CN109891215A - 用于检查系统的同轴和漫射照明 - Google Patents

用于检查系统的同轴和漫射照明 Download PDF

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Publication number
CN109891215A
CN109891215A CN201780061811.4A CN201780061811A CN109891215A CN 109891215 A CN109891215 A CN 109891215A CN 201780061811 A CN201780061811 A CN 201780061811A CN 109891215 A CN109891215 A CN 109891215A
Authority
CN
China
Prior art keywords
reflector
light source
illumination
shell
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780061811.4A
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English (en)
Chinese (zh)
Inventor
M·S·朗
T·J·马戴
D·R·约翰逊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hutchinson Technology Inc
Original Assignee
Hutchinson Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hutchinson Technology Inc filed Critical Hutchinson Technology Inc
Publication of CN109891215A publication Critical patent/CN109891215A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G02B19/0066—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED in the form of an LED array
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0994—Fibers, light pipes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/065—Integrating spheres

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201780061811.4A 2016-10-07 2017-10-06 用于检查系统的同轴和漫射照明 Pending CN109891215A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662405549P 2016-10-07 2016-10-07
US62/405,549 2016-10-07
PCT/US2017/055647 WO2018068009A1 (en) 2016-10-07 2017-10-06 On-axis and diffuse illumination for inspection systems

Publications (1)

Publication Number Publication Date
CN109891215A true CN109891215A (zh) 2019-06-14

Family

ID=61828742

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780061811.4A Pending CN109891215A (zh) 2016-10-07 2017-10-06 用于检查系统的同轴和漫射照明

Country Status (4)

Country Link
US (1) US11442020B2 (https=)
JP (1) JP7050771B2 (https=)
CN (1) CN109891215A (https=)
WO (1) WO2018068009A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201900005536A1 (it) * 2019-04-10 2020-10-10 Doss Visual Solution S R L Metodo di acquisizione immagini per una macchina di ispezione ottica
KR20240130191A (ko) * 2023-02-21 2024-08-29 (주) 인텍플러스 롤투롤 장비용 검사 시스템

Citations (16)

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CA1099682A (en) * 1977-05-10 1981-04-21 Kenneth J. Fisher Surgical light assembly with heat sink cooling
US5684530A (en) * 1993-02-16 1997-11-04 Northeast Robotics, Inc. Continuous diffuse illumination method and apparatus
US5764874A (en) * 1994-10-31 1998-06-09 Northeast Robotics, Inc. Imaging system utilizing both diffuse and specular reflection characteristics
US6577397B1 (en) * 1998-12-21 2003-06-10 Koninklijke Philips Electronics N.V. Scatterometer
JP2006017689A (ja) * 2004-07-04 2006-01-19 Ccs Inc 光源装置
US20070188722A1 (en) * 2004-03-23 2007-08-16 Stober Bernd R Optical system for creating an illuminated strip
US20070291361A1 (en) * 2006-06-19 2007-12-20 Credence Systems Corporation Lens housing with integrated thermal management
CN201348611Y (zh) * 2009-01-12 2009-11-18 北京大恒图像视觉有限公司 一种镭射印刷品质量检测系统
JP2011069651A (ja) * 2009-09-24 2011-04-07 Aitec System:Kk 外観検査装置及びその照明装置
CN102356457A (zh) * 2009-02-06 2012-02-15 新加坡科技研究局 光检测装置以及用于在光检测装置中检测光的方法
CN203297986U (zh) * 2013-05-22 2013-11-20 国家烟草质量监督检验中心 应用于计算机视觉的复合照明装置
JP2014190868A (ja) * 2013-03-27 2014-10-06 Ccs Inc 光照射装置
KR101474191B1 (ko) * 2014-02-03 2014-12-18 삼성전기주식회사 조명 모듈 및 이를 이용하는 외관 검사 시스템
CN204629260U (zh) * 2015-05-29 2015-09-09 杭州利珀科技有限公司 一种用于金属盖缺陷智能检测设备的光源
WO2015196050A1 (en) * 2014-06-20 2015-12-23 Qualcomm Incorporated Parallax free thin multi-camera system capable of capturing full wide field of view images
CN105847640A (zh) * 2016-03-18 2016-08-10 上海众思电子设备有限公司 多线阵 ccd 相机所用光源

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JP3366211B2 (ja) * 1997-02-07 2003-01-14 日本アビオニクス株式会社 鏡面対象物の撮像方式
US6449103B1 (en) * 1997-04-16 2002-09-10 Jeffrey R. Charles Solid catadioptric omnidirectional optical system having central coverage means which is associated with a camera, projector, medical instrument, or similar article
JPH11296657A (ja) * 1998-04-09 1999-10-29 Nippon Avionics Co Ltd 画像処理装置の撮像光学系
US9955551B2 (en) * 2002-07-12 2018-04-24 Yechezkal Evan Spero Detector controlled illuminating system
US7145125B2 (en) * 2003-06-23 2006-12-05 Advanced Optical Technologies, Llc Integrating chamber cone light using LED sources
US20070273890A1 (en) 2004-12-14 2007-11-29 Njo Swie L Method and Device for Measuring Coarseness of a Paint Film
US8768159B2 (en) * 2009-07-10 2014-07-01 Microscan Systems, Inc. Combination dark field and bright field illuminator
US9157867B2 (en) * 2013-03-14 2015-10-13 Graftek Imaging Inc. Lighting domes with pin hole lens
WO2017160236A1 (en) * 2016-03-16 2017-09-21 Agency For Science, Technology And Research Lighting device and inspection apparatus

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1099682A (en) * 1977-05-10 1981-04-21 Kenneth J. Fisher Surgical light assembly with heat sink cooling
US5684530A (en) * 1993-02-16 1997-11-04 Northeast Robotics, Inc. Continuous diffuse illumination method and apparatus
US5764874A (en) * 1994-10-31 1998-06-09 Northeast Robotics, Inc. Imaging system utilizing both diffuse and specular reflection characteristics
US6577397B1 (en) * 1998-12-21 2003-06-10 Koninklijke Philips Electronics N.V. Scatterometer
US20070188722A1 (en) * 2004-03-23 2007-08-16 Stober Bernd R Optical system for creating an illuminated strip
JP2006017689A (ja) * 2004-07-04 2006-01-19 Ccs Inc 光源装置
US20070291361A1 (en) * 2006-06-19 2007-12-20 Credence Systems Corporation Lens housing with integrated thermal management
CN201348611Y (zh) * 2009-01-12 2009-11-18 北京大恒图像视觉有限公司 一种镭射印刷品质量检测系统
CN102356457A (zh) * 2009-02-06 2012-02-15 新加坡科技研究局 光检测装置以及用于在光检测装置中检测光的方法
JP2011069651A (ja) * 2009-09-24 2011-04-07 Aitec System:Kk 外観検査装置及びその照明装置
JP2014190868A (ja) * 2013-03-27 2014-10-06 Ccs Inc 光照射装置
CN203297986U (zh) * 2013-05-22 2013-11-20 国家烟草质量监督检验中心 应用于计算机视觉的复合照明装置
KR101474191B1 (ko) * 2014-02-03 2014-12-18 삼성전기주식회사 조명 모듈 및 이를 이용하는 외관 검사 시스템
WO2015196050A1 (en) * 2014-06-20 2015-12-23 Qualcomm Incorporated Parallax free thin multi-camera system capable of capturing full wide field of view images
CN204629260U (zh) * 2015-05-29 2015-09-09 杭州利珀科技有限公司 一种用于金属盖缺陷智能检测设备的光源
CN105847640A (zh) * 2016-03-18 2016-08-10 上海众思电子设备有限公司 多线阵 ccd 相机所用光源

Non-Patent Citations (1)

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Title
谢煜等: "一种PCB表观检查机的无阴影高均匀照明方法", 《光电子.激光》 *

Also Published As

Publication number Publication date
US20180100808A1 (en) 2018-04-12
JP2019529936A (ja) 2019-10-17
WO2018068009A1 (en) 2018-04-12
JP7050771B2 (ja) 2022-04-08
US11442020B2 (en) 2022-09-13

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