JP7329960B2 - 載置台およびプラズマ処理装置 - Google Patents
載置台およびプラズマ処理装置 Download PDFInfo
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- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
Description
第1実施形態に係る載置台は、図1に示されているように、第1実施形態に係る基板処理装置100に設けられている。図1は、第1実施形態に係る基板処理装置100の構成の一例を示す概略断面図である。基板処理装置100は、気密に構成され、電気的に接地電位とされた処理容器1を有している。処理容器1は、円筒状であり、例えばアルミニウム等から構成されている。処理容器1は、プラズマが生成される処理空間を画成する。処理容器1内には、被処理体(work-piece)の一例であるウエハWを支持する載置台本体2が設けられている。載置台本体2は、基台2a及び静電チャック(ESC:Electrostatic chuck)6を有する。基台2aは、導電性の金属、例えばアルミニウム等で構成されており、下部電極としての機能を有する。静電チャック6は、セラミックス、例えばアルミナ等で構成されており、ウエハWを静電吸着するための機能を有する。載置台本体2は、支持台4に支持されている。支持台4は、導体で形成されている。支持台4は、例えば石英等からなる支持部材3に支持されている。載置台本体2の上方の外周には、例えばシリコンで形成されたエッジリング5が設けられている。処理容器1内には、載置台本体2及び支持台4の周囲を囲むように、例えば石英等からなる円筒状の内壁部材3aが設けられている。
次に、図2を参照して、載置台本体2の構成の一例について説明する。図2は、第1実施形態に係る基板処理装置100の載置台本体2の一例を示す概略断面図である。載置台本体2には、載置面21が形成されている。載置面21は、静電チャック6の上面から形成され、ドット状に形成されている。複数のピン用貫通孔200のうちの1つのピン用貫通孔22は、載置面21に沿う平面に垂直である回転軸23を囲むように、回転軸23に沿って形成されている。尚、図2において載置面21はドット状に形成されているが、平坦に形成されていてもよい。
制御部90は、ウエハWが載置台本体2に載置されていない場合で、複数のリフターピン61が受渡位置に配置されていないときに、昇降機構62を制御することにより、複数のリフターピン61を受渡位置に配置する。すなわち、制御部90は、複数のリフターピン61が収容位置に配置されているときに、昇降機構62を制御することにより、複数のリフターピン61を所定の回転速度で順回転させる。おねじ68は、複数のリフターピン61が所定の順回転速度で順回転することにより、めねじ26を滑り、複数のリフターピン61を所定の低速度で上昇させる。おねじ68は、複数のリフターピン61が収容位置から所定の高さ以上に上昇することにより、めねじ26から外れる。制御部90は、おねじ68がめねじ26から外れた後に、複数のリフターピン61を回転させることなく、高速度で複数のリフターピン61を上昇させ、複数のリフターピン61を受渡位置に配置する。
pd1=50×3=150
比較例の基板処理装置における最小放電電圧Vは、パッシェンカーブ41において値pd1に対応する値V1に等しく、約2000Vを示している。
pd2=50×9=450
第1実施形態に係る基板処理装置100における最小放電電圧Vは、パッシェンカーブ41において値pd2に対応する値V2に等しく、約5000Vを示している。パッシェンカーブ41は、さらに、値V2が値V1より大きいことを示している。
ところで、第1実施形態に係る載置台のリフターピン63は、基端部分65と先端部分67とにおねじ68が形成されていないが、基端部分65と先端部分67とにおねじが形成されていてもよい。第2実施形態に係る載置台は、図6に示されているように、既述の第1実施形態に係る載置台のリフターピン63が他のリフターピン401に置換され、他の部分は、既述の第1実施形態に係る載置台と同じである。図6は、第2実施形態に係る載置台の一例を示す概略断面図である。
1 :処理容器
2 :載置台本体
2a :基台
6 :静電チャック
10a :第1のRF電源
10b :第2のRF電源
12 :直流電源
21 :載置面
22 :ピン用貫通孔
26 :めねじ
27 :内壁
62 :昇降機構
63 :リフターピン
68 :おねじ
69 :上端
401 :リフターピン
402 :上端
403 :おねじ
Claims (12)
- プラズマ処理容器内で使用する載置台であって、
ピン用貫通孔を有する本体であって、前記ピン用貫通孔は、めねじ付き内壁を有する前記本体と、
基端部分、中間部分、および先端部分を有し、前記ピン用貫通孔に挿入されるリフターピンであって、前記中間部分はおねじであり、前記おねじの中間部分は、めねじ付き内壁に螺合可能である前記リフターピンと、
前記リフターピンを前記本体に対して昇降させる昇降機構と
を備え、
前記リフターピンは上下に移動可能であり、
前記リフターピンが上に位置するとき、前記リフターピンのおねじ付き中間部分は前記めねじ付き内壁から外れる載置台。 - 前記昇降機構は、
前記おねじ付き中間部分が前記めねじ付き内壁に嵌合しているときに、前記リフターピンを回転させることにより前記リフターピンを第1の速さで昇降させるか、あるいは、
前記おねじ付き中間部分が前記めねじ付き内壁から外れているときに、前記第1の速さと異なる第2の速さで前記リフターピンを昇降させる請求項1に記載の載置台。 - 前記先端部分の上面は、基板の材料よりも耐摩耗性が高い材料を含む請求項2に記載の載置台。
- 静電チャックをさらに備える請求項3に記載の載置台。
- 前記先端部分の上面は、基板の材料よりも耐摩耗性が高い材料を含む請求項1に記載の載置台。
- 静電チャックをさらに備える請求項1に記載の載置台。
- プラズマ処理空間を有する容器と、
前記プラズマ処理空間内の少なくとも1つのガスからプラズマを生成するプラズマ生成部と、
前記プラズマ処理空間に設けられた載置台と
を備え、
前記載置台は、
ピン用貫通孔を有する本体であって、前記ピン用貫通孔はめねじ付き内壁を有する前記本体と、
基端部分、中間部分、および先端部分を有し、前記ピン用貫通孔に挿入されるリフターピンであって、前記中間部分はおねじであり、前記おねじの中間部分はめねじ付き内壁に螺合可能である前記リフターピンと、
前記リフターピンを前記本体に対して昇降させる昇降機構と
を含み、
前記リフターピンは上下に移動可能であり、
前記リフターピンが上に位置するとき、前記リフターピンのおねじ付き中間部分は前記めねじ付き内壁から外れるプラズマ処理装置。 - 前記昇降機構は、
前記おねじ付き中間部分が前記めねじ付き内壁に嵌合しているときに、前記リフターピンを回転させることにより前記リフターピンを第1の速さで昇降させ、
前記おねじ付き中間部分が前記めねじ付き内壁から外れているときに、前記第1の速さと異なる第2の速さで前記リフターピンを昇降させる請求項7に記載のプラズマ処理装置。 - 前記先端部分の上面は、基板の材料よりも耐摩耗性が高い材料を含む請求項8に記載のプラズマ処理装置。
- 静電チャックをさらに備える請求項9に記載のプラズマ処理装置。
- 前記先端部分の上面は、基板の材料よりも耐摩耗性が高い材料を含む請求項7に記載のプラズマ処理装置。
- 静電チャックをさらに備える請求項7に記載のプラズマ処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019091640A JP7329960B2 (ja) | 2019-05-14 | 2019-05-14 | 載置台およびプラズマ処理装置 |
KR1020200054086A KR20200131745A (ko) | 2019-05-14 | 2020-05-06 | 기판 지지체 및 플라즈마 처리 장치 |
CN202010376530.1A CN111952140A (zh) | 2019-05-14 | 2020-05-07 | 基片载置台和等离子体处理装置 |
US16/871,464 US11443925B2 (en) | 2019-05-14 | 2020-05-11 | Substrate support and plasma processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019091640A JP7329960B2 (ja) | 2019-05-14 | 2019-05-14 | 載置台およびプラズマ処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2020188129A JP2020188129A (ja) | 2020-11-19 |
JP2020188129A5 JP2020188129A5 (ja) | 2022-03-07 |
JP7329960B2 true JP7329960B2 (ja) | 2023-08-21 |
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US20200365380A1 (en) | 2020-11-19 |
US11443925B2 (en) | 2022-09-13 |
KR20200131745A (ko) | 2020-11-24 |
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