JP7212210B2 - 配線基板の製造方法 - Google Patents
配線基板の製造方法 Download PDFInfo
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- JP7212210B2 JP7212210B2 JP2022561204A JP2022561204A JP7212210B2 JP 7212210 B2 JP7212210 B2 JP 7212210B2 JP 2022561204 A JP2022561204 A JP 2022561204A JP 2022561204 A JP2022561204 A JP 2022561204A JP 7212210 B2 JP7212210 B2 JP 7212210B2
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
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- H—ELECTRICITY
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0264—Peeling insulating layer, e.g. foil, or separating mask
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1305—Moulding and encapsulation
- H05K2203/1316—Moulded encapsulation of mounted components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
- H05K3/046—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer
- H05K3/048—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer using a lift-off resist pattern or a release layer pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4682—Manufacture of core-less build-up multilayer circuits on a temporary carrier or on a metal foil
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Laminated Bodies (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Description
キャリア上に剥離層、金属層及びデバイス層を順に備えた積層シートを用意する工程と、
平面視した場合に前記デバイス層の輪郭よりも内側を通ってその両端が前記積層シートの端部に達するように、かつ、断面視した場合に前記キャリア、前記剥離層及び前記金属層を貫通するように、前記積層シートの前記キャリア側の表面から切込み線を入れる工程と、
前記キャリア、前記剥離層及び前記金属層における、前記切込み線から外側の外縁部分を除去し、それにより前記デバイス層の前記金属層側の表面の一部を露出させて前記キャリアの剥離を促進するための加圧可能露出部とする工程と、
を含む、方法が提供される。
平面視した場合に前記デバイス層の輪郭よりも内側を通る少なくとも1本の線に沿って、前記キャリア、前記剥離層及び前記金属層の外縁部分が少なくとも1箇所欠けており、それにより前記デバイス層の前記金属層側の表面の一部が露出されている、配線基板材料が提供される。
本発明は配線基板の製造方法に関する。本発明の方法は、(1)積層シートの用意、(2)切込み線の形成、(3)加圧可能露出部の形成、(4)所望により行われるキャリアの剥離、及び(5)所望により行われる金属層の除去の各工程を含む。
本発明の配線基板の製造方法の一例が図1A及び1Bに示される。まず、図1A(i)に示されるように、キャリア12上に剥離層15、金属層16及びデバイス層20を順に備えた積層シート10を用意する。剥離層15は、キャリア12上に設けられ、キャリア12と金属層16との剥離に寄与する層である。金属層16は、剥離層15上に設けられる金属で構成される層である。デバイス層20は、金属層16上に設けられる、デバイス機能を有する層である。
用意した積層シート10のキャリア12側の表面から切込み線Cを入れる。この切込み線Cは、図1A(ii)に示されるように、断面視した場合にキャリア12、中間層14(存在する場合)、剥離層15及び金属層16を貫通するように積層シート10に入れられる。このとき、切込み線Cは、図1B(ii)に示されるように、平面視した場合にデバイス層20の輪郭よりも内側を通ってその両端(すなわち切込み線Cの両端)が積層シート10の端部に達するように入れられる。このような切込み線Cを積層シート10に入れることで、キャリア付金属箔18における、切込み線Cから外側の外縁部分が、切込み線Cから内側の部分とは切り離された状態となる。その結果、後述する加圧可能露出部Pの形成工程において、キャリア付金属箔18の切込み線Cから外側の外縁部分を除去することが可能となる。切込み線Cの形成方法は、公知の手法を採用すればよく、特に限定されない。例えば、カッター等の切削工具、又は切削ブレード等の工作機械を用いて積層シート10に切込み線Cを入れることができる。
切込み線Cを形成した積層シート10から、キャリア12、中間層14(存在する場合)、剥離層15及び金属層16における、切込み線Cから外側の外縁部分を除去する。これにより、図1A(iii)及び図1B(iii)に示されるように、デバイス層20の金属層16側の表面の一部を露出させて加圧可能露出部Pとすることができる。加圧可能露出部Pは、キャリア12の剥離を促進するために、デバイス層20に対して直接的に力を加えることが可能な部位である。本明細書において「加圧」とは、物(対象)に力を加えることを意味し、物(対象)を「押すこと」及び「引くこと」の双方の意味を含む。以下の説明において、デバイス層20に加圧可能露出部Pが設けられた積層シート10を「配線基板22」又は「配線基板材料」と称することがある。
所望により、キャリア付金属箔18の外縁部分を除去した後、キャリア12及び中間層14(存在する場合)を配線基板22から剥離層15の位置で剥離する。このとき、配線基板22が加圧可能露出部Pを有することで、容易にキャリア12を剥離することが可能となる。ここで、図4には、キャリア12を剥離する工程の一例が示される。図4(i)及び(ii)に示されるように、キャリア12等の剥離は、キャリア12を固定した状態で、デバイス層20の加圧可能露出部Pをキャリア12からデバイス層20を引き離す方向(図4(i)の矢印で示される方向)に力を加えることにより行われるのが好ましい。加圧可能露出部Pへの加圧手法は特に限定されず、手や治工具、機械等を用いることができる。例えば、押圧部材を用いて加圧可能露出部Pを押圧する、又はフック部材を加圧可能露出部Pに引っ掛け、キャリア12からデバイス層20を引き離す方向に引っ張ることにより、キャリア12を剥離することができる。
所望により、キャリア12の剥離後に露出した金属層16をエッチングにより除去する。こうすることで埋め込み配線が露出するため、その上にフォトリソグラフィプロセスによる更なる回路を形成するのにより適したものとなる。金属層16のエッチングは公知の手法に基づき行えばよく、特に限定されない。
本発明の好ましい態様によれば、キャリア付金属箔18と、キャリア付金属箔18上に設けたデバイス層20とを備えた、配線基板22(配線基板材料)が提供される。この配線基板22は、平面視した場合にデバイス層20の輪郭よりも内側を通る少なくとも1本の線に沿って、キャリア付金属箔18の外縁部分が少なくとも1箇所欠けている(図1B(iii)参照)。これにより、配線基板22は、デバイス層20のキャリア付金属箔18側の表面の一部が露出して、キャリア12(及び存在する場合には中間層14)の剥離を促進するための加圧可能露出部Pを成している(図1A(iii)参照)。このような配線基板22によれば、キャリア12(及び存在する場合には中間層14)の剥離時のデバイス層20へのダメージを抑制でき、かつ、剥離後のデバイス層20に対してフォトリソグラフィプロセスを精度良く実施することができる。
図1Aを参照しつつ上述したとおり、本発明の方法において所望により用いられるキャリア付金属箔18は、キャリア12、所望により中間層14、剥離層15、及び金属層16を順に備える。
Claims (18)
- 配線基板の製造方法であって、
キャリア上に剥離層、金属層及びデバイス層を順に備えた積層シートを用意する工程と、
平面視した場合に前記デバイス層の輪郭よりも内側を通ってその両端が前記積層シートの端部に達するように、かつ、断面視した場合に前記キャリア、前記剥離層及び前記金属層を貫通するように、前記積層シートの前記キャリア側の表面から切込み線を入れる工程と、
前記キャリア、前記剥離層及び前記金属層における、前記切込み線から外側の外縁部分を除去し、それにより前記デバイス層の前記金属層側の表面の一部を露出させて前記キャリアの剥離を促進するための加圧可能露出部とする工程と、
を含む、方法。 - 前記積層シートが、平面視した場合に前記金属層が前記デバイス層の端部からはみ出した延出部分を有しており、
前記方法が、前記切込み線を入れる前に、前記延出部分において前記金属層を前記デバイス層の輪郭に沿って予め切断しておく工程をさらに含む、請求項1に記載の方法。 - 前記外縁部分の除去後、前記キャリアを前記積層シートから前記剥離層の位置で剥離する工程をさらに含む、請求項1又は2に記載の方法。
- 前記キャリアの剥離が、前記キャリアを固定した状態で、前記デバイス層の前記加圧可能露出部を前記キャリアから前記デバイス層を引き離す方向に力を加えることを含む、請求項3に記載の方法。
- 前記切込み線が、平面視した場合に前記デバイス層の輪郭から0.5mm以上30.0mm以下内側の領域を通るように設けられる、請求項1~4のいずれか一項に記載の方法。
- 前記加圧可能露出部が、多角形状又は円弧形状を有するように、前記切込み線が設けられる、請求項1~5のいずれか一項に記載の方法。
- 前記切込み線が少なくとも2箇所設けられることにより、前記加圧可能露出部が少なくとも2箇所形成され、
前記キャリアの剥離が、前記少なくとも2箇所の加圧可能露出部を前記キャリアから前記デバイス層を引き離す方向に力を加えることにより行われる、請求項3~6のいずれか一項に記載の方法。 - 前記キャリアの剥離が、前記デバイス層を前記キャリアにより規定される面に対して、垂直方向に引き離す方向に力を加えることにより行われる、請求項7に記載の方法。
- 前記デバイス層が、配線層、前記配線層上に設けられた電子素子、並びに前記配線層及び前記電子素子を包囲するモールド層を含み、
前記切込み線が、平面視した場合に、前記配線層及び前記電子素子を横切ることなく、前記モールド層を横切るように設けられる、請求項1~8のいずれか一項に記載の方法。 - 前記デバイス層の弾性率が前記キャリアの弾性率よりも低い、請求項1~9のいずれか一項に記載の方法。
- 前記デバイス層が樹脂を含む、請求項10に記載の方法。
- 前記デバイス層の弾性率が前記キャリアの弾性率よりも高い、請求項1~9のいずれか一項に記載の方法。
- 前記デバイス層がセラミックスを含む、請求項12に記載の方法。
- 前記キャリアが、ガラスキャリアである、請求項1~13のいずれか一項に記載の方法。
- 前記キャリアが、直径100mm以上の円板状、又は短辺が100mm以上の矩形状である、請求項1~14のいずれか一項に記載の方法。
- 前記積層シートの用意が、
キャリア上に剥離層及び金属層を備えたキャリア付金属箔を用意する工程と、
前記金属層の表面に第1配線層を形成する工程と、
前記第1配線層を基礎として前記デバイス層を構築する工程と、
を含む、請求項1~15のいずれか一項に記載の方法。 - 前記キャリアの剥離後に露出した前記金属層をエッチングにより除去する工程をさらに含む、請求項3~16のいずれか一項に記載の方法。
- キャリア上に剥離層、金属層及びデバイス層を順に備えた、配線基板材料であって、
平面視した場合に前記デバイス層の輪郭よりも内側を通る少なくとも1本の線に沿って、前記キャリア、前記剥離層及び前記金属層の外縁部分が少なくとも1箇所欠けており、それにより前記デバイス層の前記金属層側の表面の一部が露出されている、配線基板材料。
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011228613A (ja) | 2010-03-30 | 2011-11-10 | Nippon Denkai Ltd | 支持体金属箔付き複合金属層、これを用いた配線板とその製造方法、この配線板を用いた半導体パッケージの製造方法 |
JP2011238895A (ja) | 2010-04-13 | 2011-11-24 | Denso Corp | 半導体装置およびその製造方法 |
JP2014072440A (ja) | 2012-09-28 | 2014-04-21 | Nitto Denko Corp | 半導体装置の製造方法、及び、接着シート |
WO2018066114A1 (ja) | 2016-10-06 | 2018-04-12 | 三井金属鉱業株式会社 | 多層配線板の製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2083072C (en) * | 1991-11-21 | 1998-02-03 | Shinichi Hasegawa | Method for manufacturing polyimide multilayer wiring substrate |
JP4273895B2 (ja) | 2003-09-24 | 2009-06-03 | 日立化成工業株式会社 | 半導体素子搭載用パッケージ基板の製造方法 |
KR101460034B1 (ko) * | 2013-03-27 | 2014-11-11 | 주식회사 심텍 | 캐리어 기판을 이용하는 박형 인쇄회로기판의 제조 방법 |
JP2015035551A (ja) | 2013-08-09 | 2015-02-19 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2016134497A (ja) * | 2015-01-19 | 2016-07-25 | 凸版印刷株式会社 | 配線基板積層体及びこれを用いた半導体装置の製造方法 |
WO2017149810A1 (ja) | 2016-02-29 | 2017-09-08 | 三井金属鉱業株式会社 | キャリア付銅箔及びその製造方法、並びに配線層付コアレス支持体及びプリント配線板の製造方法 |
WO2017149811A1 (ja) | 2016-02-29 | 2017-09-08 | 三井金属鉱業株式会社 | キャリア付銅箔、並びに配線層付コアレス支持体及びプリント配線板の製造方法 |
CN109997418B (zh) * | 2016-11-28 | 2023-05-05 | 三井金属矿业株式会社 | 多层布线板的制造方法 |
JP7187112B2 (ja) | 2018-08-13 | 2022-12-12 | 株式会社ディスコ | キャリア板の除去方法 |
JP7146354B2 (ja) | 2019-01-22 | 2022-10-04 | 株式会社ディスコ | キャリア板の除去方法 |
JP2020131552A (ja) * | 2019-02-20 | 2020-08-31 | 株式会社東芝 | キャリアおよび半導体装置の製造方法 |
-
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011228613A (ja) | 2010-03-30 | 2011-11-10 | Nippon Denkai Ltd | 支持体金属箔付き複合金属層、これを用いた配線板とその製造方法、この配線板を用いた半導体パッケージの製造方法 |
JP2011238895A (ja) | 2010-04-13 | 2011-11-24 | Denso Corp | 半導体装置およびその製造方法 |
JP2014072440A (ja) | 2012-09-28 | 2014-04-21 | Nitto Denko Corp | 半導体装置の製造方法、及び、接着シート |
WO2018066114A1 (ja) | 2016-10-06 | 2018-04-12 | 三井金属鉱業株式会社 | 多層配線板の製造方法 |
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