JP7351407B2 - アクチュエータ、流体制御装置、および、アクチュエータの製造方法 - Google Patents

アクチュエータ、流体制御装置、および、アクチュエータの製造方法 Download PDF

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Publication number
JP7351407B2
JP7351407B2 JP2022508083A JP2022508083A JP7351407B2 JP 7351407 B2 JP7351407 B2 JP 7351407B2 JP 2022508083 A JP2022508083 A JP 2022508083A JP 2022508083 A JP2022508083 A JP 2022508083A JP 7351407 B2 JP7351407 B2 JP 7351407B2
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Japan
Prior art keywords
power supply
supply member
frame
main surface
flat plate
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JP2022508083A
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Japanese (ja)
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JPWO2021186860A1 (https=
JPWO2021186860A5 (https=
Inventor
伸拓 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication of JPWO2021186860A5 publication Critical patent/JPWO2021186860A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/506—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a cylindrical shape and having stacking in the radial direction, e.g. coaxial or spiral type rolls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Reciprocating Pumps (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP2022508083A 2020-03-18 2021-01-12 アクチュエータ、流体制御装置、および、アクチュエータの製造方法 Active JP7351407B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020047131 2020-03-18
JP2020047131 2020-03-18
PCT/JP2021/000675 WO2021186860A1 (ja) 2020-03-18 2021-01-12 アクチュエータ、流体制御装置、および、アクチュエータの製造方法

Publications (3)

Publication Number Publication Date
JPWO2021186860A1 JPWO2021186860A1 (https=) 2021-09-23
JPWO2021186860A5 JPWO2021186860A5 (https=) 2022-12-08
JP7351407B2 true JP7351407B2 (ja) 2023-09-27

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ID=77770820

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JP2022508083A Active JP7351407B2 (ja) 2020-03-18 2021-01-12 アクチュエータ、流体制御装置、および、アクチュエータの製造方法

Country Status (4)

Country Link
US (1) US12123409B2 (https=)
JP (1) JP7351407B2 (https=)
CN (1) CN115315320B (https=)
WO (1) WO2021186860A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112138972B (zh) * 2020-09-28 2022-09-09 京东方科技集团股份有限公司 一种声波换能单元及其制备方法、声波换能器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000184496A (ja) 1998-12-14 2000-06-30 Taiyo Yuden Co Ltd 圧電音響装置とその製造方法
JP2008173546A (ja) 2007-01-17 2008-07-31 Alps Electric Co Ltd 圧電振動子及び圧電ポンプ
WO2011145544A1 (ja) 2010-05-21 2011-11-24 株式会社村田製作所 流体ポンプ
JP2017133507A (ja) 2016-01-29 2017-08-03 研能科技股▲ふん▼有限公司 小型流体制御装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4120954B2 (ja) * 2001-03-08 2008-07-16 株式会社リコー 静電型アクチュエータ及びインクジェットヘッド、画像形成装置
JP4224708B2 (ja) * 2004-05-17 2009-02-18 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、および電子機器
JP2007165664A (ja) * 2005-12-15 2007-06-28 Alps Electric Co Ltd 振動子の配線構造及び圧電ポンプ
JP2007307572A (ja) * 2006-05-17 2007-11-29 Alps Electric Co Ltd Ｆｐｃの半田付け方法及び半田付け構造
JP5226205B2 (ja) * 2006-12-11 2013-07-03 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 超音波探触子および超音波撮像装置
JP4957501B2 (ja) * 2007-10-16 2012-06-20 株式会社村田製作所 圧電マイクロブロア
JP2009146916A (ja) * 2007-12-11 2009-07-02 Fujikura Ltd 圧電ファン装置
JP5737848B2 (ja) * 2010-03-01 2015-06-17 セイコーエプソン株式会社 センサーデバイス、センサーデバイスの製造方法、モーションセンサー及びモーションセンサーの製造方法
JP5474262B1 (ja) * 2012-05-15 2014-04-16 京セラ株式会社 圧電アクチュエータ、圧電振動装置および携帯端末
CN105144749A (zh) * 2013-04-24 2015-12-09 株式会社村田制作所 超声波产生装置
WO2015125843A1 (ja) * 2014-02-21 2015-08-27 株式会社村田製作所 流体制御装置およびポンプ
JP6443146B2 (ja) * 2015-03-16 2018-12-26 セイコーエプソン株式会社 電子デバイス
JP6183574B2 (ja) 2015-04-27 2017-08-23 株式会社村田製作所 ポンプ
CN106412780B (zh) * 2016-09-05 2020-06-05 南昌欧菲生物识别技术有限公司 超声波探头及其制造方法
JP6926647B2 (ja) * 2017-05-09 2021-08-25 セイコーエプソン株式会社 実装構造体、超音波デバイス、超音波探触子、超音波装置、及び電子機器
TWI680232B (zh) * 2018-08-13 2019-12-21 科際精密股份有限公司 流體驅動裝置
CN112768599B (zh) * 2019-11-04 2025-07-15 科际精密股份有限公司 致动器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000184496A (ja) 1998-12-14 2000-06-30 Taiyo Yuden Co Ltd 圧電音響装置とその製造方法
JP2008173546A (ja) 2007-01-17 2008-07-31 Alps Electric Co Ltd 圧電振動子及び圧電ポンプ
WO2011145544A1 (ja) 2010-05-21 2011-11-24 株式会社村田製作所 流体ポンプ
JP2017133507A (ja) 2016-01-29 2017-08-03 研能科技股▲ふん▼有限公司 小型流体制御装置

Also Published As

Publication number Publication date
WO2021186860A1 (ja) 2021-09-23
JPWO2021186860A1 (https=) 2021-09-23
US20230006126A1 (en) 2023-01-05
CN115315320A (zh) 2022-11-08
US12123409B2 (en) 2024-10-22
CN115315320B (zh) 2024-04-02

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