JP6978318B2 - 表面活性連結基を有するブロックコポリマー、組成物及びそれの方法 - Google Patents
表面活性連結基を有するブロックコポリマー、組成物及びそれの方法 Download PDFInfo
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- JP6978318B2 JP6978318B2 JP2017543930A JP2017543930A JP6978318B2 JP 6978318 B2 JP6978318 B2 JP 6978318B2 JP 2017543930 A JP2017543930 A JP 2017543930A JP 2017543930 A JP2017543930 A JP 2017543930A JP 6978318 B2 JP6978318 B2 JP 6978318B2
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- integer
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- block copolymer
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- alkyl
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- 0 B*(**C)N(*)C(N(*)*)=* Chemical compound B*(**C)N(*)C(N(*)*)=* 0.000 description 4
- ZNOWINSALWCUKY-UHFFFAOYSA-N CC(CO1)(COC1=O)C(OC)=O Chemical compound CC(CO1)(COC1=O)C(OC)=O ZNOWINSALWCUKY-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/0427—Coating with only one layer of a composition containing a polymer binder
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
- C08G63/02—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds
- C08G63/06—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds derived from hydroxycarboxylic acids
- C08G63/08—Lactones or lactides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F293/00—Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule
- C08F293/005—Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule using free radical "living" or "controlled" polymerisation, e.g. using a complexing agent
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
- C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
- C08G63/64—Polyesters containing both carboxylic ester groups and carbonate groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G64/00—Macromolecular compounds obtained by reactions forming a carbonic ester link in the main chain of the macromolecule
- C08G64/02—Aliphatic polycarbonates
- C08G64/0208—Aliphatic polycarbonates saturated
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D167/00—Coating compositions based on polyesters obtained by reactions forming a carboxylic ester link in the main chain; Coating compositions based on derivatives of such polymers
- C09D167/04—Polyesters derived from hydroxycarboxylic acids, e.g. lactones
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D169/00—Coating compositions based on polycarbonates; Coating compositions based on derivatives of polycarbonates
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D169/00—Coating compositions based on polycarbonates; Coating compositions based on derivatives of polycarbonates
- C09D169/005—Polyester-carbonates
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D187/00—Coating compositions based on unspecified macromolecular compounds, obtained otherwise than by polymerisation reactions only involving unsaturated carbon-to-carbon bonds
- C09D187/005—Block or graft polymers not provided for in groups C09D101/00 - C09D185/04
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2438/00—Living radical polymerisation
- C08F2438/01—Atom Transfer Radical Polymerization [ATRP] or reverse ATRP
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2367/00—Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2367/00—Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
- C08J2367/04—Polyesters derived from hydroxy carboxylic acids, e.g. lactones
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2369/00—Characterised by the use of polycarbonates; Derivatives of polycarbonates
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Composite Materials (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Graft Or Block Polymers (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
- Laminated Bodies (AREA)
- Polyethers (AREA)
- Polyesters Or Polycarbonates (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021076132A JP7089618B2 (ja) | 2015-02-20 | 2021-04-28 | 表面活性連結基を有するブロックコポリマー、組成物及びそれの方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/628,002 US10259907B2 (en) | 2015-02-20 | 2015-02-20 | Block copolymers with surface-active junction groups, compositions and processes thereof |
| US14/628,002 | 2015-02-20 | ||
| PCT/EP2016/053415 WO2016131900A1 (en) | 2015-02-20 | 2016-02-18 | Block copolymers with surface-active junction groups, compositions and processes thereof |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021076132A Division JP7089618B2 (ja) | 2015-02-20 | 2021-04-28 | 表面活性連結基を有するブロックコポリマー、組成物及びそれの方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018507301A JP2018507301A (ja) | 2018-03-15 |
| JP2018507301A5 JP2018507301A5 (enExample) | 2020-10-15 |
| JP6978318B2 true JP6978318B2 (ja) | 2021-12-08 |
Family
ID=55443232
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017543930A Active JP6978318B2 (ja) | 2015-02-20 | 2016-02-18 | 表面活性連結基を有するブロックコポリマー、組成物及びそれの方法 |
| JP2021076132A Active JP7089618B2 (ja) | 2015-02-20 | 2021-04-28 | 表面活性連結基を有するブロックコポリマー、組成物及びそれの方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021076132A Active JP7089618B2 (ja) | 2015-02-20 | 2021-04-28 | 表面活性連結基を有するブロックコポリマー、組成物及びそれの方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US10259907B2 (enExample) |
| EP (1) | EP3259292B1 (enExample) |
| JP (2) | JP6978318B2 (enExample) |
| KR (1) | KR102327569B1 (enExample) |
| CN (1) | CN107257813B (enExample) |
| IL (1) | IL253371A0 (enExample) |
| SG (1) | SG11201705648TA (enExample) |
| TW (1) | TWI713494B (enExample) |
| WO (1) | WO2016131900A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR102511757B1 (ko) * | 2015-07-23 | 2023-03-20 | 디아이씨 가부시끼가이샤 | 함불소 화합물, 리빙 중합개시제, 함불소 중합체, 함불소 중합체의 제조 방법 및 레지스트 조성물 |
| US9982097B2 (en) * | 2016-02-11 | 2018-05-29 | International Business Machines Corporation | Thin film self assembly of topcoat-free silicon-containing diblock copolymers |
| WO2017144385A1 (en) * | 2016-02-22 | 2017-08-31 | AZ Electronic Materials (Luxembourg) S.à.r.l. | Block copolymers with linear surface-active junction groups, compositions and processes thereof |
| US9768059B1 (en) * | 2016-04-07 | 2017-09-19 | International Business Machines Corporation | High-chi block copolymers for interconnect structures by directed self-assembly |
| JP2018082033A (ja) | 2016-11-16 | 2018-05-24 | 東芝メモリ株式会社 | パターン形成方法 |
| EP3554830B1 (en) * | 2016-12-14 | 2023-10-18 | Brewer Science Inc. | High-chi block copolymers for directed self-assembly |
| CN108227412A (zh) * | 2016-12-15 | 2018-06-29 | Imec 非营利协会 | 光刻掩模层 |
| US10082736B2 (en) * | 2017-01-13 | 2018-09-25 | International Business Machines Corporation | Approach to lowering extreme ultraviolet exposure dose for inorganic hardmasks for extreme ultraviolet patterning |
| TWI805617B (zh) | 2017-09-15 | 2023-06-21 | 南韓商Lg化學股份有限公司 | 層壓板 |
| JP2019099749A (ja) | 2017-12-06 | 2019-06-24 | 東芝メモリ株式会社 | パターン形成方法、ブロックコポリマー、及びパターン形成材料 |
| US10656527B2 (en) * | 2017-12-21 | 2020-05-19 | International Business Machines Corporation | Patterning material film stack with hard mask layer configured to support selective deposition on patterned resist layer |
| JPWO2019131953A1 (ja) * | 2017-12-27 | 2020-12-24 | Jsr株式会社 | パターン形成方法及び感放射線性組成物 |
| KR102136470B1 (ko) * | 2018-12-24 | 2020-07-22 | (주)서영 | 기판과 평행방향으로 자기조립된 실린더 블록공중합체를 이용한 대면적 나노패턴 제조 방법 |
| WO2020179918A1 (ja) * | 2019-03-06 | 2020-09-10 | Jsr株式会社 | 基板の製造方法及びブロック共重合体 |
| FR3105786A1 (fr) * | 2019-12-31 | 2021-07-02 | Arkema France | Procédé de nanostructuration d’un substrat |
| KR20230119186A (ko) * | 2020-12-17 | 2023-08-16 | 메르크 파텐트 게엠베하 | 지향성 자기 조립을 위한 교호 공중합체 세그먼트로이루어진 조정 가능한 하이 카이 디블록 공중합체 및 그의 적용 |
| WO2022223670A1 (en) * | 2021-04-23 | 2022-10-27 | Merck Patent Gmbh | Multi-pitch tolerable block copolymers with enhanced kinetics for directed self-assembly applications |
| KR20240064273A (ko) * | 2022-11-04 | 2024-05-13 | 주식회사 엘지화학 | 불소계 화합물, 광중합성 조성물, 홀로그램 기록 매체, 이의 제조 방법 및 이를 포함하는 광학 소자 |
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| US5187244A (en) * | 1988-07-22 | 1993-02-16 | Mitsubishi Rayon Co., Ltd. | Preparation process of block copolymers and resulting block copolymers |
| BR9206531A (pt) | 1991-09-23 | 1995-04-25 | Minnesota Mining & Mfg | Composição adesiva sensível a pressão, fita adesiva sensível a pressão, substrato, e, emenda reempastável |
| US5622764A (en) | 1995-06-07 | 1997-04-22 | Minnesota Mining And Manufacturing Company | Sterilization indicators and methods |
| JPH11322869A (ja) * | 1998-05-19 | 1999-11-26 | Jsr Corp | ブロック共重合体の製造方法 |
| NO990119D0 (no) | 1999-01-12 | 1999-01-12 | Jotun As | Blokk-kopolymerer med blokker med perfluorerte sidekjeder, og fremgangsmÕte for fremstilling derav |
| US8133534B2 (en) | 2004-11-22 | 2012-03-13 | Wisconsin Alumni Research Foundation | Methods and compositions for forming patterns with isolated or discrete features using block copolymer materials |
| US8080615B2 (en) | 2007-06-19 | 2011-12-20 | Micron Technology, Inc. | Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide |
| US20090092803A1 (en) | 2007-09-27 | 2009-04-09 | Massachusetts Institute Of Technology | Self-assembly technique applicable to large areas and nanofabrication |
| US7763319B2 (en) | 2008-01-11 | 2010-07-27 | International Business Machines Corporation | Method of controlling orientation of domains in block copolymer films |
| US7989026B2 (en) | 2008-01-12 | 2011-08-02 | International Business Machines Corporation | Method of use of epoxy-containing cycloaliphatic acrylic polymers as orientation control layers for block copolymer thin films |
| US8999492B2 (en) * | 2008-02-05 | 2015-04-07 | Micron Technology, Inc. | Method to produce nanometer-sized features with directed assembly of block copolymers |
| US8425982B2 (en) | 2008-03-21 | 2013-04-23 | Micron Technology, Inc. | Methods of improving long range order in self-assembly of block copolymer films with ionic liquids |
| US8119017B2 (en) | 2008-06-17 | 2012-02-21 | Hitachi Global Storage Technologies Netherlands B.V. | Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks |
| EP2476729B1 (en) * | 2009-09-10 | 2016-08-17 | National University Corporation Gunma University | Method for producing stereo complex crystals of polylactic acid, polylactic acid, and molded body, synthetic fiber, porous body and ion conductor comprising same |
| US8623458B2 (en) | 2009-12-18 | 2014-01-07 | International Business Machines Corporation | Methods of directed self-assembly, and layered structures formed therefrom |
| US8828253B2 (en) | 2010-09-09 | 2014-09-09 | Asml Netherlands B.V. | Lithography using self-assembled polymers |
| US9299381B2 (en) | 2011-02-07 | 2016-03-29 | Wisconsin Alumni Research Foundation | Solvent annealing block copolymers on patterned substrates |
| US8642086B2 (en) | 2011-03-31 | 2014-02-04 | International Business Machines Corporation | Antimicrobial compositions, methods of preparation thereof, and uses thereof |
| CN103562245B (zh) * | 2011-04-22 | 2015-11-25 | Lg化学株式会社 | 新的二嵌段共聚物、其制备方法以及使用其形成纳米图案的方法 |
| NL2009002A (en) | 2011-07-18 | 2013-01-21 | Asml Netherlands Bv | Method for providing a template for a self-assemblable polymer for use in device lithography. |
| KR20140090595A (ko) | 2011-09-06 | 2014-07-17 | 코넬 유니버시티 | 블럭 공중합체 및 그것을 사용한 리소그래피 패턴화 |
| KR102018771B1 (ko) | 2012-01-13 | 2019-09-05 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피에서의 사용을 위한 자가조립가능한 중합체 및 방법들 |
| US9314819B2 (en) | 2012-02-10 | 2016-04-19 | Board Of Regents, The University Of Texas System | Anhydride copolymer top coats for orientation control of thin film block copolymers |
| CN104254557B (zh) | 2012-02-10 | 2016-06-29 | 得克萨斯大学体系董事会 | 用于纳米平版印刷术的聚丙交酯/含硅嵌段共聚物 |
| US9440196B2 (en) * | 2012-02-21 | 2016-09-13 | Dow Global Technologies Llc | Composite membrane |
| US9127113B2 (en) | 2012-05-16 | 2015-09-08 | Rohm And Haas Electronic Materials Llc | Polystyrene-polyacrylate block copolymers, methods of manufacture thereof and articles comprising the same |
| US9012545B2 (en) | 2012-08-31 | 2015-04-21 | Rohm And Haas Electronic Materials Llc | Composition and method for preparing pattern on a substrate |
| US20140377465A1 (en) | 2013-06-24 | 2014-12-25 | Rohm And Haas Electronic Materials Llc | Neutral layer polymers, methods of manufacture thereof and articles comprising the same |
| US9382444B2 (en) * | 2013-06-24 | 2016-07-05 | Dow Global Technologies Llc | Neutral layer polymers, methods of manufacture thereof and articles comprising the same |
| US9802400B2 (en) | 2013-06-24 | 2017-10-31 | Dow Global Technologies Llc | Orientation control layer formed on a free top surface of a first block copolymer from a mixture of first and second block copolymers |
| US9574107B2 (en) | 2015-02-16 | 2017-02-21 | International Business Machines Corporation | Fluoro-alcohol additives for orientation control of block copolymers |
-
2015
- 2015-02-20 US US14/628,002 patent/US10259907B2/en active Active
-
2016
- 2016-02-18 WO PCT/EP2016/053415 patent/WO2016131900A1/en not_active Ceased
- 2016-02-18 JP JP2017543930A patent/JP6978318B2/ja active Active
- 2016-02-18 KR KR1020177026238A patent/KR102327569B1/ko active Active
- 2016-02-18 CN CN201680010655.4A patent/CN107257813B/zh active Active
- 2016-02-18 SG SG11201705648TA patent/SG11201705648TA/en unknown
- 2016-02-18 EP EP16706819.6A patent/EP3259292B1/en active Active
- 2016-02-19 TW TW105104994A patent/TWI713494B/zh active
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2017
- 2017-07-09 IL IL253371A patent/IL253371A0/en unknown
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2021
- 2021-04-28 JP JP2021076132A patent/JP7089618B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TWI713494B (zh) | 2020-12-21 |
| EP3259292A1 (en) | 2017-12-27 |
| SG11201705648TA (en) | 2017-08-30 |
| US10259907B2 (en) | 2019-04-16 |
| EP3259292B1 (en) | 2020-04-08 |
| JP7089618B2 (ja) | 2022-06-22 |
| JP2018507301A (ja) | 2018-03-15 |
| CN107257813A (zh) | 2017-10-17 |
| US20160244557A1 (en) | 2016-08-25 |
| IL253371A0 (en) | 2017-09-28 |
| JP2021130821A (ja) | 2021-09-09 |
| CN107257813B (zh) | 2020-08-21 |
| KR20170140171A (ko) | 2017-12-20 |
| WO2016131900A1 (en) | 2016-08-25 |
| KR102327569B1 (ko) | 2021-11-17 |
| TW201638125A (zh) | 2016-11-01 |
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