7433286 B2 JP7433286 B2 JP 7433286B2
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- electrode
- metal oxide
- film
- insulating film
- oxide layer
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- 239000000446 fuel Substances 0.000 title claims description 49
- 238000004519 manufacturing process Methods 0.000 title claims description 36
- 239000007789 gas Substances 0.000 claims description 323
- 229910044991 metal oxide Inorganic materials 0.000 claims description 183
- 150000004706 metal oxides Chemical class 0.000 claims description 183
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 72
- 238000000034 method Methods 0.000 claims description 38
- 238000001514 detection method Methods 0.000 claims description 33
- 206010021143 Hypoxia Diseases 0.000 claims description 32
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 32
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 26
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- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 13
- 230000003197 catalytic effect Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 10
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical group [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 10
- 230000007423 decrease Effects 0.000 claims description 9
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- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 4
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 20
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- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 4
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- 238000001459 lithography Methods 0.000 description 2
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- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
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- 238000000059 patterning Methods 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical class O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910003077 Ti−O Inorganic materials 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
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- 230000008034 disappearance Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
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- 238000010894 electron beam technology Methods 0.000 description 1
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- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
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- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
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- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
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- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- B60L50/50—Electric propulsion with power supplied within the vehicle using propulsion power supplied by batteries or fuel cells
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- B60L50/50—Electric propulsion with power supplied within the vehicle using propulsion power supplied by batteries or fuel cells
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- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
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- B60K15/00—Arrangement in connection with fuel supply of combustion engines or other fuel consuming energy converters, e.g. fuel cells; Mounting or construction of fuel tanks
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Power Engineering (AREA)
- Combustion & Propulsion (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Fuel Cell (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019042012 | 2019-03-07 | ||
| JP2019042012 | 2019-03-07 | ||
| PCT/JP2020/000803 WO2020179226A1 (ja) | 2019-03-07 | 2020-01-14 | 気体センサとその製造方法、および燃料電池自動車 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2020179226A1 JPWO2020179226A1 (https=) | 2020-09-10 |
| JP7433286B2 true JP7433286B2 (ja) | 2024-02-19 |
Family
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| CN115335689B (zh) * | 2020-04-16 | 2026-02-10 | 新唐科技日本株式会社 | 氢传感器、氢检测方法以及氢检测装置 |
| WO2023017748A1 (ja) * | 2021-08-11 | 2023-02-16 | ヌヴォトンテクノロジージャパン株式会社 | 水素センサ |
| CN118661095A (zh) * | 2022-01-17 | 2024-09-17 | 新唐科技日本株式会社 | 氢检测方法、驱动电路以及氢检测装置 |
| WO2024053537A1 (ja) * | 2022-09-06 | 2024-03-14 | ヌヴォトンテクノロジージャパン株式会社 | 水素検知素子及びその製造方法 |
| US12298266B2 (en) | 2023-03-30 | 2025-05-13 | Saudi Arabian Oil Company | Changes in resistivity of mesh-patterned polymer thin films coated with conductive traces used to detect hydrocarbon fuels hidden in paraffin-based lubrication oils |
| US12546759B2 (en) | 2023-03-30 | 2026-02-10 | Saudi Arabian Oil Company | Thin polymer film dissolved under tension to detect hydrocarbon fuels hidden in paraffin-based lubrication oils |
| US12517107B2 (en) | 2023-04-11 | 2026-01-06 | Saudi Arabian Oil Company | Detecting hydrocarbon fuels in lubrication oils |
| US12392763B2 (en) | 2023-04-17 | 2025-08-19 | Saudi Arabian Oil Company | Hydrocarbon contaminant detection using polymer film |
| WO2025264179A1 (en) * | 2024-06-20 | 2025-12-26 | Agency For Science, Technology And Research | Hydrogen gas sensor and method of forming the same |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001509879A (ja) | 1995-05-16 | 2001-07-24 | エレクトリック パワー リサーチ インスチテュート | 金属−絶縁膜−半導体センサによる流体の検出 |
| JP2013068567A (ja) | 2011-09-26 | 2013-04-18 | Gunze Ltd | 水素ガスセンサの信号処理方法、及び信号処理装置 |
| WO2017037984A1 (ja) | 2015-08-28 | 2017-03-09 | パナソニックＩｐマネジメント株式会社 | 気体センサ、及び燃料電池自動車 |
| JP2017173307A (ja) | 2016-03-18 | 2017-09-28 | パナソニックＩｐマネジメント株式会社 | 水素センサ及び燃料電池自動車、並びに水素検出方法。 |
| JP2017181494A (ja) | 2016-03-25 | 2017-10-05 | パナソニックＩｐマネジメント株式会社 | 気体センサ、水素検出方法、及び燃料電池自動車 |
| WO2018123674A1 (ja) | 2016-12-28 | 2018-07-05 | パナソニックＩｐマネジメント株式会社 | 気体検出装置、気体センサシステム、燃料電池自動車、及び水素検出方法 |
| WO2018123673A1 (ja) | 2016-12-28 | 2018-07-05 | パナソニックＩｐマネジメント株式会社 | 気体検出装置、気体検出システム、燃料電池自動車、及び気体検出方法 |
| WO2019044256A1 (ja) | 2017-09-04 | 2019-03-07 | パナソニックＩｐマネジメント株式会社 | 気体センサ、気体検知装置、燃料電池自動車および気体センサの製造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5958348A (ja) | 1982-09-29 | 1984-04-04 | Hitachi Ltd | 水素ガス検知素子 |
| JP4590764B2 (ja) * | 2001-03-28 | 2010-12-01 | 株式会社デンソー | ガスセンサ及びその製造方法 |
| ES2212739B1 (es) * | 2003-01-02 | 2005-04-01 | Sociedad Española De Carburos Metalicos, S.A. | Sistema analizador para la deteccion de gases reductores y oxidantes en un gas portador y sensor de gases basado en oxidos metalicos de tipo semiconductor. |
| US20070054170A1 (en) * | 2005-09-02 | 2007-03-08 | Isenberg Arnold O | Oxygen ion conductors for electrochemical cells |
| US7951281B2 (en) * | 2008-06-04 | 2011-05-31 | Corning Incorporated | Methods for diminishing or preventing the deposition of a metal oxide on an electrode surface |
| JP5624866B2 (ja) * | 2010-12-06 | 2014-11-12 | ローム株式会社 | Ｍｅｍｓセンサの製造方法 |
| JP5603193B2 (ja) * | 2010-09-29 | 2014-10-08 | 株式会社日立製作所 | ガスセンサ |
| JP5352032B2 (ja) | 2011-10-06 | 2013-11-27 | パナソニック株式会社 | 不揮発性記憶素子および不揮発性記憶装置 |
| US20130202489A1 (en) * | 2012-02-03 | 2013-08-08 | The Hong Kong Polytechnic University | Gas sensor with a highly porous structure constructed of catalyst-capped metal-oxide nanoclusters |
| JP6736351B2 (ja) * | 2015-06-19 | 2020-08-05 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| CN107102032B (zh) * | 2016-02-22 | 2021-08-06 | 新唐科技日本株式会社 | 气体传感器及氢浓度判定方法 |
| CN107315034B (zh) * | 2016-04-26 | 2021-06-08 | 新唐科技日本株式会社 | 气体检测装置以及氢检测方法 |
| CN107315033B (zh) * | 2016-04-26 | 2021-08-06 | 新唐科技日本株式会社 | 气体检测装置以及氢检测方法 |
-
2020
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- 2020-01-14 WO PCT/JP2020/000803 patent/WO2020179226A1/ja not_active Ceased
- 2020-01-14 JP JP2021503440A patent/JP7433286B2/ja active Active
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2021
- 2021-08-27 US US17/459,262 patent/US12235232B2/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001509879A (ja) | 1995-05-16 | 2001-07-24 | エレクトリック パワー リサーチ インスチテュート | 金属−絶縁膜−半導体センサによる流体の検出 |
| JP2013068567A (ja) | 2011-09-26 | 2013-04-18 | Gunze Ltd | 水素ガスセンサの信号処理方法、及び信号処理装置 |
| WO2017037984A1 (ja) | 2015-08-28 | 2017-03-09 | パナソニックＩｐマネジメント株式会社 | 気体センサ、及び燃料電池自動車 |
| JP2017173307A (ja) | 2016-03-18 | 2017-09-28 | パナソニックＩｐマネジメント株式会社 | 水素センサ及び燃料電池自動車、並びに水素検出方法。 |
| JP2017181494A (ja) | 2016-03-25 | 2017-10-05 | パナソニックＩｐマネジメント株式会社 | 気体センサ、水素検出方法、及び燃料電池自動車 |
| WO2018123674A1 (ja) | 2016-12-28 | 2018-07-05 | パナソニックＩｐマネジメント株式会社 | 気体検出装置、気体センサシステム、燃料電池自動車、及び水素検出方法 |
| WO2018123673A1 (ja) | 2016-12-28 | 2018-07-05 | パナソニックＩｐマネジメント株式会社 | 気体検出装置、気体検出システム、燃料電池自動車、及び気体検出方法 |
| WO2019044256A1 (ja) | 2017-09-04 | 2019-03-07 | パナソニックＩｐマネジメント株式会社 | 気体センサ、気体検知装置、燃料電池自動車および気体センサの製造方法 |
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| JPWO2020179226A1 (https=) | 2020-09-10 |
| CN113518917B (zh) | 2024-09-27 |
| US20210389264A1 (en) | 2021-12-16 |
| CN113518917A (zh) | 2021-10-19 |
| US12235232B2 (en) | 2025-02-25 |
| WO2020179226A1 (ja) | 2020-09-10 |
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