JP7037334B2 - 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置 - Google Patents

液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置 Download PDF

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Publication number
JP7037334B2
JP7037334B2 JP2017219330A JP2017219330A JP7037334B2 JP 7037334 B2 JP7037334 B2 JP 7037334B2 JP 2017219330 A JP2017219330 A JP 2017219330A JP 2017219330 A JP2017219330 A JP 2017219330A JP 7037334 B2 JP7037334 B2 JP 7037334B2
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Japan
Prior art keywords
liquid discharge
substrate
wiring structure
forming
discharge element
Prior art date
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JP2017219330A
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English (en)
Japanese (ja)
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JP2018130951A5 (enExample
JP2018130951A (ja
Inventor
徹 江藤
圭一 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to CN201880011541.0A priority Critical patent/CN110290927B/zh
Priority to EP18753582.8A priority patent/EP3582972B1/en
Priority to PCT/JP2018/002188 priority patent/WO2018150830A1/en
Priority to US16/342,097 priority patent/US10899129B2/en
Publication of JP2018130951A publication Critical patent/JP2018130951A/ja
Priority to US17/100,260 priority patent/US11465417B2/en
Publication of JP2018130951A5 publication Critical patent/JP2018130951A5/ja
Priority to JP2022033787A priority patent/JP7223185B2/ja
Application granted granted Critical
Publication of JP7037334B2 publication Critical patent/JP7037334B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2017219330A 2017-02-17 2017-11-14 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置 Active JP7037334B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN201880011541.0A CN110290927B (zh) 2017-02-17 2018-01-25 排液头基板、制造排液头基板的方法、排液头和排液设备
EP18753582.8A EP3582972B1 (en) 2017-02-17 2018-01-25 Method of manufacturing a liquid discharge head
PCT/JP2018/002188 WO2018150830A1 (en) 2017-02-17 2018-01-25 Liquid discharge head substrate, method of manufacturing the same, liquid discharge head, and liquid discharge apparatus
US16/342,097 US10899129B2 (en) 2017-02-17 2018-01-25 Liquid discharge head substrate, method of manufacturing the same, liquid discharge head, and liquid discharge apparatus
US17/100,260 US11465417B2 (en) 2017-02-17 2020-11-20 Liquid discharge head substrate, method of manufacturing the same, liquid discharge head, and liquid discharge apparatus
JP2022033787A JP7223185B2 (ja) 2017-02-17 2022-03-04 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017028421 2017-02-17
JP2017028421 2017-02-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022033787A Division JP7223185B2 (ja) 2017-02-17 2022-03-04 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置

Publications (3)

Publication Number Publication Date
JP2018130951A JP2018130951A (ja) 2018-08-23
JP2018130951A5 JP2018130951A5 (enExample) 2021-01-07
JP7037334B2 true JP7037334B2 (ja) 2022-03-16

Family

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JP2017219330A Active JP7037334B2 (ja) 2017-02-17 2017-11-14 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置

Country Status (4)

Country Link
US (2) US10899129B2 (enExample)
EP (1) EP3582972B1 (enExample)
JP (1) JP7037334B2 (enExample)
CN (1) CN110290927B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7163134B2 (ja) * 2018-10-18 2022-10-31 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001341316A (ja) 2000-06-02 2001-12-11 Sony Corp インクジェットヘッド及びその製造方法
US20030210301A1 (en) 2002-05-08 2003-11-13 Xerox Corporation Polysilicon feed-through fluid drop ejector
JP2007050638A (ja) 2005-08-19 2007-03-01 Seiko Epson Corp デバイス実装構造、デバイス実装方法、電子装置、液滴吐出ヘッド、及び液滴吐出装置
JP2007230060A (ja) 2006-02-28 2007-09-13 Fujifilm Corp 液体吐出ヘッド及びこれを備えた画像形成装置
JP2010260188A (ja) 2009-04-30 2010-11-18 Brother Ind Ltd 液滴吐出ヘッド
JP2014213575A (ja) 2013-04-26 2014-11-17 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2017042953A (ja) 2015-08-25 2017-03-02 セイコーエプソン株式会社 電子デバイス、液体噴射ヘッド、および、電子デバイスの製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3618965B2 (ja) * 1997-06-19 2005-02-09 キヤノン株式会社 液体噴射記録ヘッド用基板およびその製造方法ならびに液体噴射記録装置
US6123410A (en) * 1997-10-28 2000-09-26 Hewlett-Packard Company Scalable wide-array inkjet printhead and method for fabricating same
US7926909B2 (en) * 2007-01-09 2011-04-19 Canon Kabushiki Kaisha Ink-jet recording head, method for manufacturing ink-jet recording head, and semiconductor device
JP6160119B2 (ja) * 2013-02-26 2017-07-12 セイコーエプソン株式会社 配線構造体、配線構造体の製造方法、液滴吐出ヘッドおよび液滴吐出装置
DE112013007584T5 (de) 2013-11-27 2016-08-18 Hewlett-Packard Development Company, L.P. Druckkopf mit von einer Abtrennung umgebenes Bondpad
JP6330819B2 (ja) * 2013-11-29 2018-05-30 コニカミノルタ株式会社 配線基板及びインクジェットヘッド
JP6289234B2 (ja) 2014-04-15 2018-03-07 キヤノン株式会社 記録素子基板及び液体吐出装置
JP6345006B2 (ja) * 2014-07-08 2018-06-20 キヤノン株式会社 インクジェット記録ヘッド用基板の製造方法
JP6598658B2 (ja) 2015-01-27 2019-10-30 キヤノン株式会社 液体吐出ヘッドの素子基板及び液体吐出ヘッド
US10035346B2 (en) 2015-01-27 2018-07-31 Canon Kabushiki Kaisha Element substrate and liquid ejection head
JP6604035B2 (ja) * 2015-05-27 2019-11-13 ブラザー工業株式会社 液体吐出装置、及び液体吐出装置の製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001341316A (ja) 2000-06-02 2001-12-11 Sony Corp インクジェットヘッド及びその製造方法
US20030210301A1 (en) 2002-05-08 2003-11-13 Xerox Corporation Polysilicon feed-through fluid drop ejector
JP2007050638A (ja) 2005-08-19 2007-03-01 Seiko Epson Corp デバイス実装構造、デバイス実装方法、電子装置、液滴吐出ヘッド、及び液滴吐出装置
JP2007230060A (ja) 2006-02-28 2007-09-13 Fujifilm Corp 液体吐出ヘッド及びこれを備えた画像形成装置
JP2010260188A (ja) 2009-04-30 2010-11-18 Brother Ind Ltd 液滴吐出ヘッド
JP2014213575A (ja) 2013-04-26 2014-11-17 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2017042953A (ja) 2015-08-25 2017-03-02 セイコーエプソン株式会社 電子デバイス、液体噴射ヘッド、および、電子デバイスの製造方法

Also Published As

Publication number Publication date
US10899129B2 (en) 2021-01-26
CN110290927A (zh) 2019-09-27
CN110290927B (zh) 2021-11-23
US20190248140A1 (en) 2019-08-15
EP3582972B1 (en) 2024-08-21
EP3582972A1 (en) 2019-12-25
US20210070048A1 (en) 2021-03-11
US11465417B2 (en) 2022-10-11
JP2018130951A (ja) 2018-08-23
EP3582972A4 (en) 2020-12-16

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