JP7092577B2 - 蒸発源及び蒸着装置 - Google Patents

蒸発源及び蒸着装置 Download PDF

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Publication number
JP7092577B2
JP7092577B2 JP2018123555A JP2018123555A JP7092577B2 JP 7092577 B2 JP7092577 B2 JP 7092577B2 JP 2018123555 A JP2018123555 A JP 2018123555A JP 2018123555 A JP2018123555 A JP 2018123555A JP 7092577 B2 JP7092577 B2 JP 7092577B2
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Japan
Prior art keywords
reflector
crucible
heater
evaporation source
case
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JP2018123555A
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English (en)
Japanese (ja)
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JP2020002436A5 (enExample
JP2020002436A (ja
Inventor
由季 菅原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Tokki Corp
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Canon Tokki Corp
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Publication date
Application filed by Canon Tokki Corp filed Critical Canon Tokki Corp
Priority to JP2018123555A priority Critical patent/JP7092577B2/ja
Priority to KR1020180125582A priority patent/KR20200001956A/ko
Priority to CN201811362786.6A priority patent/CN110656309B/zh
Publication of JP2020002436A publication Critical patent/JP2020002436A/ja
Publication of JP2020002436A5 publication Critical patent/JP2020002436A5/ja
Priority to JP2022097249A priority patent/JP2022113863A/ja
Application granted granted Critical
Publication of JP7092577B2 publication Critical patent/JP7092577B2/ja
Priority to KR1020240032014A priority patent/KR102661888B1/ko
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Anticipated expiration legal-status Critical

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Control Of Resistance Heating (AREA)
JP2018123555A 2018-06-28 2018-06-28 蒸発源及び蒸着装置 Active JP7092577B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2018123555A JP7092577B2 (ja) 2018-06-28 2018-06-28 蒸発源及び蒸着装置
KR1020180125582A KR20200001956A (ko) 2018-06-28 2018-10-19 가열 장치, 증발원 및 증착 장치
CN201811362786.6A CN110656309B (zh) 2018-06-28 2018-11-16 蒸发源及蒸镀装置
JP2022097249A JP2022113863A (ja) 2018-06-28 2022-06-16 蒸発源及び蒸着装置
KR1020240032014A KR102661888B1 (ko) 2018-06-28 2024-03-06 가열 장치, 증발원 및 증착 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018123555A JP7092577B2 (ja) 2018-06-28 2018-06-28 蒸発源及び蒸着装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022097249A Division JP2022113863A (ja) 2018-06-28 2022-06-16 蒸発源及び蒸着装置

Publications (3)

Publication Number Publication Date
JP2020002436A JP2020002436A (ja) 2020-01-09
JP2020002436A5 JP2020002436A5 (enExample) 2021-07-26
JP7092577B2 true JP7092577B2 (ja) 2022-06-28

Family

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Family Applications (2)

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JP2018123555A Active JP7092577B2 (ja) 2018-06-28 2018-06-28 蒸発源及び蒸着装置
JP2022097249A Pending JP2022113863A (ja) 2018-06-28 2022-06-16 蒸発源及び蒸着装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2022097249A Pending JP2022113863A (ja) 2018-06-28 2022-06-16 蒸発源及び蒸着装置

Country Status (3)

Country Link
JP (2) JP7092577B2 (enExample)
KR (2) KR20200001956A (enExample)
CN (1) CN110656309B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7092577B2 (ja) * 2018-06-28 2022-06-28 キヤノントッキ株式会社 蒸発源及び蒸着装置
JP7520515B2 (ja) 2020-01-09 2024-07-23 キヤノン株式会社 通信装置、制御方法、及びプログラム
JP2022107982A (ja) * 2021-01-12 2022-07-25 キヤノントッキ株式会社 蒸発源装置、成膜装置、成膜方法及び電子デバイスの製造方法
JP7394242B1 (ja) 2023-01-13 2023-12-07 日本碍子株式会社 乾燥装置
CN117403186A (zh) * 2023-11-09 2024-01-16 苏州迈为科技股份有限公司 一种真空镀膜设备的加热装置、方法及镀膜设备

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006274336A (ja) 2005-03-29 2006-10-12 Jfe Steel Kk 直火式の連続加熱炉による鋼板の加熱方法
JP2009093933A (ja) 2007-10-10 2009-04-30 Negishi Seisakusho:Kk 赤外線ヒーター装置およびこれを備える加熱装置
JP2011162867A (ja) 2010-02-15 2011-08-25 Mitsubishi Heavy Ind Ltd 真空蒸発装置
JP2012234909A (ja) 2011-04-28 2012-11-29 Nissan Motor Co Ltd ヒートシンク、ヒートシンクの製造方法及び灯具
US20140109829A1 (en) 2012-10-22 2014-04-24 Samsung Display Co., Ltd. Linear evaporation source and vacuum deposition apparatus including the same
JP2015067850A (ja) 2013-09-27 2015-04-13 株式会社日立ハイテクファインシステムズ 真空蒸着装置
JP3203978U (ja) 2016-02-18 2016-04-28 根岸　敏夫 有機材料蒸発源

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943871A (ja) * 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd 蒸発材料収容器
JPS6467518A (en) * 1987-09-07 1989-03-14 Matsushita Electric Industrial Co Ltd Catalytic combustion equipment
JPH0626926A (ja) * 1992-05-12 1994-02-04 Fujitsu Ltd 赤外線検知器
JPH06108236A (ja) * 1992-09-25 1994-04-19 Mitsubishi Electric Corp 薄膜形成装置
JP4908234B2 (ja) 2005-01-17 2012-04-04 株式会社ユーテック 蒸発源及び蒸着装置
KR20160094347A (ko) * 2016-03-30 2016-08-09 한국표준과학연구원 유도 가열 선형 증발 증착 장치
JP7092577B2 (ja) * 2018-06-28 2022-06-28 キヤノントッキ株式会社 蒸発源及び蒸着装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006274336A (ja) 2005-03-29 2006-10-12 Jfe Steel Kk 直火式の連続加熱炉による鋼板の加熱方法
JP2009093933A (ja) 2007-10-10 2009-04-30 Negishi Seisakusho:Kk 赤外線ヒーター装置およびこれを備える加熱装置
JP2011162867A (ja) 2010-02-15 2011-08-25 Mitsubishi Heavy Ind Ltd 真空蒸発装置
JP2012234909A (ja) 2011-04-28 2012-11-29 Nissan Motor Co Ltd ヒートシンク、ヒートシンクの製造方法及び灯具
US20140109829A1 (en) 2012-10-22 2014-04-24 Samsung Display Co., Ltd. Linear evaporation source and vacuum deposition apparatus including the same
JP2015067850A (ja) 2013-09-27 2015-04-13 株式会社日立ハイテクファインシステムズ 真空蒸着装置
JP3203978U (ja) 2016-02-18 2016-04-28 根岸　敏夫 有機材料蒸発源

Also Published As

Publication number Publication date
JP2022113863A (ja) 2022-08-04
CN110656309B (zh) 2024-03-15
KR102661888B1 (ko) 2024-04-26
KR20240035975A (ko) 2024-03-19
CN110656309A (zh) 2020-01-07
JP2020002436A (ja) 2020-01-09
KR20200001956A (ko) 2020-01-07

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