JP7114234B2 - 搬送システム及び加工システム - Google Patents

搬送システム及び加工システム Download PDF

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Publication number
JP7114234B2
JP7114234B2 JP2017183891A JP2017183891A JP7114234B2 JP 7114234 B2 JP7114234 B2 JP 7114234B2 JP 2017183891 A JP2017183891 A JP 2017183891A JP 2017183891 A JP2017183891 A JP 2017183891A JP 7114234 B2 JP7114234 B2 JP 7114234B2
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Japan
Prior art keywords
carriage
transport
work
module
movement
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JP2017183891A
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English (en)
Japanese (ja)
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JP2019061364A5 (enExample
JP2019061364A (ja
Inventor
幸治 友田
武 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2017183891A priority Critical patent/JP7114234B2/ja
Priority to US16/129,013 priority patent/US10889449B2/en
Priority to CN201811114840.5A priority patent/CN109552835B/zh
Priority to CN202110526933.4A priority patent/CN113148592B/zh
Publication of JP2019061364A publication Critical patent/JP2019061364A/ja
Publication of JP2019061364A5 publication Critical patent/JP2019061364A5/ja
Priority to US17/120,939 priority patent/US11702295B2/en
Priority to JP2022067290A priority patent/JP2022103178A/ja
Application granted granted Critical
Publication of JP7114234B2 publication Critical patent/JP7114234B2/ja
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/60Electric or hybrid propulsion means for production processes

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  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • General Factory Administration (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Control Of Linear Motors (AREA)
JP2017183891A 2017-09-25 2017-09-25 搬送システム及び加工システム Active JP7114234B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2017183891A JP7114234B2 (ja) 2017-09-25 2017-09-25 搬送システム及び加工システム
US16/129,013 US10889449B2 (en) 2017-09-25 2018-09-12 Transport system and manufacturing method of article
CN201811114840.5A CN109552835B (zh) 2017-09-25 2018-09-25 输送系统及物品的制造方法
CN202110526933.4A CN113148592B (zh) 2017-09-25 2018-09-25 输送系统、加工系统及对工件进行加工以制造物品的方法
US17/120,939 US11702295B2 (en) 2017-09-25 2020-12-14 Transport system and manufacturing method of article
JP2022067290A JP2022103178A (ja) 2017-09-25 2022-04-15 搬送システム及び加工システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017183891A JP7114234B2 (ja) 2017-09-25 2017-09-25 搬送システム及び加工システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022067290A Division JP2022103178A (ja) 2017-09-25 2022-04-15 搬送システム及び加工システム

Publications (3)

Publication Number Publication Date
JP2019061364A JP2019061364A (ja) 2019-04-18
JP2019061364A5 JP2019061364A5 (enExample) 2020-11-12
JP7114234B2 true JP7114234B2 (ja) 2022-08-08

Family

ID=66176675

Family Applications (2)

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JP2017183891A Active JP7114234B2 (ja) 2017-09-25 2017-09-25 搬送システム及び加工システム
JP2022067290A Pending JP2022103178A (ja) 2017-09-25 2022-04-15 搬送システム及び加工システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2022067290A Pending JP2022103178A (ja) 2017-09-25 2022-04-15 搬送システム及び加工システム

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JP (2) JP7114234B2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002108429A (ja) 2000-09-29 2002-04-10 Toyoda Mach Works Ltd 加工装置及び加工方法
JP5912426B2 (ja) 2011-11-07 2016-04-27 ヤマハ発動機株式会社 リニアコンベア
WO2017104804A1 (ja) 2015-12-18 2017-06-22 日本精工株式会社 生産ライン

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332307A (ja) * 1989-06-28 1991-02-12 Sumitomo Electric Ind Ltd 磁気浮上搬送車
JP3376155B2 (ja) * 1995-03-31 2003-02-10 株式会社東芝 磁石軌道配置式磁気浮上搬送装置
JPH09252504A (ja) * 1996-03-15 1997-09-22 Hitachi Kiden Kogyo Ltd 磁気浮上式搬送装置
JP3486830B2 (ja) * 1996-08-09 2004-01-13 株式会社滋賀山下 ワーク仕上げ加工装置
JP2002018668A (ja) * 2000-07-10 2002-01-22 Sekisui House Ltd 搬送台車の位置決め装置
JP3977086B2 (ja) * 2002-01-18 2007-09-19 キヤノン株式会社 ステージシステム
JP4227452B2 (ja) * 2002-12-27 2009-02-18 キヤノン株式会社 位置決め装置、及びその位置決め装置を利用した露光装置
JP2006281426A (ja) * 2005-04-05 2006-10-19 Nsk Ltd 位置決め装置
JP5217623B2 (ja) * 2008-05-19 2013-06-19 株式会社安川電機 磁気浮上制御装置
EP2746882B1 (en) * 2012-12-21 2018-09-05 Robert Bosch Gmbh Conveying system of a machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002108429A (ja) 2000-09-29 2002-04-10 Toyoda Mach Works Ltd 加工装置及び加工方法
JP5912426B2 (ja) 2011-11-07 2016-04-27 ヤマハ発動機株式会社 リニアコンベア
WO2017104804A1 (ja) 2015-12-18 2017-06-22 日本精工株式会社 生産ライン

Also Published As

Publication number Publication date
JP2019061364A (ja) 2019-04-18
JP2022103178A (ja) 2022-07-07

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