JP7123688B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP7123688B2 JP7123688B2 JP2018147942A JP2018147942A JP7123688B2 JP 7123688 B2 JP7123688 B2 JP 7123688B2 JP 2018147942 A JP2018147942 A JP 2018147942A JP 2018147942 A JP2018147942 A JP 2018147942A JP 7123688 B2 JP7123688 B2 JP 7123688B2
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| JP2018147942A JP7123688B2 (ja) | 2018-08-06 | 2018-08-06 | 半導体装置及びその製造方法 |
| US16/510,087 US11239196B2 (en) | 2018-08-06 | 2019-07-12 | Semiconductor device |
| US17/645,815 US12009333B2 (en) | 2018-08-06 | 2021-12-23 | Semiconductor device |
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| JP7351134B2 (ja) * | 2019-08-08 | 2023-09-27 | 富士電機株式会社 | 半導体装置及び半導体装置の製造方法 |
| US20230352371A1 (en) * | 2020-05-08 | 2023-11-02 | Rohm Co., Ltd. | Semiconductor device |
| JP7732339B2 (ja) * | 2021-11-11 | 2025-09-02 | 富士電機株式会社 | 半導体装置及び半導体装置の製造方法 |
| JP2023117060A (ja) * | 2022-02-10 | 2023-08-23 | 富士電機株式会社 | 半導体装置の製造方法および半導体装置 |
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| JP2014135411A (ja) | 2013-01-11 | 2014-07-24 | Mitsubishi Electric Corp | 半導体装置および半導体装置の製造方法 |
| JP2015177182A (ja) | 2014-03-18 | 2015-10-05 | 三菱電機株式会社 | パワーモジュール |
| JP2016081943A (ja) | 2014-10-09 | 2016-05-16 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
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| JP2014029897A (ja) | 2012-07-31 | 2014-02-13 | Hitachi Ltd | 導電性接合体およびそれを用いた半導体装置 |
| US8835299B2 (en) * | 2012-08-29 | 2014-09-16 | Infineon Technologies Ag | Pre-sintered semiconductor die structure |
| JP2015115481A (ja) * | 2013-12-12 | 2015-06-22 | 株式会社東芝 | 半導体部品および半導体部品の製造方法 |
| US20170294397A1 (en) * | 2016-04-08 | 2017-10-12 | Hamilton Sundstrand Corporation | Die and substrate assembly with graded density bonding layer |
| MY181313A (en) * | 2016-08-22 | 2020-12-21 | Senju Metal Industry Co | Metallic sintered bonding body and die bonding method |
| DE102016118784A1 (de) * | 2016-10-04 | 2018-04-05 | Infineon Technologies Ag | Chipträger, konfiguriert zur delaminierungsfreien Kapselung und stabilen Sinterung |
| JP6366766B2 (ja) | 2017-03-24 | 2018-08-01 | 三菱電機株式会社 | 半導体装置 |
| JP2019012755A (ja) * | 2017-06-29 | 2019-01-24 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
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| JP2014135411A (ja) | 2013-01-11 | 2014-07-24 | Mitsubishi Electric Corp | 半導体装置および半導体装置の製造方法 |
| JP2015177182A (ja) | 2014-03-18 | 2015-10-05 | 三菱電機株式会社 | パワーモジュール |
| JP2016081943A (ja) | 2014-10-09 | 2016-05-16 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
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