JP7117790B2 - 成膜装置、および、成膜製品の製造方法 - Google Patents
成膜装置、および、成膜製品の製造方法 Download PDFInfo
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- JP7117790B2 JP7117790B2 JP2020194075A JP2020194075A JP7117790B2 JP 7117790 B2 JP7117790 B2 JP 7117790B2 JP 2020194075 A JP2020194075 A JP 2020194075A JP 2020194075 A JP2020194075 A JP 2020194075A JP 7117790 B2 JP7117790 B2 JP 7117790B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/02—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery
- B05B12/04—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery for sequential operation or multiple outlets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
- B05B13/0228—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the movement of the objects being rotative
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0278—Arrangement or mounting of spray heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
- B05B13/0405—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads
- B05B13/041—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line
- B05B13/0415—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line the angular position of the spray heads relative to the straight line being modified during the reciprocating movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
- B05B13/0421—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with rotating spray heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
- B05B13/0431—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with spray heads moved by robots or articulated arms, e.g. for applying liquid or other fluent material to 3D-surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
- B05B15/68—Arrangements for adjusting the position of spray heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/0012—Apparatus for achieving spraying before discharge from the apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/14—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas designed for spraying particulate materials
- B05B7/1481—Spray pistols or apparatus for discharging particulate material
- B05B7/1486—Spray pistols or apparatus for discharging particulate material for spraying particulate material in dry state
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Robotics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Description
従って、吐出ノズルの吐出口面と表面処理対象物における表面処理される表面との相互間距離を表面処理対象物の形状に応じて調整する相互間距離調整手段が、上述のハウジング34内の球面軸受部30A、30B、30Cと、ワーク取付治具56Aおよび56Bを含むZ軸ステージ48Aおよび48Bとから形成されることとなる。
固定テーブル46Cのワーク支持面には、図示が省略される治具を介して例えば、5個のワーク58W2が、X座標軸に沿って所定の間隔をもって一列に固定されている。
12 筐体
12A 処理室
32A、32B、32C、32D、32E 吐出ノズル
30A、30B、30C 球面軸受部
42 ロアステージ
44A、44B、44C アッパステージ
46A、46B、46C 固定テーブル
48A、48B Z軸ステージ
58W1、58W2、58W3、58W4、58W5 ワーク
56A、56B ワーク取付治具
76 シャフトガイド付電動シリンダ
84 揺動アーム
Claims (3)
- 成膜チャンバの処理室内に所定の間隔をもって配列され、エアロゾル化された微粒子を吐出口から表面処理対象物に向けて吐出する複数個の吐出ノズルと、
前記各吐出ノズルの吐出口と、前記表面処理対象物において表面処理される表面との相互間距離を、前記表面処理対象物の形状に応じて調整する相互間距離調整手段と、
を備え、
前記相互間距離調整手段は、前記複数個の吐出ノズルの配列方向に沿って移動可能なノズルヘッド機構 であり、
前記ノズルヘッド機構は、前記複数個の吐出ノズルの配列方向に対し略直交する方向に所定の間隔をもって複数列配置されるリニアモータ単軸ロボットにそれぞれ、複数個配置される ことを特徴とする成膜装置。 - 前記リニアモータ単軸ロボットは、前記複数個の吐出ノズルの配列方向であるX方向に延びており、
前記ノズルヘッド機構は、
シャフトガイド付電動シリンダと、
モータブラケットと、
ステッピングモータと、
減速機付ステッピングモータと、
を備え、
前記シャフトガイド付電動シリンダは、X方向に移動可能に、前記リニアモータ単軸ロボットに対して支持され、
前記シャフトガイド付電動シリンダのロッドは、前記ステッピングモータの出力軸に連結されるとともに、前記ステッピングモータの作動によって上下方向に昇降可能になっており、
前記モータブラケットは、前記ロッドの下端に対して連結されており、
前記減速機付ステッピングモータの出力軸がX方向及び上下方向それぞれに直交する方向を向いた状態で、前記減速機付ステッピングモータが前記モータブラケットに支持されており、
前記ノズルヘッド機構は、前記減速機付ステッピングモータの作動によって前記吐出ノズルの吐出口の向きを前記減速機付ステッピングモータの出力軸周りに回動可能に構成されている請求項1に記載の成膜装置。 - 複数個の吐出ノズルが、成膜チャンバの処理室内に所定の間隔をもって配列され、エアロゾル化された微粒子を前記各吐出ノズルの吐出口から表面処理対象物に向けて吐出し、該表面処理対象物に対し表面処理を行い、
相互間距離調整手段が、前記各吐出ノズルの吐出口と、前記表面処理対象物において表面処理される表面との相互間距離を、前記表面処理対象物の形状に応じて調整することを含み、
前記相互間距離調整手段は、前記複数個の吐出ノズルの配列方向に沿って移動可能なノズルヘッド機構 であり、
前記ノズルヘッド機構は、前記複数個の吐出ノズルの配列方向に対し略直交する方向に所定の間隔をもって複数列配置されるリニアモータ単軸ロボットにそれぞれ、複数個配置される ことを特徴とする成膜製品の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020194075A JP7117790B2 (ja) | 2020-11-24 | 2020-11-24 | 成膜装置、および、成膜製品の製造方法 |
PCT/JP2021/034295 WO2022113490A1 (ja) | 2020-11-24 | 2021-09-17 | 成膜装置、および、成膜製品の製造方法 |
EP21897468.1A EP4253598A1 (en) | 2020-11-24 | 2021-09-17 | Film formation device, and production method for film formation product |
KR1020227040813A KR20230007410A (ko) | 2020-11-24 | 2021-09-17 | 성막 장치 및 성막 제품의 제조 방법 |
US18/070,693 US20230098534A1 (en) | 2020-11-24 | 2022-11-29 | Deposition apparatus and deposition product manufacturing method |
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JP2020194075A JP7117790B2 (ja) | 2020-11-24 | 2020-11-24 | 成膜装置、および、成膜製品の製造方法 |
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JP2022082909A JP2022082909A (ja) | 2022-06-03 |
JP7117790B2 true JP7117790B2 (ja) | 2022-08-15 |
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US (1) | US20230098534A1 (ja) |
EP (1) | EP4253598A1 (ja) |
JP (1) | JP7117790B2 (ja) |
KR (1) | KR20230007410A (ja) |
WO (1) | WO2022113490A1 (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003208901A (ja) | 2002-01-16 | 2003-07-25 | Nissan Motor Co Ltd | 多孔質酸化物膜、その製造方法及びそれを用いた燃料電池セル |
JP2005154803A (ja) | 2003-11-21 | 2005-06-16 | Fuji Photo Film Co Ltd | 成膜装置 |
JP2006249490A (ja) | 2005-03-10 | 2006-09-21 | Fujikura Ltd | 成膜装置用エアロゾル噴射装置および成膜装置 |
JP2012082509A (ja) | 2010-09-15 | 2012-04-26 | Toto Ltd | 製膜方法 |
JP2013237024A (ja) | 2012-05-16 | 2013-11-28 | Tokyo Electron Ltd | 成膜装置および成膜方法 |
US20140030825A1 (en) | 2011-02-10 | 2014-01-30 | Korea University Research And Business Foundation | Apparatus for manufacturing an inorganic thin-film solar cell, and method for controlling same |
JP2014189845A (ja) | 2013-03-27 | 2014-10-06 | Toray Eng Co Ltd | 機能性膜形成方法および機能性膜形成装置 |
JP2020183564A (ja) | 2019-05-08 | 2020-11-12 | 積水化学工業株式会社 | 積層フィルムの製造装置、積層フィルムの製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5830265A (ja) | 1981-08-17 | 1983-02-22 | Iwasaki Giken Kogyo Kk | 通話度数表示装置 |
JPS62160163A (ja) * | 1986-01-06 | 1987-07-16 | Sumitomo Metal Ind Ltd | 鋼板の額縁塗装方法 |
JP6347189B2 (ja) | 2014-09-10 | 2018-06-27 | 富士通株式会社 | 膜の製造装置、及び膜の製造方法 |
-
2020
- 2020-11-24 JP JP2020194075A patent/JP7117790B2/ja active Active
-
2021
- 2021-09-17 EP EP21897468.1A patent/EP4253598A1/en active Pending
- 2021-09-17 WO PCT/JP2021/034295 patent/WO2022113490A1/ja unknown
- 2021-09-17 KR KR1020227040813A patent/KR20230007410A/ko active Search and Examination
-
2022
- 2022-11-29 US US18/070,693 patent/US20230098534A1/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003208901A (ja) | 2002-01-16 | 2003-07-25 | Nissan Motor Co Ltd | 多孔質酸化物膜、その製造方法及びそれを用いた燃料電池セル |
JP2005154803A (ja) | 2003-11-21 | 2005-06-16 | Fuji Photo Film Co Ltd | 成膜装置 |
JP2006249490A (ja) | 2005-03-10 | 2006-09-21 | Fujikura Ltd | 成膜装置用エアロゾル噴射装置および成膜装置 |
JP2012082509A (ja) | 2010-09-15 | 2012-04-26 | Toto Ltd | 製膜方法 |
US20140030825A1 (en) | 2011-02-10 | 2014-01-30 | Korea University Research And Business Foundation | Apparatus for manufacturing an inorganic thin-film solar cell, and method for controlling same |
JP2013237024A (ja) | 2012-05-16 | 2013-11-28 | Tokyo Electron Ltd | 成膜装置および成膜方法 |
JP2014189845A (ja) | 2013-03-27 | 2014-10-06 | Toray Eng Co Ltd | 機能性膜形成方法および機能性膜形成装置 |
JP2020183564A (ja) | 2019-05-08 | 2020-11-12 | 積水化学工業株式会社 | 積層フィルムの製造装置、積層フィルムの製造方法 |
Also Published As
Publication number | Publication date |
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EP4253598A1 (en) | 2023-10-04 |
WO2022113490A1 (ja) | 2022-06-02 |
KR20230007410A (ko) | 2023-01-12 |
JP2022082909A (ja) | 2022-06-03 |
US20230098534A1 (en) | 2023-03-30 |
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