JP7027215B2 - ウエーハの生成方法およびウエーハの生成装置 - Google Patents
ウエーハの生成方法およびウエーハの生成装置 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 37
- 239000013078 crystal Substances 0.000 claims description 23
- 238000003384 imaging method Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 238000009751 slip forming Methods 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 135
- 239000010410 layer Substances 0.000 description 61
- 230000003028 elevating effect Effects 0.000 description 21
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 21
- 229910010271 silicon carbide Inorganic materials 0.000 description 21
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000002407 reforming Methods 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
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- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
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- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
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- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
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- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
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Description
パルスレーザー光線の波長 :1064nm
繰り返し周波数 :60kHz
平均出力 :1.5W
パルス幅 :4ns
集光点の直径 :3μm
集光レンズの開口数(NA) :0.65
送り速度 :200mm/s
6:超音波発生手段
6a:超音波発生手段の端面
10:撮像手段
12:剥離検出手段
50:インゴット
52:第一の端面
54:第二の端面
58:第一の端面の垂線
70:改質部
72:クラック
74:剥離層
76:ウエーハ
α:オフ角
A:オフ角が形成される方向
LB:レーザー光線
FP:集光点
LW:水の層
Claims (4)
- インゴットからウエーハを生成するウエーハの生成方法であって、
インゴットに対して透過性を有する波長のレーザー光線の集光点をインゴットの端面から生成すべきウエーハの厚みに相当する深さに位置づけてインゴットにレーザー光線を照射して剥離層を形成する剥離層形成工程と、
生成すべきウエーハに対面させ水の層を介して超音波発生手段を位置づけて超音波を発生させて剥離層を破壊する超音波発生工程と、
撮像手段を生成すべきウエーハの側面に位置づけてインゴットから生成すべきウエーハの剥離を検出する剥離検出工程と、
から少なくとも構成されるウエーハの生成方法。 - インゴットは、c軸とc軸に対し直交するc面とを有する単結晶SiCインゴットであり、
該剥離層形成工程において、単結晶SiCに対して透過性を有する波長のレーザー光線の集光点を単結晶SiCインゴットの端面から生成すべきウエーハの厚みに相当する深さに位置づけて単結晶SiCインゴットにレーザー光線を照射してSiCがSiとCとに分離した改質部と改質部からc面に等方的に形成されるクラックとからなる剥離層を形成する請求項1記載のウエーハの生成方法。 - インゴットは、端面の垂線に対してc軸が傾きc面と端面とでオフ角が形成されている単結晶SiCインゴットであり、
該剥離層形成工程において、オフ角が形成される方向と直交する方向に改質部を連続的に形成して改質部からc面に等方的にクラックを生成し、オフ角が形成される方向にクラックの幅を超えない範囲で単結晶SiCインゴットと集光点とを相対的にインデックス送りしてオフ角が形成される方向と直交する方向に改質部を連続的に形成して改質部からc面に等方的にクラックを順次生成した剥離層を形成する請求項2記載のウエーハの生成方法。 - インゴットに対して透過性を有する波長のレーザー光線の集光点をインゴットの端面から生成すべきウエーハの厚みに相当する深さに位置づけてインゴットにレーザー光線を照射して剥離層を形成したインゴットからウエーハを生成するウエーハの生成装置であって、
生成すべきウエーハに対面する端面を有し水の層を介して超音波を発生させる超音波発生手段と、
生成すべきウエーハの側面に位置づけられる撮像手段と、
該撮像手段と連結され生成すべきウエーハとインゴットとの間隔の変化によってインゴットから生成すべきウエーハの剥離を検出する剥離検出手段と、
から少なくとも構成されるウエーハの生成装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018059662A JP7027215B2 (ja) | 2018-03-27 | 2018-03-27 | ウエーハの生成方法およびウエーハの生成装置 |
KR1020190027145A KR102594221B1 (ko) | 2018-03-27 | 2019-03-08 | 웨이퍼의 생성 방법 및 웨이퍼의 생성 장치 |
CN201910221577.8A CN110310887B (zh) | 2018-03-27 | 2019-03-22 | 晶片的生成方法和晶片的生成装置 |
TW108109984A TWI781306B (zh) | 2018-03-27 | 2019-03-22 | 晶圓生成方法以及晶圓生成裝置 |
US16/365,014 US11114307B2 (en) | 2018-03-27 | 2019-03-26 | Method of producing a wafer from an ingot including a peel-off detecting step |
DE102019204233.3A DE102019204233A1 (de) | 2018-03-27 | 2019-03-27 | Verfahren zum Herstellen eines Wafers und Vorrichtung zum Herstellen eines Wafers |
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JP2018059662A JP7027215B2 (ja) | 2018-03-27 | 2018-03-27 | ウエーハの生成方法およびウエーハの生成装置 |
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JP2019175907A JP2019175907A (ja) | 2019-10-10 |
JP7027215B2 true JP7027215B2 (ja) | 2022-03-01 |
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US (1) | US11114307B2 (ja) |
JP (1) | JP7027215B2 (ja) |
KR (1) | KR102594221B1 (ja) |
CN (1) | CN110310887B (ja) |
DE (1) | DE102019204233A1 (ja) |
TW (1) | TWI781306B (ja) |
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JP7123583B2 (ja) * | 2018-03-14 | 2022-08-23 | 株式会社ディスコ | ウエーハの生成方法およびウエーハの生成装置 |
US11024501B2 (en) | 2018-12-29 | 2021-06-01 | Cree, Inc. | Carrier-assisted method for parting crystalline material along laser damage region |
US10576585B1 (en) | 2018-12-29 | 2020-03-03 | Cree, Inc. | Laser-assisted method for parting crystalline material |
US10562130B1 (en) | 2018-12-29 | 2020-02-18 | Cree, Inc. | Laser-assisted method for parting crystalline material |
JP7237427B2 (ja) * | 2019-05-14 | 2023-03-13 | 株式会社ディスコ | ウェーハの製造方法、及びインゴットの分断装置 |
US10611052B1 (en) | 2019-05-17 | 2020-04-07 | Cree, Inc. | Silicon carbide wafers with relaxed positive bow and related methods |
JP7330771B2 (ja) * | 2019-06-14 | 2023-08-22 | 株式会社ディスコ | ウエーハの生成方法およびウエーハの生成装置 |
JP7321888B2 (ja) * | 2019-10-24 | 2023-08-07 | 株式会社ディスコ | SiCインゴットの加工方法およびレーザー加工装置 |
JP7453013B2 (ja) * | 2020-02-14 | 2024-03-19 | 株式会社ディスコ | ウエーハの加工方法 |
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JP2022096455A (ja) * | 2020-12-17 | 2022-06-29 | 株式会社ディスコ | ウエーハの生成装置 |
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