JP6884082B2 - 膜厚測定装置、基板検査装置、膜厚測定方法および基板検査方法 - Google Patents

膜厚測定装置、基板検査装置、膜厚測定方法および基板検査方法 Download PDF

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Publication number
JP6884082B2
JP6884082B2 JP2017197782A JP2017197782A JP6884082B2 JP 6884082 B2 JP6884082 B2 JP 6884082B2 JP 2017197782 A JP2017197782 A JP 2017197782A JP 2017197782 A JP2017197782 A JP 2017197782A JP 6884082 B2 JP6884082 B2 JP 6884082B2
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Japan
Prior art keywords
substrate
data
unit
film
linear
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Japanese (ja)
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JP2019070619A5 (https=
JP2019070619A (ja
Inventor
友宏 松尾
友宏 松尾
清水　英樹
英樹 清水
田中　淳
淳 田中
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
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Priority to JP2017197782A priority Critical patent/JP6884082B2/ja
Priority to TW107134582A priority patent/TWI692614B/zh
Priority to KR1020180119811A priority patent/KR102159863B1/ko
Priority to CN201811184370.XA priority patent/CN109655005B/zh
Publication of JP2019070619A publication Critical patent/JP2019070619A/ja
Publication of JP2019070619A5 publication Critical patent/JP2019070619A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/27—Structural arrangements therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2017197782A 2017-10-11 2017-10-11 膜厚測定装置、基板検査装置、膜厚測定方法および基板検査方法 Active JP6884082B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017197782A JP6884082B2 (ja) 2017-10-11 2017-10-11 膜厚測定装置、基板検査装置、膜厚測定方法および基板検査方法
TW107134582A TWI692614B (zh) 2017-10-11 2018-10-01 膜厚測定裝置、基板檢查裝置、膜厚測定方法及基板檢查方法
KR1020180119811A KR102159863B1 (ko) 2017-10-11 2018-10-08 막두께 측정 장치, 기판 검사 장치, 막두께 측정 방법 및 기판 검사 방법
CN201811184370.XA CN109655005B (zh) 2017-10-11 2018-10-11 膜厚测量装置、基板检查装置、膜厚测量方法以及基板检查方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017197782A JP6884082B2 (ja) 2017-10-11 2017-10-11 膜厚測定装置、基板検査装置、膜厚測定方法および基板検査方法

Publications (3)

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JP2019070619A JP2019070619A (ja) 2019-05-09
JP2019070619A5 JP2019070619A5 (https=) 2020-09-10
JP6884082B2 true JP6884082B2 (ja) 2021-06-09

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JP2017197782A Active JP6884082B2 (ja) 2017-10-11 2017-10-11 膜厚測定装置、基板検査装置、膜厚測定方法および基板検査方法

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JP (1) JP6884082B2 (https=)
KR (1) KR102159863B1 (https=)
CN (1) CN109655005B (https=)
TW (1) TWI692614B (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210116271A (ko) * 2020-03-17 2021-09-27 도쿄엘렉트론가부시키가이샤 막 두께 측정 시스템 및 막 두께 측정 방법

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129724A (en) * 1991-01-29 1992-07-14 Wyko Corporation Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sample
JPH05240628A (ja) * 1992-03-02 1993-09-17 Toshiba Corp パターン検査装置
JPH0712524A (ja) * 1993-06-24 1995-01-17 Sony Corp 膜厚測定装置
JP3385994B2 (ja) * 1998-02-27 2003-03-10 株式会社ニコン 像検出装置
US6159075A (en) 1999-10-13 2000-12-12 Vlsi Technology, Inc. Method and system for in-situ optimization for semiconductor wafers in a chemical mechanical polishing process
US6927847B2 (en) * 2001-09-13 2005-08-09 Hitachi High-Technologies Corporation Method and apparatus for inspecting pattern defects
JP2004363085A (ja) * 2003-05-09 2004-12-24 Ebara Corp 荷電粒子線による検査装置及びその検査装置を用いたデバイス製造方法
JP2005321564A (ja) * 2004-05-07 2005-11-17 Canon Inc 多層膜が形成された光学素子の製造方法
US7339682B2 (en) * 2005-02-25 2008-03-04 Verity Instruments, Inc. Heterodyne reflectometer for film thickness monitoring and method for implementing
JP4786925B2 (ja) * 2005-04-04 2011-10-05 東京エレクトロン株式会社 基板処理方法および基板処理装置
DE202007010784U1 (de) * 2007-08-03 2007-10-04 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Kontaktloses Messsystem
JP2010034133A (ja) * 2008-07-25 2010-02-12 Just:Kk 多結晶シリコンウエハのクラック検出装置
CN201318934Y (zh) * 2008-11-07 2009-09-30 四川南光电气有限责任公司 光学膜厚测试仪
KR101849443B1 (ko) 2010-12-20 2018-04-16 에베 그룹 에. 탈너 게엠베하 웨이퍼의 장착을 위한 수용 수단
JP6004517B2 (ja) * 2011-04-19 2016-10-12 芝浦メカトロニクス株式会社 基板検査装置、基板検査方法及び該基板検査装置の調整方法
JP5717711B2 (ja) * 2012-12-07 2015-05-13 東京エレクトロン株式会社 基板の基準画像作成方法、基板の欠陥検査方法、基板の基準画像作成装置、基板の欠陥検査ユニット、プログラム及びコンピュータ記憶媒体
JP2014190797A (ja) * 2013-03-27 2014-10-06 Tokushima Densei Kk シリコンウェハの欠陥検査装置
CN104425308B (zh) * 2013-09-09 2018-03-09 东京毅力科创株式会社 测定装置、基板处理系统和测定方法
JP2015127653A (ja) * 2013-12-27 2015-07-09 レーザーテック株式会社 検査装置、及び検査方法
JP6035279B2 (ja) * 2014-05-08 2016-11-30 東京エレクトロン株式会社 膜厚測定装置、膜厚測定方法、プログラム及びコンピュータ記憶媒体
KR102521159B1 (ko) 2014-11-25 2023-04-13 피디에프 솔루션즈, 인코포레이티드 반도체 제조 공정을 위한 개선된 공정 제어 기술
JP6244329B2 (ja) * 2015-05-12 2017-12-06 東京エレクトロン株式会社 基板の検査方法、基板処理システム及びコンピュータ記憶媒体

Also Published As

Publication number Publication date
CN109655005B (zh) 2021-02-26
TW201930817A (zh) 2019-08-01
TWI692614B (zh) 2020-05-01
KR102159863B1 (ko) 2020-09-24
JP2019070619A (ja) 2019-05-09
KR20190040907A (ko) 2019-04-19
CN109655005A (zh) 2019-04-19

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