WO2021186860A1 - アクチュエータ、流体制御装置、および、アクチュエータの製造方法 - Google Patents

アクチュエータ、流体制御装置、および、アクチュエータの製造方法 Download PDF

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Publication number
WO2021186860A1
WO2021186860A1 PCT/JP2021/000675 JP2021000675W WO2021186860A1 WO 2021186860 A1 WO2021186860 A1 WO 2021186860A1 JP 2021000675 W JP2021000675 W JP 2021000675W WO 2021186860 A1 WO2021186860 A1 WO 2021186860A1
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WIPO (PCT)
Prior art keywords
feeding member
frame body
main surface
flat plate
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/000675
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English (en)
French (fr)
Japanese (ja)
Inventor
伸拓 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2022508083A priority Critical patent/JP7351407B2/ja
Priority to CN202180022072.4A priority patent/CN115315320B/zh
Publication of WO2021186860A1 publication Critical patent/WO2021186860A1/ja
Priority to US17/930,440 priority patent/US12123409B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/506—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a cylindrical shape and having stacking in the radial direction, e.g. coaxial or spiral type rolls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Definitions

  • the present invention relates to an actuator that vibrates a flat plate by a piezoelectric element.
  • Patent Document 1 discloses a pump using a piezoelectric element.
  • the pump described in Patent Document 1 includes a piezoelectric element, a diaphragm, a feeding plate, and a facing plate.
  • the diaphragm includes a disk, a frame, and a connecting portion.
  • the frame body is arranged so as to surround the disk, and is connected to the outer edge of the disk by a connecting portion.
  • the connecting portion has a beam shape and vibratesly supports the disk with respect to the frame body.
  • the piezoelectric element is arranged on one main surface of the disk in the diaphragm.
  • the feeding plate is arranged on the side opposite to the diaphragm side of the piezoelectric element.
  • the internal connection terminal of the power feeding plate is connected to the surface of the piezoelectric element opposite to the diaphragm side.
  • the facing plate is arranged on the side opposite to the side where the piezoelectric element is arranged in the diaphragm.
  • the facing plate is connected to the frame body in the diaphragm.
  • External connection terminals are provided on the power supply plate and the facing plate, respectively, and drive signals are supplied to the piezoelectric element by these terminals.
  • the drive signal can be supplied to the feeding surfaces (two main surfaces) of the piezoelectric elements at different positions in the thickness direction with a simple structure. It was difficult to achieve.
  • an object of the present invention is to provide an actuator capable of more reliably supplying a drive signal to a piezoelectric element with a simple structure while keeping the positions of two external connection terminals in the thickness direction of the apparatus the same. There is.
  • the actuator of the present invention includes a first member, a piezoelectric element, a first feeding member, a second feeding member, and an insulating layer.
  • the first member is composed of a conductive plate having a first main surface and a second main surface, and is connected to a first flat plate, a frame body surrounding the first flat plate, and an outer edge and a frame body of the first flat plate to form a frame.
  • a connecting member for connecting the first flat plate to the body is provided.
  • the piezoelectric element has a third main surface and a fourth main surface, and the third main surface faces the first main surface of the first flat plate and is arranged on the first flat plate.
  • the first power feeding member is arranged on the first main surface side of the first member and is connected to the frame body of the first member.
  • the second member is arranged on the same side as the first power feeding member with respect to the first member, and has a portion connected to the fourth main surface and a portion overlapping the frame body.
  • the insulating layer is arranged between the second feeding member and the frame body.
  • the first power feeding member includes a first external connection terminal that projects in a direction orthogonal to the thickness direction, with the direction in which the first power feeding member and the second feeding member and the piezoelectric element are lined up as the thickness direction.
  • the second power feeding member includes a second external connection terminal that projects in a direction orthogonal to the thickness direction.
  • the first external connection terminal and the second external connection terminal are arranged at the same position in the thickness direction.
  • the portion of the first power feeding member opposite to the protruding side of the first external connection terminal is bent toward the frame body and electrically connected to the frame body.
  • the position of the first external connection terminal and the position of the second external connection terminal in the thickness direction of the actuator are the same, and the first power feeding member is directly connected to the frame body, and eventually to the piezoelectric element. It is connected and the second feeding member is directly connected to the piezoelectric element.
  • the present invention it is possible to more reliably supply the drive signal to the piezoelectric element with a simple structure while keeping the positions of the two external connection terminals in the thickness direction of the device the same.
  • FIG. 1 is an exploded perspective view of the fluid control device 10 including the actuator 11 according to the first embodiment.
  • 2 (A) is a plan view of the actuator 11 according to the first embodiment, and FIGS. 2 (B), 2 (C), and 2 (D) are side sectional views of the actuator 11.
  • FIG. 3 is a plan view in which the hatching of each component of the actuator 11 according to the first embodiment is different.
  • FIG. 4 is a perspective view of the power feeding member 60.
  • FIG. 5 is an exploded perspective view of the fluid control device including the actuator 11A according to the second embodiment.
  • FIG. 6A is a plan view of the actuator 11A according to the second embodiment, and FIG. 6D is a side sectional view of the actuator 11A.
  • 7 (B) and 7 (C) are side sectional views of the actuator 11B according to the third embodiment.
  • FIG. 1 is an exploded perspective view of the fluid control device 10 including the actuator 11 according to the first embodiment.
  • 2 (A) is a plan view of the actuator 11 according to the first embodiment, and FIGS. 2 (B), 2 (C), and 2 (D) are side sectional views of the actuator 11.
  • FIG. 3 is a plan view in which the hatching of each component of the actuator 11 according to the first embodiment is different.
  • the shapes of the respective components are exaggerated partially or as a whole in order to make the configurations of the actuator and the fluid control device easy to understand.
  • the actuator 11 includes a first member 20, a piezoelectric element 30, and a power supply.
  • a member 60 and an insulating layer 70 are provided.
  • the first member 20 is a conductive plate and has a main surface 201 and a main surface 202.
  • the main surface 201 corresponds to the "first main surface” of the present invention
  • the main surface 202 corresponds to the "second main surface” of the present invention.
  • the first member 20 includes a first flat plate 21, a frame body 22, and a plurality of connecting members 23.
  • the first flat plate 21 is a flat plate having a circular shape when viewed in a plane (shape when viewed in the thickness direction).
  • the frame body 22 is a flat plate, and is arranged outside the outer edge of the first flat plate 21 when viewed from the center of the first flat plate 21. In a plan view, the frame body 22 surrounds the first flat plate 21. That is, the frame body 22 has a circular opening in the center, and the first flat plate 21 is arranged in this opening.
  • the shape of the opening is similar to the outer shape of the first flat plate 21, and is larger than the outer shape of the first flat plate 21.
  • the outer shape of the frame body 22 is, for example, a rectangle, but the outer shape of the frame body 22 is not limited to a rectangle.
  • the plurality of connecting members 23 have a beam shape.
  • the plurality of connecting members 23 are arranged between the first flat plate 21 and the frame body 22.
  • the plurality of connecting members 23 are connected to the outer edge of the first flat plate 21 and the inner edge of the frame body 22.
  • the plurality of connecting members 23 are arranged at intervals along the outer edge of the first flat plate 21.
  • the number of connecting members 23 may be 3 or more, and the plurality of connecting members 23 may be arranged at equal intervals along the outer circumference of the first flat plate 21.
  • the plurality of voids 230 penetrate the first member 20 from the main surface 201 to the main surface 202.
  • the plurality of voids 230 are arranged between the first flat plate 21 and the frame body 22.
  • the plurality of gaps 230 are portions surrounded by the first flat plate 21, the frame body 22, and the plurality of connecting members 23 in the region between the first flat plate 21 and the frame body 22.
  • the plurality of voids 230 communicate with the space on the main surface 201 side of the first flat plate 21 and the space on the main surface 202 side.
  • the plurality of connecting members 23 are easily deformed by forming the plurality of connecting members 23 with the plurality of gaps 230 interposed therebetween. That is, the plurality of connecting members 23 vibrately connect the first flat plate 21 to the frame body 22.
  • the vibration of the first flat plate 21 here is a bending vibration, and the main surface 201 and the main surface 202 are displaced in a wavy shape when the first flat plate 21 is viewed from the side (viewed in a direction orthogonal to the thickness direction). Is.
  • the piezoelectric element 30 includes a piezoelectric body 31, a drive electrode 321 and a drive electrode 322.
  • the piezoelectric body 31 is a circular flat plate.
  • the drive electrode 321 is formed on one main surface of the flat plate-shaped piezoelectric body 31, and the drive electrode 322 is formed on the other main surface of the flat plate-shaped piezoelectric body 31.
  • the outer main surface 301 on the drive electrode 321 side of the piezoelectric element 30 corresponds to the "third main surface" of the present invention, and the outer main surface 302 on the drive electrode 322 side of the piezoelectric element 30 corresponds to the "fourth main surface" of the present invention. Corresponds to "face”.
  • FIG. 4 is a perspective view of the power feeding member 60.
  • the feeding member 60 is a conductive plate having a main surface 601 and a main surface 602, and includes a first feeding member 61 and a second feeding member 62.
  • the first feeding member 61 and the second feeding member 62 are arranged at the same position in the z direction (see each figure), which is the thickness direction of the actuator 11.
  • the outer shape of the first power feeding member 61 is substantially the same as the outer shape of the first member 20, and has an opening 600 in the center.
  • the opening 600 is the shape (inner shape) of the frame 22 on the side where the frame 22 of the first member 20 is connected to the connecting member 23, in other words, the first flat plate 21 of the first member 20, the plurality of connecting members 23, and the opening 600. It is substantially the same as the shape including the voids 230.
  • the opening 600 may be equal to or larger than the inner shape of the frame body 22.
  • the opening 600 is connected to the outside of the first power feeding member 61 in the x direction (see each figure), which is one direction orthogonal to the thickness direction.
  • the first feeding member 61 has an arc shape in which the ring is partially cut on one side in the x direction.
  • the first power feeding member 61 includes a first external connection terminal 619.
  • the first external connection terminal 619 has a rectangular shape that protrudes in the x direction from the end of the first power feeding member 61 on the side where the cut portion is located. In the z direction, the first external connection terminal 619 is arranged at the same position as the first power feeding member 61.
  • the second power feeding member 62 includes a first portion 621, a second portion 622, and a third portion 623, which are integrally formed.
  • the first portion 621 is located together with the first power feeding member 61 at a position overlapping the frame body 22 in a plan view, and forms a part of the outer shape of the opening 600 together with the frame body 22.
  • the second portion 622 and the third portion 623 are strips extending in the x direction.
  • the second portion 622 has a portion curved in the z direction and a portion extending in the x direction.
  • the portion curved in the z direction is connected to both ends of the portion extending in the x direction.
  • the second portion 622 is connected to the first portion 621 and the third portion 623 by the portions curved in the z direction, respectively.
  • the second feeding member 62 is partially recessed in the z direction when viewed from the main surface 601 side, in other words, partially in the z direction when viewed from the main surface 602 side, in the middle of the extending direction (x direction). It has a curved part that protrudes into the.
  • the first portion 621 of the second feeding member 62 is arranged at a portion of the first feeding member 61 where the ring is cut.
  • the first portion 621 is separated from the first feeding member 61.
  • the second portion 622 is arranged so as to project inside the opening 600, and the third portion 623 is arranged at the tip thereof.
  • the second power feeding member 62 includes a second external connection terminal 629.
  • the second external connection terminal 629 has a rectangular shape in which the second portion 622 of the first portion 621 protrudes in the x direction from the end opposite to the protruding side.
  • the second external connection terminal 629 is arranged at the same position as the first portion 621 of the second power feeding member 62.
  • the second external connection terminal 629 and the first external connection terminal 619 are arranged at the same position in the z direction (thickness direction of the actuator 11).
  • the second external connection terminal 629 and the first external connection terminal 619 are at the same position at exactly the same position so that both main surfaces coincide with each other.
  • the second external connection terminal 629 and the first external connection terminal 619 overlap so that the position of the second external connection terminal 629 in the thickness direction and the position of the first external connection terminal 619 in the thickness direction overlap at least in part. It may include the case where it is arranged.
  • the first feeding member 61 and the second feeding member 62 are molded in a state of being connected by the connecting member 63, and after the actuator 11 is assembled, more specifically, the first feeding member 61 is formed.
  • the first feeding member 61 is connected to the frame body 22, the second feeding member 62 is connected to the piezoelectric element 30, and then the members are individually separated.
  • the actuator 11 can be assembled while maintaining a stable positional relationship between the first feeding member 61 and the second feeding member 62.
  • connection member 63 is connected to the first power supply member 61 and the second power supply member 62 via the first external connection terminal 619 and the second external connection terminal 629.
  • the insulating layer 70 is in the form of a film having an insulating property.
  • the insulating layer 70 is formed of, for example, a resin containing any one of epoxy, polyimide, polyamideimide, polyester, polyether sulfone and the like as a main component.
  • the insulating layer 70 includes a first insulating layer 71 and a second insulating layer 72.
  • the first insulating layer 71 has substantially the same shape as the portion of the first power feeding member 61 that has the first external connection terminal 619.
  • the second insulating layer 72 has substantially the same shape as a portion in which the first portion 621 of the second feeding member 62 and a portion of the second portion 622 are combined.
  • the piezoelectric element 30 is arranged on the main surface 201 of the first flat plate 21. Specifically, the outer main surface 301 of the piezoelectric element 30 faces the main surface 201 of the first flat plate 21, and the drive electrode 321 and the first flat plate 21 are joined by a conductive bonding agent.
  • the bonding agent in the present application also includes an adhesive.
  • the center of the piezoelectric element 30 and the center of the first flat plate 21 are substantially coincident with each other.
  • the piezoelectric element 30 is distorted by applying a drive signal to the drive electrodes 321 and 322. Due to this distortion, the first flat plate 21 vibrates as described above.
  • the power feeding member 60 is arranged on the main surface 201 side of the first member 20. In other words, the power feeding member 60 is arranged on the side of the first member 20 where the piezoelectric element 30 is arranged.
  • the power feeding member 60 is arranged so that the main surface 601 faces the main surface 201 of the first member 20.
  • the second feeding member 62 is arranged so that the second portion 622 is separated from the piezoelectric element 30 by the first portion 621 and the third portion 623 in the z direction.
  • the second feeding member 62 includes a curved portion separated from the piezoelectric element 30 in the thickness direction of the actuator 11 in the middle of the extending direction.
  • the first power feeding member 61 and the second power feeding member 62 are arranged more specifically as follows when viewed in the z direction.
  • the first power feeding member 61 is arranged so as to overlap the frame body 22 of the first member 20.
  • the first portion 621 of the second feeding member 62 is arranged so as to overlap the frame body 22.
  • the third portion 623 of the second feeding member 62 is arranged so as to overlap the piezoelectric element 30. The third portion 623 comes into contact with the outer main surface 302 of the piezoelectric element 30.
  • the near-end side portion 611 (mainly referring to FIGS. 2A and 2C) of the first power feeding member 61 on the side having the first external connection terminal 619 is framed via the first insulating layer 71. Physically connected to body 22. More specifically, the first insulating layer 71 is formed on the main surface 601 of the near-end side portion 611 of the first power feeding member 61. Then, the surface of the first insulating layer 71 (the surface opposite to the contact surface with the near end side portion 611) is joined to the frame body 22 by using the adhesive 81.
  • the far-end side portion 612 (mainly referring to FIGS. 2 (A) and 2 (C)) on the opposite side of the first power feeding member 61 on the side having the first external connection terminal 619 is physically attached to the frame body 22. Connect physically and electrically. More specifically, the insulating layer is not formed on the far end side portion 612. The first power feeding member 61 is bent so that the far end side portion 612 is closer to the frame body 22 than the near end side portion 611. In this state, the main surface 601 of the far end side portion 612 is joined to the frame body 22 by using the adhesive 81.
  • the adhesive 81 is conductive (for example, it contains a conductive filler), the far end side portion 612 and the frame body 22 are physically and electrically connected. That is, the first power feeding member 61 and the frame body are fixed to the frame body 22 in a physically and electrically connected state.
  • the second power feeding member 62 (mainly referring to FIGS. 2 (A), 2 (C), and 2 (D)) is physically connected to the frame 22 via the second insulating layer 72. More specifically, the second insulating layer 72 is formed on the main surface 601 of the entire first portion 621 of the second feeding member 62 and a part of the second portion 622. Then, the surface of the second insulating layer 72 (the surface opposite to the contact surface with the first portion 621) is joined to the frame body 22 by using the adhesive 82. As a result, the second power feeding member 62 is fixed to the frame body 22 in a state of being insulated from the frame body 22.
  • the drive electrode 321 of the piezoelectric element 30 is connected to the first external connection terminal 619 via the first member 20 and the first power feeding member 61.
  • the drive electrode 322 of the piezoelectric element 30 is connected to the second external connection terminal 629 via the second power feeding member 62.
  • the drive signal can be supplied to the piezoelectric element 30 from the outside.
  • the position of the first external connection terminal 619 and the second external connection terminal 629 in the thickness direction of the actuator 11 The position will be the same. This facilitates external wiring to the first external connection terminal 619 and the second external connection terminal 629.
  • the same position here includes the range of error due to manufacturing variations.
  • the first feeding member 61 may be any as long as it can maintain the bent shape.
  • the first feeding member 61 may be a metal or the like that has conductivity and can be plastically deformed.
  • the adhesive 81 and the adhesive 82 the first feeding member 61 and the second feeding member 62 are more reliably fixed, and the conduction between the first feeding member 61 and the frame 22 is more reliable. Become.
  • the thickness of the adhesive 81 and the thickness of the adhesive 82 are the same, the position of the first external connection terminal 619 and the position of the second external connection terminal 629 are the same.
  • the thickness of the adhesive 81 and the thickness of the adhesive 82 can usually be made substantially the same by performing manufacturing control such as using the same adhesive 81 and the adhesive 82. Therefore, within the same concept described above, the position of the first external connection terminal 619 and the position of the second external connection terminal 629 can be the same.
  • the first power feeding member 61 including the first external connection terminal 619 and the second power feeding member 62 including the second external connection terminal 629 are at the same position in the thickness direction of the actuator 11.
  • the actuator 11 can be made smaller than the members that supply drive signals to the two drive electrodes of the piezoelectric element, as in the prior art, at different positions in the thickness direction of the actuator 11 with the piezoelectric element interposed therebetween. .. Further, with this configuration, the drive signal can be supplied to the piezoelectric element without complicating the supply path of the drive signal. In other words, the actuator 11 can supply a drive signal to the piezoelectric element with a simple structure, and by using a simple structure, a more reliable supply of the drive signal can be realized.
  • the second feeding member 62 since the second feeding member 62 has the above-mentioned curved portion, the third portion 623 is pressed against the outer main surface 302 of the piezoelectric element 30 with a predetermined urging force. This improves the stability of the physical and electrical connection between the third portion 623 and the piezoelectric element 30.
  • the second portion 622 and the third portion 623 of the second feeding member 62 are pushed up by the piezoelectric element 30 in the non-driving state. Therefore, the second feeding member 62 more reliably applies an urging force to the piezoelectric element 30. This further improves the stability of the physical and electrical connection between the third portion 623 and the piezoelectric element 30.
  • the first feeding member 61 and the second feeding member 62 are assembled to the first member 20 in an integrated state as one feeding member 60. Then, after being assembled, it is divided into a first feeding member 61 and a second feeding member 62. As a result, the actuator 11 can be assembled while maintaining the positional relationship between the first feeding member 61 and the second feeding member 62 with high accuracy. Therefore, a structure in which the first feeding member 61 is connected to the frame body 22 and the second feeding member 62 is connected to the piezoelectric element 30 can be easily realized with high accuracy.
  • the first insulating layer 71 and the second insulating layer 72 may be formed together with the power feeding member 60. That is, in the state of the power feeding member 60, more specifically, in the state of the flat plate before forming the opening 600 or the like, the first is by applying in a strip shape, printing, or attaching an insulating tape having a predetermined width. The first insulating layer 71 and the second insulating layer 72 are formed. As a result, the first insulating layer 71 and the second insulating layer 72 can be more reliably formed in a predetermined region. Further, the thickness of the first insulating layer 71 and the thickness of the second insulating layer 72 can be made the same more reliably.
  • the fluid control device 10 can be configured by using the actuator 11 having the above configuration.
  • the fluid control device 10 includes an actuator 11, a second flat plate 40, and a side wall member 50.
  • the second flat plate 40 is arranged on the main surface 202 side of the first member 20 of the actuator 11.
  • the second flat plate 40 includes a plurality of through holes 400.
  • the side wall member 50 is an annular shape having a hollow 500, and is arranged between the first member 20 of the actuator 11 and the second flat plate 40.
  • the side wall member 50 is connected to the frame body 22 of the first member 20 and the second flat plate 40.
  • the space surrounded by the actuator 11, the side wall member 50, and the second flat plate 40 becomes a pump chamber.
  • the pump chamber communicates with the external space on the second flat plate 40 side of the fluid control device 10 by a plurality of through holes 400. Further, the pump chamber communicates with the external space on the actuator 11 side of the fluid control device 10 by a plurality of voids 230.
  • FIG. 5 is an exploded perspective view of the fluid control device 10A including the actuator 11A according to the second embodiment.
  • FIG. 6A is a plan view of the actuator 11A according to the second embodiment, and
  • FIG. 6D is a side sectional view of the actuator 11A.
  • the fluid control device 10A according to the second embodiment is different from the fluid control device 10 according to the first embodiment in the configuration of the actuator 11A. ..
  • the other configuration of the fluid control device 10A is the same as that of the fluid control device 10, and the description of the same parts will be omitted.
  • the actuator 11A differs from the actuator 11 according to the first embodiment in the configuration of the first member 20A.
  • Other configurations of the actuator 11A are the same as those of the actuator 11, and the description of the same parts will be omitted.
  • the first member 20A includes a plurality of recesses 24 in the frame body 22.
  • the plurality of recesses 24 are recessed from the main surface 201 and extend in the x direction.
  • the plurality of recesses 24 are formed at positions in the frame body 22 where the first portion 621 of the second power feeding member 62 is arranged. More specifically, the recess 24 overlaps the side end 625 of the first portion 621 of the second feeding member 62 with the actuator 11A viewed in a plan view (viewed in the z direction).
  • the actuator 11A has a simple structure for supplying a drive signal to the piezoelectric element 30 while keeping the positions of the two external connection terminals in the z direction (thickness direction) the same as in the actuator 11. So, it can be realized more surely.
  • the recess 24 The distance from the frame 22 increases. As a result, a short circuit between the first portion 621 and the frame body 22 can be suppressed. This is particularly effective when, for example, as described above, a manufacturing method in which the first feeding member 61 and the second feeding member 62 are separated after the formation of the first insulating layer 71 and the second insulating layer 72 is used. Is.
  • the actuator 11B according to the third embodiment has a second feeding member 62B and a first feeding member 62B with respect to the actuator 11 according to the first embodiment.
  • the configurations of the insulating layer 71B and the second insulating layer 72B are different.
  • Other configurations of the actuator 11B are the same as those of the actuator 11, and the description of the same parts will be omitted.
  • the second feeding member 62B is different from the second feeding member 62 according to the first embodiment in that it does not have a curved portion. That is, the second feeding member 62B is a flat plate having only a flat surface.
  • the thickness of the first insulating layer 71B and the second insulating layer 72B is substantially the same as the thickness of the piezoelectric element 30.
  • the actuator 11B supplies the drive signal to the piezoelectric element 30 while keeping the positions of the two external connection terminals in the z direction (thickness direction) the same as in the actuator 11. With a simple structure, it can be realized more reliably.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Reciprocating Pumps (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
PCT/JP2021/000675 2020-03-18 2021-01-12 アクチュエータ、流体制御装置、および、アクチュエータの製造方法 Ceased WO2021186860A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022508083A JP7351407B2 (ja) 2020-03-18 2021-01-12 アクチュエータ、流体制御装置、および、アクチュエータの製造方法
CN202180022072.4A CN115315320B (zh) 2020-03-18 2021-01-12 致动器、流体控制装置和致动器的制造方法
US17/930,440 US12123409B2 (en) 2020-03-18 2022-09-08 Actuator, fluid control device, and actuator manufacturing method

Applications Claiming Priority (2)

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