JP6990764B2 - 太陽電池およびその製造方法 - Google Patents
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
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- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/542—Dye sensitized solar cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Photovoltaic Devices (AREA)
Description
図2は一実施形態の太陽電池の模式的断面図である。図2に示す太陽電池100は、結晶シリコン基板の表面に非単結晶シリコン薄膜が設けられた光電変換部60を備えるヘテロ接合太陽電池である。
(シリコン基板の調製)
入射面の面方位が(100)で、厚みが200μmの6インチn型単結晶シリコン基板をアセトン中で洗浄した後、2重量%のHF水溶液に5分間浸漬して表面の酸化シリコン層を除去し、超純水によるリンスを2回行った。この基板を、75℃に保持した5/15重量%のKOH/イソプロピルアルコール水溶液に15分間浸漬して異方性エッチングによりシリコン基板の表面にピラミッド形状の凹凸を形成した。その後、2重量%のHF水溶液に5分間浸漬し、超純水によるリンスを2回行い、常温で乾燥させた。
上記のシリコン基板をCVD装置へ導入し、シリコン基板の一方の面に4nmの真性非晶質シリコン層を製膜し、その上に5nmのp型非晶質シリコン層を製膜した。次に、シリコン基板の他方の面に、5nmの真性非晶質シリコン層を製膜し、その上に、10nmのn型非晶質シリコン層を製膜した。
シリコン薄膜を形成したシリコン基板をスパッタ室へ移送し、p型非晶質シリコン層上およびn型非晶質シリコン層上のそれぞれに100nmのITO層を製膜した。ITO層の製膜には、酸化錫含有量5重量%のITO焼結ターゲットを用い、キャリアガスとしてアルゴン(流量:50sccm)を導入し、パワー密度1W/cm2、基板温度150℃、圧力0.2Paの条件で製膜を行った。
p層側のITO層およびn層側のITO層のそれぞれの表面に、銀ペーストのスクリーン印刷により、グリッド状パターンの集電極を形成し、150℃で1時間の加熱アニールを行った。
p層側のITO層の製膜厚みを30nmに変更したこと以外は比較例1と同様にして、太陽電池を作製した。
比較例1の太陽電池の作製において、p層側のITO層を100nmの膜厚で製膜した後、金属電極の形成前に、ITO層の表面に5%の塩酸をスプレーしてITOのエッチングを行い、168秒後に水洗を行った。エッチング後のITO層の膜厚は30nmであった。n層側のITO層はエッチングを行わなかった。p層側のITO層をエッチングして厚みを減少させたこと以外は、比較例1と同様にして、太陽電池を作製した。
実施例1において、ITO層の表面に塩酸をスプレー後、水洗までの時間を120秒に変更した。エッチング後のITO層の膜厚は50nmであった。それ以外は実施例1と同様にして、太陽電池を作製した。
実施例1において、p層側のITO層の製膜厚みを50nmに変更し、スプレー後水洗までの時間を48秒に変更した。エッチング後のITO層の膜厚は30nmであった。それ以外は実施例1と同様にして、太陽電池を作製した。
<ITO層の膜厚>
走査型電子顕微鏡(日立ハイテクノロジーズ製「S4800」)を用い、10万倍の倍率で太陽電池の断面を観察して、ITO層の膜厚を求めた。エッチング前のITO層の膜厚t0の測定には、実施例1~3と同一の条件でシリコン基板上にITO層を製膜した試料を用いた。エッチング後のITO層の膜厚tの測定には、変換特性を測定後の太陽電池を試料として用いた。
走査型電子顕微鏡を用い、5万倍の倍率で平面観察を行った。得られた顕微鏡像の視野(2.0μm×2.5μm)における結晶粒のそれぞれについて、粒径(投影面積円相当径)を算出し、粒径が5nm以上であるものを対象とした粒径分布の中央値を平均結晶粒径Dとした。
ソーラーシミュレータにより、太陽電池のp層側から太陽電池にAM1.5の光を100mW/cm2の光量で照射して、電流(Isc)、開放電圧(Voc)曲線因子(FF)および最大出力(Pmax)を測定した。
60 光電変換部
1 結晶シリコン基板
2,4 シリコン系薄膜
21,41 真性シリコン系薄膜
22,42 導電型シリコン系薄膜
3,5 透明導電層
7,8 金属電極
9 結晶粒
Claims (8)
- 結晶シリコン基板の受光面上にシリコン系薄膜を備える光電変換部と、前記光電変換部の前記シリコン系薄膜の受光面上に設けられた透明導電層とを備える太陽電池であって、
前記透明導電層は、酸化インジウムを主成分とし、かつ金属酸化物の結晶粒を含み、
前記透明導電層の膜厚tが5~60nmであり、前記金属酸化物の平均結晶粒径Dが35nm以上であり、膜厚tと金属酸化物の平均結晶粒径Dとの比D/tが1以上である、太陽電池。 - 半導体接合を含む光電変換部と、前記光電変換部の受光面に設けられた透明導電層とを備える太陽電池の製造方法であって、
前記透明導電層は、酸化インジウムを主成分とし、かつ金属酸化物の結晶粒を含み、
膜厚t0の透明導電層を製膜する工程、および前記透明導電層をエッチングして膜厚をtに減少させる工程を有し、
t0-tが10~150nmである、太陽電池の製造方法。 - エッチング後の前記透明導電層の膜厚tが5~60nmである、請求項2に記載の太陽電池の製造方法。
- エッチング前の前記透明導電層の膜厚t0が40~200nmである、請求項2または3に記載の太陽電池の製造方法。
- エッチング後の前記透明導電層は、前記金属酸化物の平均結晶粒径Dが35nm以上であり、膜厚tと金属酸化物の平均結晶粒径Dとの比D/tが1以上である、請求項2~4のいずれか1項に記載の太陽電池の製造方法。
- 前記光電変換部は、結晶シリコン基板の受光面上にシリコン系薄膜を備え、
前記シリコン系薄膜上に、前記透明導電層を製膜する、請求項2~5のいずれか1項に記載の太陽電池の製造方法。 - 前記透明導電層がスパッタ法により製膜される請求項2~6のいずれか1項に記載の太陽電池の製造方法。
- 前記透明導電層のエッチングがウェットエッチングにより行われる、請求項2~7のいずれか1項に記載の太陽電池の製造方法。
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JP2009193674A (ja) | 2008-02-12 | 2009-08-27 | Kaneka Corp | 透明導電膜の製造方法およびそれに従って製造される透明導電膜 |
JP2009076939A (ja) | 2008-12-22 | 2009-04-09 | Sharp Corp | 光電変換装置およびその製造方法 |
JP2011054837A (ja) | 2009-09-03 | 2011-03-17 | Kaneka Corp | 結晶シリコン系太陽電池 |
US20110177648A1 (en) | 2010-01-18 | 2011-07-21 | Applied Materials, Inc. | Method of manufacturing thin film solar cells having a high conversion efficiency |
JP2012004187A (ja) | 2010-06-14 | 2012-01-05 | Toshiba Corp | パターン形成方法および積層構造体 |
JP2013152827A (ja) | 2012-01-24 | 2013-08-08 | Kaneka Corp | 透明電極付き基板およびその製造方法 |
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