JP7351839B2 - ルテニウムバルクの化学機械研磨組成物 - Google Patents
ルテニウムバルクの化学機械研磨組成物 Download PDFInfo
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- JP7351839B2 JP7351839B2 JP2020543067A JP2020543067A JP7351839B2 JP 7351839 B2 JP7351839 B2 JP 7351839B2 JP 2020543067 A JP2020543067 A JP 2020543067A JP 2020543067 A JP2020543067 A JP 2020543067A JP 7351839 B2 JP7351839 B2 JP 7351839B2
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/30—Acidic compositions for etching other metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/32—Alkaline compositions
- C23F1/40—Alkaline compositions for etching other metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
Description
Claims (16)
- ルテニウム研磨組成物であって、
アンモニアと、
含酸素ハロゲン化合物と、
研磨剤と、
水と、
任意に、酸と、
1重量%未満の任意の付加成分と、
を含み、
前記アンモニアは、前記ルテニウム研磨組成物の全重量に基づき、0.03重量%乃至0.05重量%の量で存在し、
前記含酸素ハロゲン化合物は、ヨウ素、臭素、塩素、及びそれらのうちの任意の組み合わせから成る群から選択されるハロゲンを含み、かつ、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至10重量%の量で存在し、
前記ルテニウム研磨組成物のpHは6と8の間であり、
前記ルテニウム研磨組成物は、テトラメチルアンモニウムヒドロキシドを含まず、かつ、
前記ルテニウム研磨組成物によるCMP研磨における研磨レート比が、(数1)で規定される関係を満たす、ルテニウム研磨組成物。
(数1)(CVDルテニウムの研磨レート/TEOSの研磨レート)で求められる研摩レート比≧(624/41) - 請求項1に記載のルテニウム研磨組成物であって、
前記含酸素ハロゲン化合物は、過ヨウ素酸であるルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記含酸素ハロゲン化合物は、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至2重量%の量で存在するルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記研磨剤は、アルミナ、シリカ、チタニア、セリア、ジルコニア、それらの共形成生成物、及びそれらのうちの任意の組み合わせから成る群から選択されるルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記研磨剤はシリカであるルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記研磨剤は、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至12重量%の量で存在するルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記研磨剤は、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至6重量%の量で存在するルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記酸は、カルボン酸、有機スルホン酸、有機ホスホン酸、又はそれらのうちの任意の組み合わせから成る群から選択されるルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記酸は、1,2‐エタンジスルホン酸、4‐アミノ‐3‐ヒドロキシ‐1‐ナフタレンスルホン酸、8‐ヒドロキシキノリン‐5‐スルホン酸、アミノメタンスルホン酸、ベンゼンスルホン酸、ヒドロキシルアミンO‐スルホン酸、メタンスルホン酸、m‐キシレン‐4‐スルホン酸、ポリ(4‐スチレンスルホン酸)、ポリアネトールスルホン酸、p‐トルエンスルホン酸、及びトリフルオロメタンスルホン酸、ポリ(ビニルホスホン酸)、1‐ヒドロキシエタン‐1,1‐ジホスホン酸、ニトリロトリ(メチルホスホン酸)、ジエチレントリアミンペンタキス(メチルホスホン酸)、N,N,N′N′‐エチレンジアミンテトラキス(メチレンホスホン酸)、n‐ヘキシルホスホン酸、ベンジルホスホン酸、及びフェニルホスホン酸、及びそれらのうちの任意の組み合わせから成る群から選択されるルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記酸は、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至10重量%の量で存在するルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記酸は、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至1重量%の量で存在するルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記ルテニウム研磨組成物は実質的にアゾールを含まないルテニウム研磨組成物。 - 請求項1に記載のルテニウム研磨組成物であって、
前記研磨剤はシリカであり、該シリカは、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至12重量%の量で存在し、
前記酸は有機スルホン酸であり、該有機スルホン酸は、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至10重量%の量で存在するルテニウム研磨組成物。 - ルテニウム材料を基材から除去するための方法であって、
回転研磨パッドで前記基材を研磨しながら請求項1に記載の前記ルテニウム研磨組成物を前記基材に塗布する工程を有する方法。 - ルテニウム研磨組成物であって、
ルテニウム表面不動態層の軟化剤と、
研磨レート増強剤(removal rate enhancer)と、
研磨剤と、
ルテニウム酸化剤と、
水と、
1重量%未満の任意の付加成分と、
を含み、
前記軟化剤は、前記ルテニウム研磨組成物の全重量に基づき、0.03重量%乃至0.05重量%の量のアンモニアを含有し、
前記研磨レート増強剤は、酸を含有し、
前記ルテニウム酸化剤は、過ヨウ素酸を含有し、
前記ルテニウム研磨組成物のpHは6と8の間であるルテニウム研磨組成物。 - ルテニウム研磨組成物であって、本質的に、
アンモニアと、
含酸素ハロゲン化合物と、
研磨剤と、
酸と、
水と、
1重量%未満の任意の付加成分と、
からなり、
前記アンモニアは、前記ルテニウム研磨組成物の全重量に基づき、0.03重量%乃至0.05重量%の量で存在し、
前記含酸素ハロゲン化合物は、ヨウ素、臭素、塩素、及びそれらのうちの任意の組み合わせから成る群から選択されるハロゲンを含み、かつ、前記ルテニウム研磨組成物の全重量に基づき、0.01重量%乃至10重量%の量で存在し、
前記ルテニウム研磨組成物のpHは7と8の間である、ルテニウム研磨組成物。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US201862649326P | 2018-03-28 | 2018-03-28 | |
US62/649,326 | 2018-03-28 | ||
PCT/US2019/021844 WO2019190738A1 (en) | 2018-03-28 | 2019-03-12 | Bulk ruthenium chemical mechanical polishing composition |
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JP2021535938A JP2021535938A (ja) | 2021-12-23 |
JP7351839B2 true JP7351839B2 (ja) | 2023-09-27 |
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Country Status (7)
Country | Link |
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US (2) | US11279850B2 (ja) |
EP (1) | EP3774647A4 (ja) |
JP (1) | JP7351839B2 (ja) |
KR (1) | KR102288638B1 (ja) |
CN (1) | CN110317540A (ja) |
TW (2) | TWI774944B (ja) |
WO (1) | WO2019190738A1 (ja) |
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US10847410B2 (en) * | 2018-09-13 | 2020-11-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Ruthenium-containing semiconductor structure and method of manufacturing the same |
JP6895577B2 (ja) * | 2019-11-21 | 2021-06-30 | 東京応化工業株式会社 | エッチング液、エッチング液の製造方法、被処理体の処理方法、及びルテニウム含有配線の製造方法 |
US11898081B2 (en) * | 2019-11-21 | 2024-02-13 | Tokyo Ohka Kogyo Co., Ltd. | Ruthenium-etching solution, method for manufacturing ruthenium-etching solution, method for processing object to be processed, and method for manufacturing ruthenium-containing wiring |
CN114945648A (zh) * | 2020-02-13 | 2022-08-26 | 富士胶片电子材料美国有限公司 | 抛光组合物及其使用方法 |
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2019
- 2019-03-12 JP JP2020543067A patent/JP7351839B2/ja active Active
- 2019-03-12 EP EP19776280.0A patent/EP3774647A4/en active Pending
- 2019-03-12 WO PCT/US2019/021844 patent/WO2019190738A1/en unknown
- 2019-03-12 US US16/299,935 patent/US11279850B2/en active Active
- 2019-03-21 TW TW108109825A patent/TWI774944B/zh active
- 2019-03-21 TW TW111128761A patent/TWI811046B/zh active
- 2019-03-27 CN CN201910237774.9A patent/CN110317540A/zh active Pending
- 2019-03-28 KR KR1020190036013A patent/KR102288638B1/ko active IP Right Grant
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2022
- 2022-02-11 US US17/669,519 patent/US20220162478A1/en active Pending
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JP2006519490A (ja) | 2003-02-27 | 2006-08-24 | キャボット マイクロエレクトロニクス コーポレイション | 貴金属のcmp方法 |
US20080038995A1 (en) | 2003-08-14 | 2008-02-14 | Small Robert J | Periodic Acid Compositions For Polishing Ruthenium/Low K Substrates |
JP2009514219A (ja) | 2005-10-26 | 2009-04-02 | キャボット マイクロエレクトロニクス コーポレイション | 銅/ルテニウム基材のcmp |
CN107603489A (zh) | 2017-09-14 | 2018-01-19 | 合肥惠科金扬科技有限公司 | 一种用于amoled屏玻璃基板的抛光液 |
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WO2019190738A1 (en) | 2019-10-03 |
EP3774647A1 (en) | 2021-02-17 |
KR20190113675A (ko) | 2019-10-08 |
US20220162478A1 (en) | 2022-05-26 |
CN110317540A (zh) | 2019-10-11 |
US11279850B2 (en) | 2022-03-22 |
US20190300750A1 (en) | 2019-10-03 |
JP2021535938A (ja) | 2021-12-23 |
TWI774944B (zh) | 2022-08-21 |
KR102288638B1 (ko) | 2021-08-12 |
TW202249113A (zh) | 2022-12-16 |
TW201946137A (zh) | 2019-12-01 |
TWI811046B (zh) | 2023-08-01 |
EP3774647A4 (en) | 2022-04-06 |
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