JP7048351B2 - 熱処理方法および熱処理装置 - Google Patents
熱処理方法および熱処理装置 Download PDFInfo
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Description
図1は、本発明に係る熱処理装置1の構成を示す縦断面図である。図1の熱処理装置1は、基板として円板形状の半導体ウェハーWに対してフラッシュ光照射を行うことによってその半導体ウェハーWを加熱するフラッシュランプアニール装置である。処理対象となる半導体ウェハーWのサイズは特に限定されるものではないが、例えばφ300mmやφ450mmである(本実施形態ではφ300mm)。熱処理装置1に搬入される前の半導体ウェハーWには不純物が注入されており、熱処理装置1による加熱処理によって注入された不純物の活性化処理が実行される。なお、図1および以降の各図においては、理解容易のため、必要に応じて各部の寸法や数を誇張または簡略化して描いている。
次に、本発明の第2実施形態について説明する。第2実施形態の熱処理装置1の構成は第1実施形態と全く同じである。また、第2実施形態の熱処理装置1における半導体ウェハーWの処理手順も第1実施形態と概ね同様である。第2実施形態が第1実施形態と相違するのは、サセプタ74の温度測定値を積算して割れ判定のための温度積算値Sを算定している点である。
以上、本発明の実施の形態について説明したが、この発明はその趣旨を逸脱しない限りにおいて上述したもの以外に種々の変更を行うことが可能である。例えば、第1実施形態では半導体ウェハーWの裏面の温度積算値に基づいて、第2実施形態ではサセプタ74の温度積算値に基づいて半導体ウェハーWの割れを判定していたが、それら以外の温度測定値を積算した温度積算値に基づいて半導体ウェハーWの割れ判定を行うようにしても良い。例えば、放射温度計140によって測定した半導体ウェハーWの表面温度を積算した温度積算値に基づいて半導体ウェハーWの割れを判定するようにしても良い。或いは、温度センサー150によって測定したチャンバー6内の雰囲気温度を積算した温度積算値に基づいて半導体ウェハーWの割れを判定するようにしても良い。フラッシュ光照射時に半導体ウェハーWが割れたときには、その影響によってチャンバー6内の雰囲気温度も異常な挙動を示すため、雰囲気温度の温度積算値に基づいて割れ判定を行うことが可能である。要するに、フラッシュ光照射時に半導体ウェハーWが割れたときに、通常とは異なる異常な温度変化を示す要素の温度を積算した温度積算値に基づいて半導体ウェハーWの割れ判定を行うようにすれば良い。
3 制御部
4 ハロゲン加熱部
5 フラッシュ加熱部
6 チャンバー
7 保持部
10 移載機構
31 積算部
32 割れ判定部
33 表示部
34 入力部
63 上側チャンバー窓
64 下側チャンバー窓
65 熱処理空間
74 サセプタ
75 保持プレート
77 基板支持ピン
120,130,140 放射温度計
150 温度センサー
FL フラッシュランプ
HL ハロゲンランプ
W 半導体ウェハー
Claims (12)
- 基板にフラッシュ光を照射することによって該基板を加熱する熱処理方法であって、
連続点灯ランプから光を照射して基板を予備加熱温度に加熱する予備加熱工程と、
フラッシュランプから前記基板の表面にフラッシュ光を照射するフラッシュ光照射工程と、
前記基板の温度を所定のサンプリング間隔で測定して複数の温度測定値を取得する温度測定工程と、
前記複数の温度測定値のうち前記フラッシュ光の照射開始時以降の積算開始時点から取得された設定数の温度測定値を順次に加算して温度積算値を算定する積算工程と、
前記温度積算値に基づいて前記基板の割れを判定する判定工程と、
を備えることを特徴とする熱処理方法。 - 請求項1記載の熱処理方法において、
前記温度測定工程では、前記基板の裏面の温度を測定することを特徴とする熱処理方法。 - 基板にフラッシュ光を照射することによって該基板を加熱する熱処理方法であって、
サセプタに保持された基板に連続点灯ランプから光を照射して前記基板を予備加熱温度に加熱する予備加熱工程と、
フラッシュランプから前記基板の表面にフラッシュ光を照射するフラッシュ光照射工程と、
前記サセプタの温度を所定のサンプリング間隔で測定して複数の温度測定値を取得する温度測定工程と、
前記複数の温度測定値のうち前記フラッシュ光の照射開始時以降の積算開始時点から取得された設定数の温度測定値を順次に加算して温度積算値を算定する積算工程と、
前記温度積算値に基づいて前記基板の割れを判定する判定工程と、
を備えることを特徴とする熱処理方法。 - 請求項1から請求項3のいずれかに記載の熱処理方法において、
前記判定工程では、前記温度積算値が予め設定された上限値および下限値の範囲から外れているときには前記基板が割れていると判定することを特徴とする熱処理方法。 - 請求項4記載の熱処理方法において、
前記上限値および前記下限値を設定する設定工程をさらに備えることを特徴とする熱処理方法。 - 請求項1から請求項5のいずれかに記載の熱処理方法において、
前記積算開始時点は、前記基板の温度が前記予備加熱温度よりも設定温度昇温した時点であることを特徴とする熱処理方法。 - 基板にフラッシュ光を照射することによって該基板を加熱する熱処理装置であって、
基板を収容するチャンバーと、
前記チャンバー内にて基板を保持するサセプタと、
前記サセプタに保持された前記基板に光を照射して予備加熱温度に加熱する連続点灯ランプと、
前記基板の表面にフラッシュ光を照射するフラッシュランプと、
前記基板の温度を所定のサンプリング間隔で測定して複数の温度測定値を取得する放射温度計と、
前記複数の温度測定値のうち前記フラッシュ光の照射開始時以降の積算開始時点から取得された設定数の温度測定値を順次に加算して温度積算値を算定する積算部と、
前記温度積算値に基づいて前記基板の割れを判定する判定部と、
を備えることを特徴とする熱処理装置。 - 請求項7記載の熱処理装置において、
前記放射温度計は、前記基板の裏面の温度を測定することを特徴とする熱処理装置。 - 基板にフラッシュ光を照射することによって該基板を加熱する熱処理装置であって、
基板を収容するチャンバーと、
前記チャンバー内にて基板を保持するサセプタと、
前記サセプタに保持された前記基板に光を照射して予備加熱温度に加熱する連続点灯ランプと、
前記基板の表面にフラッシュ光を照射するフラッシュランプと、
前記サセプタの温度を所定のサンプリング間隔で測定して複数の温度測定値を取得する放射温度計と、
前記複数の温度測定値のうち前記フラッシュ光の照射開始時以降の積算開始時点から取得された設定数の温度測定値を順次に加算して温度積算値を算定する積算部と、
前記温度積算値に基づいて前記基板の割れを判定する判定部と、
を備えることを特徴とする熱処理装置。 - 請求項7から請求項9のいずれかに記載の熱処理装置において、
前記判定部は、前記温度積算値が予め設定された上限値および下限値の範囲から外れているときには前記基板が割れていると判定することを特徴とする熱処理装置。 - 請求項10記載の熱処理装置において、
前記上限値および前記下限値を設定する設定部をさらに備えることを特徴とする熱処理装置。 - 請求項7から請求項11のいずれかに記載の熱処理装置において、
前記積算開始時点は、前記基板の温度が前記予備加熱温度よりも設定温度昇温した時点であることを特徴とする熱処理装置。
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