JP7307931B2 - 導電性薄膜、積層体、アクチュエータ素子及びその製造方法 - Google Patents

導電性薄膜、積層体、アクチュエータ素子及びその製造方法 Download PDF

Info

Publication number
JP7307931B2
JP7307931B2 JP2018121455A JP2018121455A JP7307931B2 JP 7307931 B2 JP7307931 B2 JP 7307931B2 JP 2018121455 A JP2018121455 A JP 2018121455A JP 2018121455 A JP2018121455 A JP 2018121455A JP 7307931 B2 JP7307931 B2 JP 7307931B2
Authority
JP
Japan
Prior art keywords
thin film
conductive
conductive thin
weight
ionic liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018121455A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020004554A5 (enExample
JP2020004554A (ja
Inventor
直弘 寺澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority to JP2018121455A priority Critical patent/JP7307931B2/ja
Publication of JP2020004554A publication Critical patent/JP2020004554A/ja
Publication of JP2020004554A5 publication Critical patent/JP2020004554A5/ja
Application granted granted Critical
Publication of JP7307931B2 publication Critical patent/JP7307931B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Micromachines (AREA)
  • Laminated Bodies (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Conductive Materials (AREA)
JP2018121455A 2018-06-27 2018-06-27 導電性薄膜、積層体、アクチュエータ素子及びその製造方法 Active JP7307931B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018121455A JP7307931B2 (ja) 2018-06-27 2018-06-27 導電性薄膜、積層体、アクチュエータ素子及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018121455A JP7307931B2 (ja) 2018-06-27 2018-06-27 導電性薄膜、積層体、アクチュエータ素子及びその製造方法

Publications (3)

Publication Number Publication Date
JP2020004554A JP2020004554A (ja) 2020-01-09
JP2020004554A5 JP2020004554A5 (enExample) 2021-04-15
JP7307931B2 true JP7307931B2 (ja) 2023-07-13

Family

ID=69100393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018121455A Active JP7307931B2 (ja) 2018-06-27 2018-06-27 導電性薄膜、積層体、アクチュエータ素子及びその製造方法

Country Status (1)

Country Link
JP (1) JP7307931B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119200108A (zh) * 2024-09-19 2024-12-27 桂林电子科技大学 一种光电互联工艺的柔性eap电极驱动器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013211108A (ja) 2012-03-30 2013-10-10 Toppan Printing Co Ltd 導電性複合体
JP2013216766A (ja) 2012-04-06 2013-10-24 Nagoya Univ 導電性組成物
JP2017130276A (ja) 2016-01-18 2017-07-27 国立研究開発法人産業技術総合研究所 導電性薄膜、積層体、アクチュエータ素子及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5660595B2 (ja) * 2008-02-11 2015-01-28 国立大学法人 東京大学 導電紙とその製造方法、導電性セルロース組成物とその製造方法、物品、電子デバイス

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013211108A (ja) 2012-03-30 2013-10-10 Toppan Printing Co Ltd 導電性複合体
JP2013216766A (ja) 2012-04-06 2013-10-24 Nagoya Univ 導電性組成物
JP2017130276A (ja) 2016-01-18 2017-07-27 国立研究開発法人産業技術総合研究所 導電性薄膜、積層体、アクチュエータ素子及びその製造方法

Also Published As

Publication number Publication date
JP2020004554A (ja) 2020-01-09

Similar Documents

Publication Publication Date Title
JP4038685B2 (ja) アクチュエータ素子
US8004146B2 (en) Electrically conductive thin film formed from an ionic liquid and carbon nanotubes having a high aspect ratio, and actuator element comprising the thin film
JP4287504B1 (ja) 導電性高分子アクチュエータおよびその製造方法
US7696669B2 (en) Electrically conductive polymer actuator, method for manufacturing the same, and method of driving the same
US7638930B1 (en) Electrically conductive polymer actuator and method for manufacturing the same
JP5083911B2 (ja) カーボンナノチューブと重合性イオン液体およびイオン液体から構成されるアクチュエータ素子
US10199561B2 (en) Carbon nanofiber actuator
JP6964855B2 (ja) 導電性薄膜、積層体、アクチュエータ素子及びその製造方法
JP2019048982A (ja) 炭素電極を用いたアクチュエータ素子
JP4568885B2 (ja) 高強度、高導電性薄膜によるアクチュエータ素子及びその製造方法
JP2010161870A (ja) 導電性高分子アクチュエータおよびその製造方法
JP5477643B2 (ja) カーボンナノチューブ、アルカリ金属塩および/またはアルカリ土類金属塩、イオン液体及びポリマーから構成される電極膜、固体電解質膜、アクチュエータ素子
JP4691703B2 (ja) アクチュエータ素子およびその製造方法
JP7307931B2 (ja) 導電性薄膜、積層体、アクチュエータ素子及びその製造方法
JP5888666B2 (ja) 多層カーボンナノチューブとポリマーおよびイオン液体から構成される導電性薄膜、アクチュエータ素子
JP6359248B2 (ja) 導電性薄膜、積層体、アクチュエータ素子及びその製造法
JP2012135071A (ja) アクチュエータ用複合導電性薄膜、アクチュエータ素子
JP2014024954A (ja) 粘土材を添加した炭素電極を用いたアクチュエータ素子
JP6562319B2 (ja) ナノカーボン高分子アクチュエータ
JP2012135074A (ja) カーボンナノチューブとポリフッ化ビニリデンポリマーおよびイオン液体から構成される導電性薄膜、アクチュエータ素子
WO2011024219A1 (ja) 導電性高分子アクチュエータ、並びにその駆動方法および製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210225

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210310

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220228

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220301

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220419

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220823

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221011

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20230207

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230407

C60 Trial request (containing other claim documents, opposition documents)

Free format text: JAPANESE INTERMEDIATE CODE: C60

Effective date: 20230407

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20230417

C21 Notice of transfer of a case for reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C21

Effective date: 20230418

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230620

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230626

R150 Certificate of patent or registration of utility model

Ref document number: 7307931

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150