CN201318934Y - 光学膜厚测试仪 - Google Patents
光学膜厚测试仪 Download PDFInfo
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- CN201318934Y CN201318934Y CNU2008201412278U CN200820141227U CN201318934Y CN 201318934 Y CN201318934 Y CN 201318934Y CN U2008201412278 U CNU2008201412278 U CN U2008201412278U CN 200820141227 U CN200820141227 U CN 200820141227U CN 201318934 Y CN201318934 Y CN 201318934Y
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CNU2008201412278U CN201318934Y (zh) | 2008-11-07 | 2008-11-07 | 光学膜厚测试仪 |
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CNU2008201412278U CN201318934Y (zh) | 2008-11-07 | 2008-11-07 | 光学膜厚测试仪 |
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CN201318934Y true CN201318934Y (zh) | 2009-09-30 |
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CNU2008201412278U Expired - Fee Related CN201318934Y (zh) | 2008-11-07 | 2008-11-07 | 光学膜厚测试仪 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102494620A (zh) * | 2011-12-06 | 2012-06-13 | 成都中科唯实仪器有限责任公司 | 全自动光学测厚仪及其折射/透射率数据处理方法 |
CN109341625A (zh) * | 2018-11-23 | 2019-02-15 | 成都云材智慧数据科技有限公司 | 一种负极材料涂布厚度检测系统 |
CN109655005A (zh) * | 2017-10-11 | 2019-04-19 | 株式会社斯库林集团 | 膜厚测量装置、基板检查装置、膜厚测量方法以及基板检查方法 |
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- 2008-11-07 CN CNU2008201412278U patent/CN201318934Y/zh not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102494620A (zh) * | 2011-12-06 | 2012-06-13 | 成都中科唯实仪器有限责任公司 | 全自动光学测厚仪及其折射/透射率数据处理方法 |
CN102494620B (zh) * | 2011-12-06 | 2013-08-07 | 成都中科唯实仪器有限责任公司 | 全自动光学测厚仪及其折射/透射率数据处理方法 |
CN109655005A (zh) * | 2017-10-11 | 2019-04-19 | 株式会社斯库林集团 | 膜厚测量装置、基板检查装置、膜厚测量方法以及基板检查方法 |
CN109341625A (zh) * | 2018-11-23 | 2019-02-15 | 成都云材智慧数据科技有限公司 | 一种负极材料涂布厚度检测系统 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
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Owner name: CHENGDU RANKUUM MACHINERY LTD. Free format text: FORMER OWNER: SICHUAN NANGUANG ELECTRIC CO., LTD. Effective date: 20110706 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 610100 NO. 115, XINGGUANG WEST ROAD, CHENGDU ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE, CHENGDU CITY, SICHUAN PROVINCE TO: 610100 NO. 115, XINGGUANG WEST ROAD, CHENGDU ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE |
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TR01 | Transfer of patent right |
Effective date of registration: 20110706 Address after: 610100 No. 115, Xingguang West Road, Chengdu economic and Technological Development Zone Patentee after: Chengdu Rankuum Machinery Ltd. Address before: 610100, No. 115, Xingguang West Road, Chengdu economic and Technological Development Zone, Sichuan, Chengdu Patentee before: Sichuan Nanguang Electric Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090930 Termination date: 20161107 |