JP6987017B2 - 反応管ユニットの搬送方法 - Google Patents
反応管ユニットの搬送方法 Download PDFInfo
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- B62B3/06—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor involving means for grappling or securing in place objects to be carried; Loading or unloading equipment for simply clearing the load from the ground
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- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D59/00—Plugs, sleeves, caps, or like rigid or semi-rigid elements for protecting parts of articles or for bundling articles, e.g. protectors for screw-threads, end caps for tubes or for bundling rod-shaped articles
- B65D59/02—Plugs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
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- B01J2219/00011—Laboratory-scale plants
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- B01J2219/00051—Controlling the temperature
- B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
- B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
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Description
最初に、一実施形態に係る搬送方法により搬送可能な反応管ユニットを有する縦型熱処理装置の構成例について説明する。以下では、二重管構造の縦型熱処理装置を説明するが、一重管構造の縦型熱処理装置であってもよい。図1及び図2は縦型熱処理装置の構成例を示す断面図であり、図1は縦断面を示し、図2は横断面を示す。
一実施形態に係る反応管ユニットの搬送方法の一例について説明する。一実施形態に係る反応管ユニットの搬送方法は、例えば新規に縦型熱処理装置を導入する際や既設の反応管を洗浄する際に反応管ユニットを搬送して移動させるときに利用することができる。反応管ユニットは、多数枚のウエハに対して一括で熱処理を行うバッチ式の縦型熱処理装置の複数の構成部品を取り付けて組み立てられる構造体である。構成部品は、例えば反応管、ガス導入管、熱電対等である。反応管は、一重管構造であってもよく、内管及び外管を有する二重管構造であってもよい。一実施形態に係る反応管ユニットの搬送方法によれば、反応管の内部に、反応管の内壁面とガス供給管との衝突を和らげる緩衝部材を取り付け、台車の上に除振部材を介して反応管を載置して搬送する。これにより、台車による反応管ユニットの搬送時の振動を抑制し、また、ガス供給管の振動に起因してガス供給管が反応管に接触し、反応管が破損することを抑制できる。
44 内管
46 外管
76,78,80 ガス供給管
200 緩衝部材
300 規制部材
500 台車
505 反応管支持部
505a 除振部材
506 昇降機構
Claims (8)
- 縦型の反応管の内壁面の長手方向に沿って前記内壁面と間隔を有してガス供給管が設けられた反応管ユニットの搬送方法であって、
前記反応管の内部に、前記内壁面と前記ガス供給管との衝突を和らげる緩衝部材を配置する工程と、
前記緩衝部材が取り付けられた前記反応管ユニットを、台車の上に除振部材を介して載置する工程と、
前記台車を移動させて前記反応管ユニットを搬送する工程と、
を有し、
前記配置する工程において、前記緩衝部材として弾性部材を使用し、弾性力により前記ガス供給管を前記内壁面の方向へ押し付けるように前記緩衝部材を配置する、
反応管ユニットの搬送方法。 - 前記緩衝部材は、前記反応管の内部に、前記反応管の前記内壁面に沿って配置される、
請求項1に記載の反応管ユニットの搬送方法。 - 前記緩衝部材は、前記ガス供給管の前記反応管の中心方向への移動を規制する、
請求項1又は2に記載の反応管ユニットの搬送方法。 - 前記緩衝部材は、弾性部材により形成されている、
請求項1乃至3のいずれか一項に記載の反応管ユニットの搬送方法。 - 前記台車は、前記反応管ユニットを下側から支持する支持部と、前記支持部を昇降させる昇降機構と、を有し、
前記反応管ユニットを搬送する工程では、前記支持部により前記反応管ユニットを下側から支持し、前記昇降機構により前記支持部を上昇させた状態で、前記台車を移動させる、
請求項1乃至4のいずれか一項に記載の反応管ユニットの搬送方法。 - 前記反応管は、内管及び外管の二重管構造を有する、
請求項1乃至5のいずれか一項に記載の反応管ユニットの搬送方法。 - 前記反応管ユニットを搬送する前に、前記内管の移動を規制する規制部材を配置する工程を有する、
請求項6に記載の反応管ユニットの搬送方法。 - 前記規制部材は、前記内管の内壁面と接触して前記内管の移動を規制する、
請求項7に記載の反応管ユニットの搬送方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2018093310A JP6987017B2 (ja) | 2018-05-14 | 2018-05-14 | 反応管ユニットの搬送方法 |
KR1020190052246A KR102435775B1 (ko) | 2018-05-14 | 2019-05-03 | 반응관 유닛의 반송 방법 |
US16/404,033 US10518986B2 (en) | 2018-05-14 | 2019-05-06 | Method for conveying reaction tube unit |
CN201910392649.5A CN110482015B (zh) | 2018-05-14 | 2019-05-13 | 反应管组合件的输送方法 |
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JP2018093310A JP6987017B2 (ja) | 2018-05-14 | 2018-05-14 | 反応管ユニットの搬送方法 |
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JP2019201048A JP2019201048A (ja) | 2019-11-21 |
JP6987017B2 true JP6987017B2 (ja) | 2021-12-22 |
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JP (1) | JP6987017B2 (ja) |
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US11300249B2 (en) * | 2017-12-20 | 2022-04-12 | Praxair Technology, Inc. | Mobile support assembly for holding and transporting a container |
CN111252382B (zh) * | 2020-02-20 | 2022-07-22 | 北京北方华创微电子装备有限公司 | 炉体运输辅助装置 |
JP2023156154A (ja) | 2022-04-12 | 2023-10-24 | 東京エレクトロン株式会社 | 反応管搬送治具及び反応管の搬送方法 |
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JP6706901B2 (ja) * | 2015-11-13 | 2020-06-10 | 東京エレクトロン株式会社 | 処理装置 |
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US10518986B2 (en) | 2019-12-31 |
US20190344981A1 (en) | 2019-11-14 |
CN110482015A (zh) | 2019-11-22 |
CN110482015B (zh) | 2022-06-28 |
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