JP7266169B2 - 制御装置及び異常検知方法 - Google Patents

制御装置及び異常検知方法 Download PDF

Info

Publication number
JP7266169B2
JP7266169B2 JP2022511482A JP2022511482A JP7266169B2 JP 7266169 B2 JP7266169 B2 JP 7266169B2 JP 2022511482 A JP2022511482 A JP 2022511482A JP 2022511482 A JP2022511482 A JP 2022511482A JP 7266169 B2 JP7266169 B2 JP 7266169B2
Authority
JP
Japan
Prior art keywords
value
measured value
control device
output
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022511482A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021199429A1 (https=
Inventor
凌太 池田
健 木原
貴光 成田
佑磨 細田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RKC Instrument Inc
Original Assignee
RKC Instrument Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RKC Instrument Inc filed Critical RKC Instrument Inc
Publication of JPWO2021199429A1 publication Critical patent/JPWO2021199429A1/ja
Application granted granted Critical
Publication of JP7266169B2 publication Critical patent/JP7266169B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating

Landscapes

  • Testing And Monitoring For Control Systems (AREA)
  • Control Of Resistance Heating (AREA)
JP2022511482A 2020-04-03 2020-04-03 制御装置及び異常検知方法 Active JP7266169B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/015334 WO2021199429A1 (ja) 2020-04-03 2020-04-03 制御装置及び異常検知方法

Publications (2)

Publication Number Publication Date
JPWO2021199429A1 JPWO2021199429A1 (https=) 2021-10-07
JP7266169B2 true JP7266169B2 (ja) 2023-04-28

Family

ID=77928662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022511482A Active JP7266169B2 (ja) 2020-04-03 2020-04-03 制御装置及び異常検知方法

Country Status (3)

Country Link
JP (1) JP7266169B2 (https=)
CN (1) CN115004856B (https=)
WO (1) WO2021199429A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002343537A (ja) 2001-03-15 2002-11-29 Omron Corp ヒータ断線検出方法、温度調節器および熱処理装置
JP2011090610A (ja) 2009-10-26 2011-05-06 Yamatake Corp 温度制御装置および異常判定方法
JP2018174046A (ja) 2017-03-31 2018-11-08 アズビル株式会社 劣化診断装置および方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5576371A (en) * 1978-12-01 1980-06-09 Minolta Camera Co Ltd Failure detecting method in heat fixing device of electrophotographic copier
JP2005228732A (ja) * 2004-01-15 2005-08-25 Omron Corp 故障検出装置
KR102066556B1 (ko) * 2012-08-31 2020-01-15 가부시키가이샤 미스즈 코우쿄우 히터와 그것을 구비하는 정착 장치, 화상 형성 장치 및 가열 장치
JP2018174047A (ja) * 2017-03-31 2018-11-08 アズビル株式会社 劣化診断装置および方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002343537A (ja) 2001-03-15 2002-11-29 Omron Corp ヒータ断線検出方法、温度調節器および熱処理装置
JP2011090610A (ja) 2009-10-26 2011-05-06 Yamatake Corp 温度制御装置および異常判定方法
JP2018174046A (ja) 2017-03-31 2018-11-08 アズビル株式会社 劣化診断装置および方法

Also Published As

Publication number Publication date
CN115004856A (zh) 2022-09-02
CN115004856B (zh) 2024-11-26
WO2021199429A1 (ja) 2021-10-07
JPWO2021199429A1 (https=) 2021-10-07

Similar Documents

Publication Publication Date Title
JP5373550B2 (ja) 温度制御装置および異常判定方法
JP5579409B2 (ja) 温度制御装置及び温度制御方法
US20140121853A1 (en) Feedback control method, feedback control apparatus, and feedback control program
JP7287166B2 (ja) バルブ制御装置および真空バルブ
JP2022065638A (ja) 予知保全方法、予知保全装置
JP7266169B2 (ja) 制御装置及び異常検知方法
JP7290484B2 (ja) 異常検知装置、異常検知システム、及び異常検知方法
JP6859725B2 (ja) Pid制御装置、pid制御方法、およびpid制御プログラム
CN108398962B (zh) 维护时期预测装置、流量控制装置及维护时期预测方法
JP6874379B2 (ja) 制御装置、制御方法、制御プログラム
JP6216612B2 (ja) 不具合検知システムおよび不具合検知方法
JP7263913B2 (ja) 異常検知装置及び異常検知方法
CN115047927A (zh) 半导体工艺中的温度监测方法和装置
JP5399009B2 (ja) 蛍光温度センサおよび蛍光温度センサの移動平均値算出方法
WO2020044680A1 (ja) 温度制御システム、温度制御方法、およびプログラム
JP2004172253A (ja) 熱処理装置およびそれに用いられる温度制御方法
JP6221649B2 (ja) 温調可能な分析装置
CN103959430B (zh) 校准包括气体放电灯和冷却装置的系统的方法
JP7119885B2 (ja) 異常検知装置、異常検知方法、およびプログラム
JP6417175B2 (ja) 評価装置および評価方法
JP2016095611A (ja) 不具合予知装置および不具合予知方法
JP2014225583A (ja) 半導体レーザの温度制御方法、半導体レーザの温度制御装置、および半導体レーザの温度制御プログラム
JPWO2019082295A1 (ja) 温度制御装置
KR101075127B1 (ko) 반도체소자 제조를 위한 프로세스챔버의 운영방법
JP7421040B2 (ja) 制御装置及び復帰処理方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220519

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230314

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230320

R150 Certificate of patent or registration of utility model

Ref document number: 7266169

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250