JP6999350B2 - パッケージ基板の加工方法 - Google Patents
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Description
(1)
step coverage=(t2/t1)×100
11 :配線基板
12 :半導体チップ
15 :パッケージ基板
16 :シールド層
20 :環状フレーム
22 :パッケージ上面(封止剤上面)
23 :パッケージ側面(側壁)
29 :金属粉
30、50、60 :保護テープ
31、51、61 :テープ基材
32、52、62 :粘着層
41 :Vブレード
42 :V溝
46 :ストレートブレード(分割工具)
59 :封止剤
64 :ソフトマスク
105:加工ヘッド(分割工具)
106:総型砥石(分割工具)
Claims (3)
- 配線基材上に形成された交差する分割予定ラインで区画された領域に複数チップが配設され封止剤で一括封止されたパッケージ基板の加工方法であって、
該配線基材側に保護テープを貼着し該保護テープの外周部を環状フレームによって支持するパッケージ基板支持ステップと、
該パッケージ基板支持ステップを実施した後に、分割工具で該保護テープの途中まで切り込み該分割予定ラインに沿って加工し個々の半導体パッケージに分割する分割ステップと、
該分割ステップを実施した後に、複数の該半導体パッケージの該封止剤上面及び側壁に導電性のシールド層を形成するシールド層形成ステップと、を備え、
該保護テープは、該パッケージ基板及び外周の該環状フレームに貼着する箇所のみ粘着層を有し、
該分割ステップにおいては、該パッケージ基板外周の該保護テープの粘着層の粘着性を低減又は無い状態で該分割工具で加工を行い、分割時に飛散する該配線基材の金属粉の該保護テープの粘着層への付着を低減することを特徴とするパッケージ基板の加工方法。 - 配線基材上に形成された交差する分割予定ラインで区画された領域に複数チップが配設され封止剤で一括封止されたパッケージ基板の加工方法であって、
該配線基材側に保護テープを貼着し該保護テープの外周部を環状フレームによって支持するパッケージ基板支持ステップと、
該パッケージ基板支持ステップを実施した後に、少なくとも該パッケージ基板外周の該保護テープの粘着層を全面覆うように水溶性樹脂を塗布する水溶性樹脂塗布ステップと、
該水溶性樹脂塗布ステップを実施した後に、分割工具で該保護テープの途中まで切り込み該分割予定ラインに沿って加工し個々の半導体パッケージに分割する分割ステップと、
該分割ステップを実施した後に、該水溶性樹脂を除去する水溶性樹脂除去ステップと、
該水溶性樹脂除去ステップを実施した後に、複数の該半導体パッケージの該封止剤上面及び側壁に導電性のシールド層を形成するシールド層形成ステップと、を備え、
該分割ステップにおいては、該パッケージ基板外周の該保護テープの粘着層の粘着性を低減又は無い状態で該分割工具で加工を行い、分割時に飛散する該配線基材の金属粉の該保護テープの粘着層への付着を低減することを特徴とするパッケージ基板の加工方法。 - 該パッケージ基板支持ステップと該分割ステップとの間に、該保護テープ側をチャックテーブルに保持し、先端がV形状に形成された切削ブレードを該封止剤側から厚み方向途中まで切り込み該分割予定ラインに対応する領域に沿って切削し、該封止剤上面から切削溝底に向かって傾斜した側壁を備えるようにV溝を形成するV溝形成ステップを備える、請求項1または請求項2記載のパッケージ基板の加工方法。
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US11289378B2 (en) | 2019-06-13 | 2022-03-29 | Wolfspeed, Inc. | Methods for dicing semiconductor wafers and semiconductor devices made by the methods |
KR20220014685A (ko) | 2020-07-29 | 2022-02-07 | 삼성전기주식회사 | 전자 소자 패키지 및 이의 제조방법 |
CN115466576B (zh) * | 2022-08-29 | 2023-11-17 | 青岛歌尔微电子研究院有限公司 | Uv胶带、bga磁控溅射封装方法和bga电子产品 |
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