JP6912203B2 - 閉塞装置 - Google Patents
閉塞装置 Download PDFInfo
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- JP6912203B2 JP6912203B2 JP2017002875A JP2017002875A JP6912203B2 JP 6912203 B2 JP6912203 B2 JP 6912203B2 JP 2017002875 A JP2017002875 A JP 2017002875A JP 2017002875 A JP2017002875 A JP 2017002875A JP 6912203 B2 JP6912203 B2 JP 6912203B2
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- 230000000903 blocking effect Effects 0.000 title claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 104
- 238000005192 partition Methods 0.000 claims description 25
- 238000005096 rolling process Methods 0.000 claims description 10
- 230000009471 action Effects 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 3
- 239000011796 hollow space material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229920006169 Perfluoroelastomer Polymers 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
- E05F15/00—Power-operated mechanisms for wings
- E05F15/50—Power-operated mechanisms for wings using fluid-pressure actuators
- E05F15/57—Power-operated mechanisms for wings using fluid-pressure actuators for vertically-sliding wings
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
- E05F5/00—Braking devices, e.g. checks; Stops; Buffers
- E05F5/06—Buffers or stops limiting opening of swinging wings, e.g. floor or wall stops
- E05F5/08—Buffers or stops limiting opening of swinging wings, e.g. floor or wall stops with springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/316—Guiding of the slide
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
- F16K31/163—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member the fluid acting on a piston
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
- E05Y2999/00—Subject-matter not otherwise provided for in this subclass
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
Description
Claims (10)
- 隔壁(6)の開口部(4)を真空閉塞するための閉塞装置であって、
縦変位方向(9)に平行な方向について、前記閉塞装置が開状態にある開位置から中間位置に閉塞要素(1)を駆動し、かつ、前記縦変位方向(9)に対して垂直な横変位方向(10)について、前記中間位置から前記閉塞装置が閉状態にある閉位置まで前記閉塞要素(1)を駆動し、かつ、前記縦変位方向(9)に対して平行に延在する縦軸線を有し、かつ、前記閉塞装置のハウジング(8)の外側に案内されて支持部材(14)に対して固定されている少なくとも1つのロッド(2)を有している閉塞ユニット(26)と、
前記閉塞要素(1)が開位置、中間位置および閉位置のそれぞれにある際の始端位置、中腹位置および終端位置の間で、前記縦変位方向(9)に対して平行な方向について変位可能な中継ユニット(18)と、
前記中継ユニット(18)および前記支持部材(14)の間に配置され、前記中継ユニット(18)が始端位置から中腹位置に変位する際に前記支持部材(14)を連動させ、これにより前記支持部材(14)を縦変位方向(9)について前記ハウジング(8)に対して変位させる少なくとも1つのばね(25)と、
前記中継ユニット(18)が中腹位置から終端位置に変位する際に前記支持部材(14)を縦変位方向に平行な方向についてさらに変位することを防止し、これにより前記支持部材(14)が前記ハウジング(8)に対して横変位方向(10)について変位させる制動装置と、を備え、
前記閉塞装置が、ガイドレール(22)および前記ガイドレール(22)に沿って変位可能に配置されているキャリッジ(23)を有する少なくとも1つの縦リニアガイド(19)および少なくとも1つの斜方リニアガイド(20)を備え、
前記縦リニアガイド(19)の前記ガイドレール(22)が縦変位方向(9)に対して平行に配置され、前記斜方リニアガイド(20)の前記ガイドレール(22)が、縦変位方向(9)および横変位方向(10)のそれぞれに対して傾斜して配置されている平面に沿っている斜方変位方向(21)に対して平行に配置され、
前記中継ユニット(18)が前記少なくとも1つの縦リニアガイド(19)により前記ハウジング(8)に対して縦変位方向(9)に変位可能に案内され、かつ、前記支持部材(14)が前記少なくとも1つの斜方リニアガイド(20)により前記中継ユニット(18)に対して斜方変位方向(21)に変位可能に案内されることを特徴とする閉塞装置。 - 請求項1記載の閉塞装置において、前記キャリッジ(23)が、転動体により前記ガイドレール(22)に対して変位可能に配置されていることを特徴とする閉塞装置。
- 請求項1または2記載の閉塞装置において、前記制動装置が、前記閉塞要素(1)の開位置において無負荷になって基底位置にあり、前記閉塞装置の閉塞に際して実現される前記閉塞ユニット(26)の制動を減衰させて作用位置で変形する当接ばね(28)を備えていることを特徴とする閉塞装置。
- 請求項3記載の閉塞装置において、前記当接ばね(28)が、前記閉塞装置の閉塞に際して実現される前記閉塞ユニット(26)の制動を減衰させ、前記当接ばね(28)に対して当接する停止部(29)によるばね変形を通じて撓むばね脚(28a)を備え、前記当接ばね(28)の基底位置において、前記ばね脚(28a)が、少なくとも前記閉塞装置の閉塞に際して前記ばね脚(28a)に対して前記停止部(29)が当接するところの部分において、堅固な支持部(30)から離間し、前記当接ばね(28)の作用位置において、前記ばね脚(28a)が、当該部分において前記支持部(30)に接触することを特徴とする閉塞装置。
- 請求項1〜4のうちいずれか1つに記載の閉塞装置において、前記斜方変位方向(21)が前記縦変位方向(9)と45°以下の角度(24)をなしていることを特徴とする閉塞装置。
- 請求項1〜5のうちいずれか1つに記載の閉塞装置において、前記斜方変位方向(21)が前記縦変位方向(9)と4°以上の角度(24)をなしていることを特徴とする閉塞装置。
- 請求項1〜6のうちいずれか1つに記載の閉塞装置において、前記斜方変位方向(21)が前記縦変位方向(9)と5°〜20°の範囲の角度(24)をなしていることを特徴とする閉塞装置。
- 請求項1〜7のうちいずれか1つに記載の閉塞装置において、前記ロッド(2)が前記縦変位方向(9)に対して平行な縦軸線(13)を有していることを特徴とする閉塞装置。
- 請求項1〜8のうちいずれか1つに記載の閉塞装置において、前記ロッド(2)の縦軸線(13)の両側のそれぞれに縦リニアガイド(19)および斜方リニアガイド(20)が配置されていることを特徴とする閉塞装置。
- 請求項1〜9のうちいずれか1つに記載の閉塞装置において、前記中継ユニット(18)、前記支持部材(14)、前記少なくとも1つの縦リニアガイド(19)および前記少なくとも1つの斜方リニアガイド(20)が、前記ハウジング(8)の中空空間に配置されていることを特徴とする閉塞装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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AT152016 | 2016-01-19 | ||
ATA15/2016 | 2016-01-19 |
Publications (2)
Publication Number | Publication Date |
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JP2017129272A JP2017129272A (ja) | 2017-07-27 |
JP6912203B2 true JP6912203B2 (ja) | 2021-08-04 |
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ID=59314419
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Application Number | Title | Priority Date | Filing Date |
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JP2017002875A Active JP6912203B2 (ja) | 2016-01-19 | 2017-01-11 | 閉塞装置 |
Country Status (6)
Country | Link |
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US (1) | US9957745B2 (ja) |
JP (1) | JP6912203B2 (ja) |
KR (1) | KR20170087033A (ja) |
CN (1) | CN107013694B (ja) |
SG (1) | SG10201700178XA (ja) |
TW (1) | TWI705212B (ja) |
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DE102019129344A1 (de) | 2019-10-30 | 2021-05-06 | Vat Holding Ag | Vakuumventil |
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CN112593799B (zh) * | 2020-12-03 | 2021-09-14 | 常州市大成真空技术有限公司 | 一种推门机构及真空板阀 |
CN113464673A (zh) * | 2021-05-26 | 2021-10-01 | 中国核电工程有限公司 | 核燃料转运水下密封闸门 |
DE102021114421A1 (de) * | 2021-06-04 | 2022-12-08 | Vat Holding Ag | Ventilplatte zum Abdichten einer Ventilöffnung eines Vakuumventils |
DE102021114422A1 (de) | 2021-06-04 | 2022-12-08 | Vat Holding Ag | Vakuumventil |
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TWI541465B (zh) | 2009-10-27 | 2016-07-11 | Vat控股股份有限公司 | 用於真空閥之封閉單元 |
DE102010053411B4 (de) * | 2009-12-15 | 2023-07-06 | Vat Holding Ag | Vakuumventil |
JP2011127190A (ja) | 2009-12-18 | 2011-06-30 | Showa Denko Kk | インライン式成膜装置、磁気記録媒体の製造方法、及びゲートバルブ |
WO2011091455A1 (de) * | 2010-01-29 | 2011-08-04 | Vat Holding Ag | TÜR ZUM VERSCHLIEßEN EINER ÖFFNUNG |
KR101085241B1 (ko) | 2010-04-23 | 2011-11-21 | 주식회사 뉴파워 프라즈마 | 게이트밸브어셈블리와 이를 포함하는 기판처리시스템 |
JP5533839B2 (ja) | 2011-11-04 | 2014-06-25 | Smc株式会社 | 無摺動型ゲートバルブ |
KR101293590B1 (ko) | 2011-12-16 | 2013-08-13 | 주식회사 뉴파워 프라즈마 | 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템 |
KR101375280B1 (ko) * | 2012-04-06 | 2014-03-17 | 프리시스 주식회사 | 게이트 밸브 |
KR101376045B1 (ko) | 2012-04-06 | 2014-03-18 | 프리시스 주식회사 | 게이트 밸브 |
EP2728226B1 (de) * | 2012-10-31 | 2015-03-25 | VAT Holding AG | Vakuumventil |
US8960641B2 (en) | 2012-11-14 | 2015-02-24 | Vat Holding Ag | Vacuum valve |
EP2749798B1 (de) * | 2012-12-27 | 2016-03-02 | VAT Holding AG | Vakuumschieberventil |
JP5963091B2 (ja) | 2013-07-10 | 2016-08-03 | Smc株式会社 | 無摺動型ゲートバルブ |
TWI656293B (zh) * | 2014-04-25 | 2019-04-11 | 瑞士商Vat控股股份有限公司 | 閥 |
US10302225B2 (en) | 2015-03-09 | 2019-05-28 | Vat Holding Ag | Vacuum valve |
KR101738598B1 (ko) | 2015-07-31 | 2017-05-22 | 프리시스 주식회사 | 양방향 게이트밸브 |
-
2016
- 2016-12-16 TW TW105141771A patent/TWI705212B/zh active
-
2017
- 2017-01-03 CN CN201710002141.0A patent/CN107013694B/zh active Active
- 2017-01-10 SG SG10201700178XA patent/SG10201700178XA/en unknown
- 2017-01-11 JP JP2017002875A patent/JP6912203B2/ja active Active
- 2017-01-12 US US15/404,386 patent/US9957745B2/en active Active
- 2017-01-16 KR KR1020170007013A patent/KR20170087033A/ko not_active Application Discontinuation
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KR20170087033A (ko) | 2017-07-27 |
JP2017129272A (ja) | 2017-07-27 |
TW201728846A (zh) | 2017-08-16 |
US20170204647A1 (en) | 2017-07-20 |
CN107013694B (zh) | 2019-10-29 |
SG10201700178XA (en) | 2017-08-30 |
US9957745B2 (en) | 2018-05-01 |
CN107013694A (zh) | 2017-08-04 |
TWI705212B (zh) | 2020-09-21 |
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