JP6957616B2 - センサ基板およびセンサ装置 - Google Patents
センサ基板およびセンサ装置 Download PDFInfo
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- JP6957616B2 JP6957616B2 JP2019526183A JP2019526183A JP6957616B2 JP 6957616 B2 JP6957616 B2 JP 6957616B2 JP 2019526183 A JP2019526183 A JP 2019526183A JP 2019526183 A JP2019526183 A JP 2019526183A JP 6957616 B2 JP6957616 B2 JP 6957616B2
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- 238000001514 detection method Methods 0.000 claims description 173
- 239000000758 substrate Substances 0.000 claims description 132
- 239000004020 conductor Substances 0.000 claims description 99
- 244000126211 Hericium coralloides Species 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 239000013618 particulate matter Substances 0.000 description 42
- 239000007769 metal material Substances 0.000 description 22
- 239000000919 ceramic Substances 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 13
- 238000007747 plating Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 238000002161 passivation Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000011572 manganese Substances 0.000 description 6
- 239000010953 base metal Substances 0.000 description 5
- 238000005219 brazing Methods 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 230000020169 heat generation Effects 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000004071 soot Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910016006 MoSi Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910004349 Ti-Al Inorganic materials 0.000 description 1
- 229910004692 Ti—Al Inorganic materials 0.000 description 1
- NEIHULKJZQTQKJ-UHFFFAOYSA-N [Cu].[Ag] Chemical compound [Cu].[Ag] NEIHULKJZQTQKJ-UHFFFAOYSA-N 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0042—Investigating dispersion of solids
- G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/10—Internal combustion engine [ICE] based vehicles
- Y02T10/40—Engine management systems
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
2・・第1検知電極
2a・・正極
2b・・負極
3・・第2検知電極
3a・・正極
3b・・負極
4・・発熱部
5・・導体層
6・・接続導体
10・・センサ基板
11・・リード端子
20・・センサ装置
Claims (4)
- 上面および下面を有する絶縁基板と、
前記絶縁基板の上面に位置するとともに、第1端子部と、第1負極及び第1正極を有する第1くし歯状電極と、前記第1端子部と前記第1くし歯状電極とを接続する第1連結部と、を有する第1検知電極と、
前記絶縁基板の下面に位置するとともに、第2端子部と、第2負極及び第2正極を有する第2くし歯状電極と、前記第2端子部と前記第2くし歯状電極とを接続する第2連結部と、を有する第2検知電極と、
前記第1検知電極と前記第2検知電極とに挟まれた部分において前記絶縁基板の内部に位置する、少なくとも1層の導体層を含む発熱部とを備えており、
前記発熱部は、端子部分と、該端子部分と前記導体層とを接続するとともに前記導体層の線幅よりも大きな線幅を有する接続導体と、を更に含み、
前記第1負極の複数のくし歯部は、前記第1正極の複数のくし歯部と互いにかみあうように対向して位置しており、
前記第2負極の複数のくし歯部は、前記第2正極の複数のくし歯部と互いにかみあうように対向して位置しており、
前記導体層は、平面透視において、
前記第1負極のくし歯部のそれぞれの端部にまたがって位置するとともに、続いて、前記第1正極のくし歯部のそれぞれの端部にまたがって位置するように、前記絶縁基板の外周部に配置されており、
前記第2負極のくし歯部のそれぞれの端部にまたがって位置するとともに、続いて、前記第2正極のくし歯部のそれぞれの端部にまたがって位置するように、前記絶縁基板の外周部に配置されており、
前記導体層と前記第1検知電極との間における前記絶縁基板の厚さと、前記導体層と前記第2検知電極との間における前記絶縁基板の厚さと、前記接続導体と前記第1連結部との間における前記絶縁基板の厚さと、前記接続導体と前記第2連結部との間における前記絶縁基板の厚さとが同じであり、
前記導体層は、前記第1検知電極に近接して前記絶縁基板の上面直下に位置するとともに前記絶縁基板のみを介して前記第1検知電極と対向して配置された第1導体層と、前記第2検知電極に近接して前記絶縁基板の下面直上に位置するとともに前記絶縁基板のみを介して前記第2検知電極と対向して配置された第2導体層とを有しているセンサ基板。 - 前記第1導体層と前記第2導体層とは、供給される電力が互いに異なる、請求項1記載のセンサ基板。
- 前記発熱部の前記端子部分は、前記絶縁基板の前記上面または前記下面の少なくともいずれか一方に位置している請求項1または請求項2記載のセンサ基板。
- 請求項1〜3のいずれか1項記載のセンサ基板と、
前記第1検知電極および前記第2検知電極に電力を供給する電源とを備えるセンサ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017125161 | 2017-06-27 | ||
JP2017125161 | 2017-06-27 | ||
PCT/JP2018/016610 WO2019003612A1 (ja) | 2017-06-27 | 2018-04-24 | センサ基板およびセンサ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019003612A1 JPWO2019003612A1 (ja) | 2020-04-16 |
JP6957616B2 true JP6957616B2 (ja) | 2021-11-02 |
Family
ID=64742828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019526183A Active JP6957616B2 (ja) | 2017-06-27 | 2018-04-24 | センサ基板およびセンサ装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11513095B2 (ja) |
EP (1) | EP3647777A4 (ja) |
JP (1) | JP6957616B2 (ja) |
WO (1) | WO2019003612A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020034349A (ja) * | 2018-08-28 | 2020-03-05 | イビデン株式会社 | 粒子状物質検出センサ素子 |
JP2020034348A (ja) * | 2018-08-28 | 2020-03-05 | イビデン株式会社 | 粒子状物質検出センサ素子 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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DE2913866A1 (de) * | 1979-04-06 | 1980-10-23 | Bosch Gmbh Robert | Messfuehler fuer die bestimmung von bestandteilen in stroemenden gasen |
JPH01299451A (ja) * | 1988-05-27 | 1989-12-04 | Toshiba Corp | ガスセンサ |
JP2704190B2 (ja) * | 1988-10-11 | 1998-01-26 | 日成ビルド工業株式会社 | 降雪センサ |
DE102004043121A1 (de) * | 2004-09-07 | 2006-03-09 | Robert Bosch Gmbh | Sensorelement für Partikelsensoren und Verfahren zum Betrieb desselben |
DE102006009066A1 (de) * | 2005-04-01 | 2006-10-05 | Robert Bosch Gmbh | Sensorelement für Partikelsensoren und Verfahren zum Betrieb desselben |
DE102006055520A1 (de) * | 2006-11-24 | 2008-05-29 | Robert Bosch Gmbh | Vorrichtung und Verfahren zur Überprüfung der Funktionsfähigkeit bzw. zur Plausibilisierung eines auf einem interdigitalen Elektrodensystem basierenden Sensors sowie ein Sensor zur Detektion von Teilchen in einem Gasstrom und dessen Verwendung |
EP2147292A1 (en) * | 2007-04-27 | 2010-01-27 | Ceramatec, Inc. | Particulate matter sensor |
US9027387B2 (en) * | 2007-10-09 | 2015-05-12 | University Of Florida Research Foundation, Inc. | Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors |
US8225640B2 (en) | 2008-12-11 | 2012-07-24 | Delphi Technologies, Inc. | Soot sensor and method for sensing soot |
JP6248964B2 (ja) * | 2014-06-16 | 2017-12-20 | 株式会社デンソー | 粒子状物質検出装置 |
US10393693B2 (en) | 2014-10-17 | 2019-08-27 | Amotech Co., Ltd. | Flat plate-type oxygen sensor element |
JP2016217849A (ja) * | 2015-05-19 | 2016-12-22 | 株式会社デンソー | 粒子状物質検出センサ |
JP6536507B2 (ja) * | 2015-09-15 | 2019-07-03 | 株式会社デンソー | 粒子状物質検出センサ |
KR101724499B1 (ko) * | 2015-12-11 | 2017-04-07 | 현대자동차 주식회사 | 입자상 물질 센서 및 이를 이용한 측정방법 |
JP6406237B2 (ja) | 2015-12-17 | 2018-10-17 | 株式会社デンソー | センサ素子 |
US10539493B2 (en) * | 2016-07-25 | 2020-01-21 | Denso Corporation | Particulate matter detection sensor and particulate matter detection apparatus |
-
2018
- 2018-04-24 WO PCT/JP2018/016610 patent/WO2019003612A1/ja unknown
- 2018-04-24 JP JP2019526183A patent/JP6957616B2/ja active Active
- 2018-04-24 US US16/626,963 patent/US11513095B2/en active Active
- 2018-04-24 EP EP18823804.2A patent/EP3647777A4/en active Pending
Also Published As
Publication number | Publication date |
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JPWO2019003612A1 (ja) | 2020-04-16 |
EP3647777A1 (en) | 2020-05-06 |
EP3647777A4 (en) | 2021-03-17 |
US20200141893A1 (en) | 2020-05-07 |
WO2019003612A1 (ja) | 2019-01-03 |
US11513095B2 (en) | 2022-11-29 |
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