JP7050771B2 - 検査システムのための軸上照明及び拡散照明 - Google Patents

検査システムのための軸上照明及び拡散照明 Download PDF

Info

Publication number
JP7050771B2
JP7050771B2 JP2019518377A JP2019518377A JP7050771B2 JP 7050771 B2 JP7050771 B2 JP 7050771B2 JP 2019518377 A JP2019518377 A JP 2019518377A JP 2019518377 A JP2019518377 A JP 2019518377A JP 7050771 B2 JP7050771 B2 JP 7050771B2
Authority
JP
Japan
Prior art keywords
dome
lighting
reflective
light
lighting housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019518377A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019529936A5 (https=
JP2019529936A (ja
Inventor
エス. ラング,マシュー
ジェイ. マディ,ティモシー
アール. ジョンソン,デニス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hutchinson Technology Inc
Original Assignee
Hutchinson Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hutchinson Technology Inc filed Critical Hutchinson Technology Inc
Publication of JP2019529936A publication Critical patent/JP2019529936A/ja
Publication of JP2019529936A5 publication Critical patent/JP2019529936A5/ja
Application granted granted Critical
Publication of JP7050771B2 publication Critical patent/JP7050771B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G02B19/0066Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED in the form of an LED array
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/0994Fibers, light pipes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8812Diffuse illumination, e.g. "sky"
    • G01N2021/8816Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/062LED's
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/065Integrating spheres

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2019518377A 2016-10-07 2017-10-06 検査システムのための軸上照明及び拡散照明 Active JP7050771B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201662405549P 2016-10-07 2016-10-07
US62/405,549 2016-10-07
US15/727,215 US11442020B2 (en) 2016-10-07 2017-10-06 On-axis and diffuse illumination for inspection systems
PCT/US2017/055647 WO2018068009A1 (en) 2016-10-07 2017-10-06 On-axis and diffuse illumination for inspection systems
US15/727,215 2017-10-06

Publications (3)

Publication Number Publication Date
JP2019529936A JP2019529936A (ja) 2019-10-17
JP2019529936A5 JP2019529936A5 (https=) 2020-11-12
JP7050771B2 true JP7050771B2 (ja) 2022-04-08

Family

ID=61828742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019518377A Active JP7050771B2 (ja) 2016-10-07 2017-10-06 検査システムのための軸上照明及び拡散照明

Country Status (4)

Country Link
US (1) US11442020B2 (https=)
JP (1) JP7050771B2 (https=)
CN (1) CN109891215A (https=)
WO (1) WO2018068009A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201900005536A1 (it) * 2019-04-10 2020-10-10 Doss Visual Solution S R L Metodo di acquisizione immagini per una macchina di ispezione ottica
KR20240130191A (ko) * 2023-02-21 2024-08-29 (주) 인텍플러스 롤투롤 장비용 검사 시스템

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006017689A (ja) 2004-07-04 2006-01-19 Ccs Inc 光源装置
US20070273890A1 (en) 2004-12-14 2007-11-29 Njo Swie L Method and Device for Measuring Coarseness of a Paint Film
JP2011069651A (ja) 2009-09-24 2011-04-07 Aitec System:Kk 外観検査装置及びその照明装置
JP2014190868A (ja) 2013-03-27 2014-10-06 Ccs Inc 光照射装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1099682A (en) 1977-05-10 1981-04-21 Kenneth J. Fisher Surgical light assembly with heat sink cooling
US5461417A (en) * 1993-02-16 1995-10-24 Northeast Robotics, Inc. Continuous diffuse illumination method and apparatus
US5764874A (en) 1994-10-31 1998-06-09 Northeast Robotics, Inc. Imaging system utilizing both diffuse and specular reflection characteristics
JP3366211B2 (ja) * 1997-02-07 2003-01-14 日本アビオニクス株式会社 鏡面対象物の撮像方式
US6449103B1 (en) * 1997-04-16 2002-09-10 Jeffrey R. Charles Solid catadioptric omnidirectional optical system having central coverage means which is associated with a camera, projector, medical instrument, or similar article
JPH11296657A (ja) * 1998-04-09 1999-10-29 Nippon Avionics Co Ltd 画像処理装置の撮像光学系
JP4763134B2 (ja) * 1998-12-21 2011-08-31 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ スキャッタメータ
US9955551B2 (en) * 2002-07-12 2018-04-24 Yechezkal Evan Spero Detector controlled illuminating system
US7145125B2 (en) * 2003-06-23 2006-12-05 Advanced Optical Technologies, Llc Integrating chamber cone light using LED sources
DE102004014541B3 (de) 2004-03-23 2005-05-04 Koenig & Bauer Ag Optisches System zur Erzeugung eines Beleuchtungsstreifens
US20070291361A1 (en) * 2006-06-19 2007-12-20 Credence Systems Corporation Lens housing with integrated thermal management
CN201348611Y (zh) 2009-01-12 2009-11-18 北京大恒图像视觉有限公司 一种镭射印刷品质量检测系统
WO2010090604A1 (en) 2009-02-06 2010-08-12 Agency For Science, Technology And Research A light detection arrangement and a method for detecting light in a light detection arrangement
US8768159B2 (en) * 2009-07-10 2014-07-01 Microscan Systems, Inc. Combination dark field and bright field illuminator
US9157867B2 (en) * 2013-03-14 2015-10-13 Graftek Imaging Inc. Lighting domes with pin hole lens
CN203297986U (zh) 2013-05-22 2013-11-20 国家烟草质量监督检验中心 应用于计算机视觉的复合照明装置
KR101474191B1 (ko) * 2014-02-03 2014-12-18 삼성전기주식회사 조명 모듈 및 이를 이용하는 외관 검사 시스템
EP3158727A1 (en) * 2014-06-20 2017-04-26 Qualcomm Incorporated Parallax free thin multi-camera system capable of capturing full wide field of view images
CN204629260U (zh) 2015-05-29 2015-09-09 杭州利珀科技有限公司 一种用于金属盖缺陷智能检测设备的光源
WO2017160236A1 (en) * 2016-03-16 2017-09-21 Agency For Science, Technology And Research Lighting device and inspection apparatus
CN105847640A (zh) 2016-03-18 2016-08-10 上海众思电子设备有限公司 多线阵 ccd 相机所用光源

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006017689A (ja) 2004-07-04 2006-01-19 Ccs Inc 光源装置
US20070273890A1 (en) 2004-12-14 2007-11-29 Njo Swie L Method and Device for Measuring Coarseness of a Paint Film
JP2008523404A (ja) 2004-12-14 2008-07-03 アクゾ ノーベル コーティングス インターナショナル ビー ヴィ 塗膜の粗さの測定方法および測定装置
JP2011069651A (ja) 2009-09-24 2011-04-07 Aitec System:Kk 外観検査装置及びその照明装置
JP2014190868A (ja) 2013-03-27 2014-10-06 Ccs Inc 光照射装置

Also Published As

Publication number Publication date
US20180100808A1 (en) 2018-04-12
JP2019529936A (ja) 2019-10-17
WO2018068009A1 (en) 2018-04-12
CN109891215A (zh) 2019-06-14
US11442020B2 (en) 2022-09-13

Similar Documents

Publication Publication Date Title
JP4625837B2 (ja) 均一な像を形成する懐中電灯
JP5339707B2 (ja) 線状集光器
TWI298097B (en) Method and apparatus for simultaneous 2-d and topographical inspection
US9903553B2 (en) Light-guiding pillar and vehicle lamp using the same
JP7191801B2 (ja) 光学検査装置
US20100103661A1 (en) Machine Vision Inspection System and Light Source Module thereof
JP2008288215A (ja) フレネルレンズライト用、特にスポットライトあるいはフラッドライト用光学系
KR20120046220A (ko) 암시야 및 명시야 결합 조명기
JP6345488B2 (ja) 光束制御部材、発光装置および照明装置
JP6407407B2 (ja) 光源装置及び照明装置
JP7050771B2 (ja) 検査システムのための軸上照明及び拡散照明
JP2005129354A (ja) Led照明装置
TW201415077A (zh) 用於一顯微鏡之多方向照明及顯微鏡
JPS5870150A (ja) 光学検査装置用照明器
TWI596318B (zh) 光學測量系統以及光學成像系統
JP2007057296A (ja) 光学読取装置
JP2016219113A (ja) 照明装置及び光学部材
CN101576594B (zh) 自动光学检查设备及其光源模块
EP3336743B1 (en) Imaging reader with low stray visibility illumination
WO2008102339A1 (en) Led illumination for line scan camera
JP2016018893A (ja) 発光装置
TWI823002B (zh) 用於一維陣列偵測器之成像光學器件
TW202125034A (zh) 光源裝置及光學檢測系統
CN100567797C (zh) 照明系统
JP6660481B2 (ja) ビーム生成光学系及びビーム生成光学系を備える撮像装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20190514

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7426

Effective date: 20190514

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201002

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20201002

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210706

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210824

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20211119

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20220106

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220222

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220315

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220329

R150 Certificate of patent or registration of utility model

Ref document number: 7050771

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250