JP6879177B2 - 窒化物半導体素子の製造方法 - Google Patents
窒化物半導体素子の製造方法 Download PDFInfo
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- JP6879177B2 JP6879177B2 JP2017225868A JP2017225868A JP6879177B2 JP 6879177 B2 JP6879177 B2 JP 6879177B2 JP 2017225868 A JP2017225868 A JP 2017225868A JP 2017225868 A JP2017225868 A JP 2017225868A JP 6879177 B2 JP6879177 B2 JP 6879177B2
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- nitride semiconductor
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- etching
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- 150000004767 nitrides Chemical class 0.000 title claims description 98
- 239000004065 semiconductor Substances 0.000 title claims description 97
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 50
- 238000005530 etching Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 26
- 230000004888 barrier function Effects 0.000 claims description 24
- 238000001312 dry etching Methods 0.000 claims description 6
- 238000001039 wet etching Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 83
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 83
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- 239000002994 raw material Substances 0.000 description 8
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- 229910002704 AlGaN Inorganic materials 0.000 description 5
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- 239000010936 titanium Substances 0.000 description 5
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
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- 239000002210 silicon-based material Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 2
- 230000005533 two-dimensional electron gas Effects 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
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Description
SiNのエッチングレート:〜0.3(nm/分)
BHFの条件(濃度)にも左右されるが、SiO2を選択的に除去可能なエッチングレートの差を確保することは容易である。また、SiN層23の膜質は、先の再成長工程において成膜温度以上の高温に晒されることにより硬化しているので、BHFに対するSiN層23のエッチングレートは低下している。しかしながらこの工程では、SiO2層22を選択的にエッチングすることによりSiN層23を浮かせて剥離することができるので、SiN層23の硬化は問題とならない。なお、この工程において、SiN層21を同時に除去し、新たなSiN層21をその直後に成膜してもよい。
Claims (5)
- 窒化物半導体素子の製造方法であって、
第1のSiN層、SiO2層、及び第2のSiN層を窒化物半導体層上に順に形成する工程と、
ドライエッチングにより前記第1のSiN層、前記SiO2層、及び前記第2のSiN層に開口を形成する第1のエッチング工程と、
ウェットエッチングにより前記開口における前記SiO2層の側面を前記第1及び第2のSiN層の側面に対して後退させる第2のエッチング工程と、
前記第1のエッチング工程と前記第2のエッチング工程との間、若しくは前記第2のエッチング工程の後に、前記開口を通じて前記窒化物半導体層をエッチングすることにより前記窒化物半導体層に凹部を形成する工程と、
窒化物半導体領域を前記凹部内に成長させる成長工程と、
前記第2のSiN層及び前記第2のSiN層上の堆積物を前記SiO2層とともに除去する除去工程と、
を含む、窒化物半導体素子の製造方法。 - 前記成長工程の際、前記第1のSiN層は少なくとも5nmの厚さを有し、前記SiO2層は少なくとも100nmの厚さを有する、請求項1に記載の窒化物半導体素子の製造方法。
- 前記第2のエッチング工程における、前記第1及び第2のSiN層の側面に対する前記SiO2層の側面の後退量は100nm〜200nmの範囲内である、請求項1または2に記載の窒化物半導体素子の製造方法。
- 前記窒化物半導体領域の厚さは、前記SiO2層の厚さ以下である、請求項1〜3のいずれか1項に記載の窒化物半導体素子の製造方法。
- 前記除去工程の後に、前記窒化物半導体領域上にオーミック電極を形成する第1の電極形成工程を更に含み、
前記窒化物半導体層は、チャネル層と、前記チャネル層上に設けられ、前記チャネル層よりも大きなバンドギャップを有するバリア層とを少なくとも含み、
前記窒化物半導体領域の不純物濃度は前記チャネル層及び前記バリア層の不純物濃度よりも高く、
前記凹部の深さは前記チャネル層に達する、請求項1〜4のいずれか1項に記載の窒化物半導体素子の製造方法。
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