JP7359876B2 - ニューロモルフィックスイッチング用の二重酸化物アナログスイッチ - Google Patents
ニューロモルフィックスイッチング用の二重酸化物アナログスイッチ Download PDFInfo
- Publication number
- JP7359876B2 JP7359876B2 JP2021573806A JP2021573806A JP7359876B2 JP 7359876 B2 JP7359876 B2 JP 7359876B2 JP 2021573806 A JP2021573806 A JP 2021573806A JP 2021573806 A JP2021573806 A JP 2021573806A JP 7359876 B2 JP7359876 B2 JP 7359876B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- layer
- neuromorphic
- silicon
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000009977 dual effect Effects 0.000 title 1
- 239000000463 material Substances 0.000 claims description 149
- 238000000034 method Methods 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 47
- 239000007772 electrode material Substances 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 230000007704 transition Effects 0.000 claims description 14
- 229910044991 metal oxide Inorganic materials 0.000 claims description 12
- 150000004706 metal oxides Chemical class 0.000 claims description 12
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 10
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 9
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 229910052732 germanium Inorganic materials 0.000 claims description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- 229910003440 dysprosium oxide Inorganic materials 0.000 claims description 4
- NLQFUUYNQFMIJW-UHFFFAOYSA-N dysprosium(iii) oxide Chemical compound O=[Dy]O[Dy]=O NLQFUUYNQFMIJW-UHFFFAOYSA-N 0.000 claims description 4
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 4
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 4
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 4
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 3
- 239000000395 magnesium oxide Substances 0.000 claims description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 3
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 40
- 238000012545 processing Methods 0.000 description 21
- 230000008569 process Effects 0.000 description 10
- 238000000151 deposition Methods 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 6
- -1 scantium oxide Chemical compound 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910052752 metalloid Inorganic materials 0.000 description 4
- 150000002738 metalloids Chemical class 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052723 transition metal Inorganic materials 0.000 description 3
- 150000003624 transition metals Chemical class 0.000 description 3
- 239000010953 base metal Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910000750 Niobium-germanium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012432 intermediate storage Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910001848 post-transition metal Inorganic materials 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/884—Switching materials based on at least one element of group IIIA, IVA or VA, e.g. elemental or compound semiconductors
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/06—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
- G06N3/063—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using electronic means
- G06N3/065—Analogue means
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biomedical Technology (AREA)
- Biophysics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Mathematical Physics (AREA)
- Data Mining & Analysis (AREA)
- Molecular Biology (AREA)
- Computing Systems (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Evolutionary Computation (AREA)
- Software Systems (AREA)
- Computational Linguistics (AREA)
- Artificial Intelligence (AREA)
- Neurology (AREA)
- Semiconductor Memories (AREA)
- Electrodes Of Semiconductors (AREA)
Description
本出願は、その内容全体があらゆる目的で参照することによって本明細書に組み込まれる、2019年6月12日出願の米国仮出願第62/860,313号の優先権の利益を主張する。
Claims (14)
- ニューロモルフィック用途のための半導体構造であって、
基板材料の上に重なる第1の層であって、第1の酸化物材料を含む、第1の層;
前記第1の層に隣接して配置された第2の層であって、第2の酸化物材料を含む、第2の層;及び
前記第2の層の上に重なって堆積された電極材料;を含み、
前記第1の酸化物材料及び前記第2の酸化物材料は、前記第1の酸化物材料の酸素親和性に対する前記第2の酸化物材料の酸素親和性が、前記半導体構造にセット電流が印加された時に、前記半導体構造におけるバルクスイッチングを引き起こし、フィラメントの形成を妨げるのに十分な、前記第2の酸化物材料と前記第1の酸化物材料との間の酸素交換を引き起こすことによって特徴付けられる、
ニューロモルフィック用途のための半導体構造。 - 前記第1の層が前記基板材料と接触して形成される、請求項1に記載のニューロモルフィック用途のための半導体構造。
- 前記第1の層と接触する前記基板材料が電極材料を含む、請求項1に記載のニューロモルフィック用途のための半導体構造。
- 前記電極材料が、白金、窒化チタン、又は窒化タンタルのうちの少なくとも1つを含む、請求項3に記載のニューロモルフィック用途のための半導体構造。
- 前記第1の酸化物材料及び前記第2の酸化物材料が、酸化チタン、酸化ハフニウム、酸化ケイ素、酸化ジルコニウム、酸化アルミニウム、酸化マグネシウム、酸化タンタル、酸化ジスプロシウム、酸化スカンチウム(scantium oxide)、又は酸化ランタンのうちの1つ以上を含む、請求項1に記載のニューロモルフィック用途のための半導体構造。
- 前記第1の層が酸化ケイ素を含み、前記第2の層が酸化チタンを含む、請求項5に記載のニューロモルフィック用途のための半導体構造。
- 前記第1の層と前記基板材料との間に配置された抵抗性材料をさらに含み、前記抵抗性材料が、ケイ素、ゲルマニウム、ガリウム、又は炭素のうちの1つ以上を含む、請求項1に記載のニューロモルフィック用途のための半導体構造。
- 1Vターンオン電圧における前記半導体構造のセット電流及びリセット電流が、100μA以下である、請求項1に記載のニューロモルフィック用途のための半導体構造。
- ニューロモルフィック用途のためのデバイスを形成する方法であって、
基板の上に重なるケイ素含有材料の層を形成することであって、前記基板が金属電極材料を含み、前記金属電極材料上に前記ケイ素含有材料が形成される、ケイ素含有材料の層を形成すること;及び
前記ケイ素含有材料の上に重なる金属酸化物材料の層を形成すること;を含み、
前記ケイ素含有材料がアモルファスシリコンを含み、前記金属酸化物材料の前記層を形成することが、前記アモルファスシリコンを酸化ケイ素へと遷移させる、
ニューロモルフィック用途のためのデバイスを形成する方法。 - 前記酸化ケイ素が、2nm以下の厚さによって特徴付けられ、前記アモルファスシリコンの少なくとも一部が、前記遷移中に前記金属電極材料に近接して維持される、請求項9に記載のニューロモルフィック用途のためのデバイスを形成する方法。
- 前記金属電極材料が、白金、窒化チタン、又は窒化タンタルのうちの少なくとも1つを含む、請求項9に記載のニューロモルフィック用途のためのデバイスを形成する方法。
- 前記金属酸化物材料が5nm以上の厚さによって特徴付けられ、前記金属酸化物材料が、酸化チタン、酸化ハフニウム、酸化ジルコニウム、酸化タンタル、酸化ジスプロシウム、酸化スカンチウム(scantium oxide)、又は酸化ランタンのうちの1つ以上を含む、請求項9に記載のニューロモルフィック用途のためのデバイスを形成する方法。
- 前記金属酸化物材料の上に重なる追加の電極材料を形成することをさらに含む、請求項9に記載のニューロモルフィック用途のためのデバイスを形成する方法。
- ニューロモルフィック用途のためのデバイスを形成する方法であって、
基板の上に重なるケイ素含有材料の層を形成することであって、前記基板が金属電極材料を含み、前記金属電極材料上に前記ケイ素含有材料が形成される、ケイ素含有材料の層を形成すること;及び
前記ケイ素含有材料の上に重なる金属酸化物材料の層を形成すること;を含み、
形成されたニューロモルフィックデバイスが、前記ニューロモルフィックデバイス内のフィラメント状スイッチングに対するバルクスイッチングによって特徴付けられ、形成された前記デバイスが、100μA以下の1Vターンオン電圧での前記ニューロモルフィックデバイスのセット電流及びリセット電流によって特徴付けられる、
ニューロモルフィック用途のためのデバイスを形成する方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962860313P | 2019-06-12 | 2019-06-12 | |
US62/860,313 | 2019-06-12 | ||
PCT/US2020/034500 WO2020251747A1 (en) | 2019-06-12 | 2020-05-26 | Dual oxide analog switch for neuromorphic switching |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022536917A JP2022536917A (ja) | 2022-08-22 |
JP7359876B2 true JP7359876B2 (ja) | 2023-10-11 |
Family
ID=73746527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021573806A Active JP7359876B2 (ja) | 2019-06-12 | 2020-05-26 | ニューロモルフィックスイッチング用の二重酸化物アナログスイッチ |
Country Status (7)
Country | Link |
---|---|
US (2) | US11616195B2 (ja) |
EP (1) | EP3984074A4 (ja) |
JP (1) | JP7359876B2 (ja) |
KR (1) | KR20220018055A (ja) |
CN (1) | CN113950752A (ja) |
TW (1) | TWI738378B (ja) |
WO (1) | WO2020251747A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017106317A1 (en) | 2015-12-14 | 2017-06-22 | Shih-Yuan Wang | Resistive random-access memory with protected switching layer |
US20180123033A1 (en) | 2016-09-30 | 2018-05-03 | International Business Machines Corporation | Multivalent oxide cap for analog switching resistive memory |
KR101940669B1 (ko) | 2017-12-07 | 2019-01-21 | 재단법인 대구경북과학기술원 | 인공 시냅스 소자 및 이의 제조방법 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013162086A (ja) * | 2012-02-08 | 2013-08-19 | Toshiba Corp | 不揮発性抵抗変化素子 |
SG11201405685RA (en) * | 2012-03-14 | 2014-11-27 | Tokyo Inst Tech | Resistance change memory device |
KR101607820B1 (ko) * | 2012-09-05 | 2016-03-30 | 가부시키가이샤 아루박 | 저항 변화 소자 및 그 제조 방법 |
JP5572749B2 (ja) * | 2012-09-26 | 2014-08-13 | パナソニック株式会社 | 不揮発性記憶素子及びその製造方法 |
KR101588980B1 (ko) * | 2014-12-04 | 2016-01-27 | 포항공과대학교 산학협력단 | 뉴로모픽 시스템 응용을 위한 시냅스 소자 및 그 제조방법 |
US10049732B2 (en) * | 2015-02-24 | 2018-08-14 | Hewlett Packard Enterprise Development Lp | Determining a state of memristors in a crossbar array |
JP6430306B2 (ja) * | 2015-03-19 | 2018-11-28 | 東芝メモリ株式会社 | 不揮発性記憶装置 |
US9767407B2 (en) * | 2015-09-18 | 2017-09-19 | Samsung Electronics Co., Ltd. | Weighting device, neural network, and operating method of the weighting device |
KR101811108B1 (ko) | 2015-12-16 | 2017-12-26 | 포항공과대학교 산학협력단 | 부도체-도체 전이현상을 이용한 뉴런 소자를 포함한 고집적 뉴로모픽 시스템 및 고집적 뉴로모픽 회로 |
US10062845B1 (en) * | 2016-05-13 | 2018-08-28 | Crossbar, Inc. | Flatness of memory cell surfaces |
KR102143440B1 (ko) | 2017-01-20 | 2020-08-11 | 한양대학교 산학협력단 | 3차원 뉴로모픽 소자 및 그 제조방법 |
JP2018160547A (ja) * | 2017-03-22 | 2018-10-11 | 東芝メモリ株式会社 | 記憶装置 |
KR102369715B1 (ko) | 2017-06-12 | 2022-03-03 | 삼성전자주식회사 | 이차원 물질을 포함하는 비휘발성 메모리 소자 및 이를 포함하는 장치 |
US11133492B2 (en) | 2017-11-30 | 2021-09-28 | International Business Machines Corporation | Battery structure with stable voltage for neuromorphic computing |
-
2020
- 2020-05-26 WO PCT/US2020/034500 patent/WO2020251747A1/en unknown
- 2020-05-26 EP EP20821800.8A patent/EP3984074A4/en active Pending
- 2020-05-26 JP JP2021573806A patent/JP7359876B2/ja active Active
- 2020-05-26 US US16/883,009 patent/US11616195B2/en active Active
- 2020-05-26 KR KR1020227000884A patent/KR20220018055A/ko not_active Application Discontinuation
- 2020-05-26 CN CN202080042745.8A patent/CN113950752A/zh active Pending
- 2020-06-10 TW TW109119472A patent/TWI738378B/zh active
-
2023
- 2023-03-28 US US18/190,971 patent/US20230232727A1/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017106317A1 (en) | 2015-12-14 | 2017-06-22 | Shih-Yuan Wang | Resistive random-access memory with protected switching layer |
US20180375021A1 (en) | 2015-12-14 | 2018-12-27 | Shih-Yuan Wang | Resistive random-access memory with protected switching layer |
US20180123033A1 (en) | 2016-09-30 | 2018-05-03 | International Business Machines Corporation | Multivalent oxide cap for analog switching resistive memory |
KR101940669B1 (ko) | 2017-12-07 | 2019-01-21 | 재단법인 대구경북과학기술원 | 인공 시냅스 소자 및 이의 제조방법 |
Non-Patent Citations (1)
Title |
---|
STATHOPOULOS,Spyros, et al,Multibit memory operation of metal-oxide bi-layer memristors,SCIENTIFIC REPORTS,Nature Publishing Group,2017年12月13日,p.1-7,Supplementary information(p.1-9) |
Also Published As
Publication number | Publication date |
---|---|
JP2022536917A (ja) | 2022-08-22 |
WO2020251747A1 (en) | 2020-12-17 |
CN113950752A (zh) | 2022-01-18 |
TW202107564A (zh) | 2021-02-16 |
EP3984074A1 (en) | 2022-04-20 |
US20230232727A1 (en) | 2023-07-20 |
TWI738378B (zh) | 2021-09-01 |
EP3984074A4 (en) | 2023-08-09 |
US20200395538A1 (en) | 2020-12-17 |
US11616195B2 (en) | 2023-03-28 |
KR20220018055A (ko) | 2022-02-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101851101B1 (ko) | 개선된 형성 전압 특성을 갖는 저항성 랜덤 액세스 메모리 (rram) 및 이의 제조 방법 | |
US9466794B2 (en) | Low form voltage resistive random access memory (RRAM) | |
JP5783961B2 (ja) | 不揮発性記憶装置 | |
US8530876B2 (en) | Semiconductor memory device and method of manufacturing the same | |
CN104979470A (zh) | Rram单元的底电极的形成 | |
US20120267597A1 (en) | Sidewall thin film electrode with self-aligned top electrode and programmable resistance memory | |
US8357927B2 (en) | Semiconductor device and method for manufacturing the same | |
US8895390B2 (en) | Memory device with a textured lowered electrode | |
WO2017044166A1 (en) | Three-dimensional resistive random access memory containing self-aligned memory elements | |
US11653583B2 (en) | Resistive random access memories and method for fabricating the same | |
US11258009B2 (en) | Switching atomic transistor and method for operating same | |
JPWO2009157479A1 (ja) | スイッチング素子およびスイッチング素子の製造方法 | |
JP7359876B2 (ja) | ニューロモルフィックスイッチング用の二重酸化物アナログスイッチ | |
US20220069218A1 (en) | Resistive random access memory with preformed filaments | |
US20160315256A1 (en) | V-shape resistive memory element | |
US20210028229A1 (en) | Increasing selector surface area in crossbar array circuits | |
US10446552B2 (en) | Memory element | |
TWI779282B (zh) | 記憶體元件的退火處理 | |
TW201724531A (zh) | 用於薄膜儲存裝置之離散儲存元件及其形成方法 | |
US11335853B2 (en) | Method of manufacturing OTS device, and OTS device | |
KR20180012351A (ko) | 수직 원자 트랜지스터 및 이의 동작방법 | |
US20200335329A1 (en) | Annealing processes to stabilize nickel-containing films | |
JP2023068642A (ja) | 強誘電体メモリとOxRAM抵抗変化型メモリの同時製造方法および強誘電体メモリとOxRAM抵抗変化型メモリを同時集積したデバイス | |
CN116157003A (zh) | 电阻式随机存取存储元件、存储器件及其制备方法 | |
KR20110035774A (ko) | 상변화 메모리 소자 및 그 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220215 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230314 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230322 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230621 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230829 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230928 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7359876 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |